JPH047657U - - Google Patents

Info

Publication number
JPH047657U
JPH047657U JP4822490U JP4822490U JPH047657U JP H047657 U JPH047657 U JP H047657U JP 4822490 U JP4822490 U JP 4822490U JP 4822490 U JP4822490 U JP 4822490U JP H047657 U JPH047657 U JP H047657U
Authority
JP
Japan
Prior art keywords
thin film
film growth
light source
ultraviolet light
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4822490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0650540Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4822490U priority Critical patent/JPH0650540Y2/ja
Publication of JPH047657U publication Critical patent/JPH047657U/ja
Application granted granted Critical
Publication of JPH0650540Y2 publication Critical patent/JPH0650540Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP4822490U 1990-05-09 1990-05-09 薄膜成長装置 Expired - Lifetime JPH0650540Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4822490U JPH0650540Y2 (ja) 1990-05-09 1990-05-09 薄膜成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4822490U JPH0650540Y2 (ja) 1990-05-09 1990-05-09 薄膜成長装置

Publications (2)

Publication Number Publication Date
JPH047657U true JPH047657U (enrdf_load_stackoverflow) 1992-01-23
JPH0650540Y2 JPH0650540Y2 (ja) 1994-12-21

Family

ID=31564842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4822490U Expired - Lifetime JPH0650540Y2 (ja) 1990-05-09 1990-05-09 薄膜成長装置

Country Status (1)

Country Link
JP (1) JPH0650540Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51108927U (enrdf_load_stackoverflow) * 1975-02-25 1976-08-31

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51108927U (enrdf_load_stackoverflow) * 1975-02-25 1976-08-31

Also Published As

Publication number Publication date
JPH0650540Y2 (ja) 1994-12-21

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