JPS5642387A - Manufacture of solid state color image pickup element board - Google Patents
Manufacture of solid state color image pickup element boardInfo
- Publication number
- JPS5642387A JPS5642387A JP11774079A JP11774079A JPS5642387A JP S5642387 A JPS5642387 A JP S5642387A JP 11774079 A JP11774079 A JP 11774079A JP 11774079 A JP11774079 A JP 11774079A JP S5642387 A JPS5642387 A JP S5642387A
- Authority
- JP
- Japan
- Prior art keywords
- image pickup
- pickup element
- bonding
- elements
- solid image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007787 solid Substances 0.000 title abstract 7
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000000926 separation method Methods 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE:To enhance mass production of the solid state color image pickup element board by simultaneously bonding a number of arrayed color separation filters with the same number of solid image pickup elements arranged when forming the color solid image pickup element board integrated by bonding the color separation filters on the solid image pickup elements. CONSTITUTION:A number of solid image pickup element 23 are arrayed on an Si wafer as a solid image pickup element substrate 31, and a number of mosaic shape or stripe shape color separation filters 26 are arranged corresponding to the picture elements of the elements 23 as a color separation filter substrate 22. Then, grooves 22b are opened correspondingly to the bonding pad portion 25 of the elements 23 on the surface of forming the filters 26 of the filter substrate 22, and the substrates 21 and 22 are bonded using an adhesive which is hardened by irradiating ultraviolet rays or heat treatment. Thus, it can be manufactured in mass production, and the dusts adhered when bonding them are introduced into the grooves 22b, and improper bonding can be eliminated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54117740A JPS6041873B2 (en) | 1979-09-13 | 1979-09-13 | Manufacturing method of color solid-state image sensor plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54117740A JPS6041873B2 (en) | 1979-09-13 | 1979-09-13 | Manufacturing method of color solid-state image sensor plate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5642387A true JPS5642387A (en) | 1981-04-20 |
JPS6041873B2 JPS6041873B2 (en) | 1985-09-19 |
Family
ID=14719119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54117740A Expired JPS6041873B2 (en) | 1979-09-13 | 1979-09-13 | Manufacturing method of color solid-state image sensor plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6041873B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57173971A (en) * | 1981-04-20 | 1982-10-26 | Matsushita Electric Ind Co Ltd | Manufacture of solid state image pickup device |
JP2007522680A (en) * | 2004-02-11 | 2007-08-09 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー. | Wafer packaging and singulation method |
-
1979
- 1979-09-13 JP JP54117740A patent/JPS6041873B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57173971A (en) * | 1981-04-20 | 1982-10-26 | Matsushita Electric Ind Co Ltd | Manufacture of solid state image pickup device |
JPH0250628B2 (en) * | 1981-04-20 | 1990-11-02 | Matsushita Electric Ind Co Ltd | |
JP2007522680A (en) * | 2004-02-11 | 2007-08-09 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー. | Wafer packaging and singulation method |
JP4708366B2 (en) * | 2004-02-11 | 2011-06-22 | サムスン エレクトロニクス カンパニー リミテッド | Wafer packaging and singulation method |
Also Published As
Publication number | Publication date |
---|---|
JPS6041873B2 (en) | 1985-09-19 |
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