JPS6356261U - - Google Patents

Info

Publication number
JPS6356261U
JPS6356261U JP14829186U JP14829186U JPS6356261U JP S6356261 U JPS6356261 U JP S6356261U JP 14829186 U JP14829186 U JP 14829186U JP 14829186 U JP14829186 U JP 14829186U JP S6356261 U JPS6356261 U JP S6356261U
Authority
JP
Japan
Prior art keywords
reaction chamber
shutter
chamber
entrance
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14829186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14829186U priority Critical patent/JPS6356261U/ja
Publication of JPS6356261U publication Critical patent/JPS6356261U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP14829186U 1986-09-27 1986-09-27 Pending JPS6356261U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14829186U JPS6356261U (enrdf_load_stackoverflow) 1986-09-27 1986-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14829186U JPS6356261U (enrdf_load_stackoverflow) 1986-09-27 1986-09-27

Publications (1)

Publication Number Publication Date
JPS6356261U true JPS6356261U (enrdf_load_stackoverflow) 1988-04-15

Family

ID=31062420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14829186U Pending JPS6356261U (enrdf_load_stackoverflow) 1986-09-27 1986-09-27

Country Status (1)

Country Link
JP (1) JPS6356261U (enrdf_load_stackoverflow)

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