JPS63180924U - - Google Patents

Info

Publication number
JPS63180924U
JPS63180924U JP7163487U JP7163487U JPS63180924U JP S63180924 U JPS63180924 U JP S63180924U JP 7163487 U JP7163487 U JP 7163487U JP 7163487 U JP7163487 U JP 7163487U JP S63180924 U JPS63180924 U JP S63180924U
Authority
JP
Japan
Prior art keywords
infrared light
rod lens
light source
reactive ion
ion etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7163487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0617282Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7163487U priority Critical patent/JPH0617282Y2/ja
Publication of JPS63180924U publication Critical patent/JPS63180924U/ja
Application granted granted Critical
Publication of JPH0617282Y2 publication Critical patent/JPH0617282Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP7163487U 1987-05-15 1987-05-15 リアクティブイオンエッチング装置 Expired - Lifetime JPH0617282Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7163487U JPH0617282Y2 (ja) 1987-05-15 1987-05-15 リアクティブイオンエッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7163487U JPH0617282Y2 (ja) 1987-05-15 1987-05-15 リアクティブイオンエッチング装置

Publications (2)

Publication Number Publication Date
JPS63180924U true JPS63180924U (enrdf_load_stackoverflow) 1988-11-22
JPH0617282Y2 JPH0617282Y2 (ja) 1994-05-02

Family

ID=30914364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7163487U Expired - Lifetime JPH0617282Y2 (ja) 1987-05-15 1987-05-15 リアクティブイオンエッチング装置

Country Status (1)

Country Link
JP (1) JPH0617282Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0617282Y2 (ja) 1994-05-02

Similar Documents

Publication Publication Date Title
JPS63180924U (enrdf_load_stackoverflow)
JPH01151238U (enrdf_load_stackoverflow)
JPH0227810U (enrdf_load_stackoverflow)
JPS63172048U (enrdf_load_stackoverflow)
JPS6169824U (enrdf_load_stackoverflow)
JPH0327343U (enrdf_load_stackoverflow)
JPS6339162U (enrdf_load_stackoverflow)
JPS62180939U (enrdf_load_stackoverflow)
JPS63165844U (enrdf_load_stackoverflow)
JPS6452233U (enrdf_load_stackoverflow)
JPS6216327U (enrdf_load_stackoverflow)
JPS63140060U (enrdf_load_stackoverflow)
JPS637481U (enrdf_load_stackoverflow)
JPS61172456U (enrdf_load_stackoverflow)
JPS63167655U (enrdf_load_stackoverflow)
JPS6163711U (enrdf_load_stackoverflow)
JPS6212943U (enrdf_load_stackoverflow)
JPH0160531U (enrdf_load_stackoverflow)
JPS63135249U (enrdf_load_stackoverflow)
JPH0171436U (enrdf_load_stackoverflow)
JPH0176029U (enrdf_load_stackoverflow)
JPS63170468U (enrdf_load_stackoverflow)
JPH0165131U (enrdf_load_stackoverflow)
JPH0178023U (enrdf_load_stackoverflow)
JPS6391156U (enrdf_load_stackoverflow)