JPS6244435U - - Google Patents
Info
- Publication number
- JPS6244435U JPS6244435U JP13526185U JP13526185U JPS6244435U JP S6244435 U JPS6244435 U JP S6244435U JP 13526185 U JP13526185 U JP 13526185U JP 13526185 U JP13526185 U JP 13526185U JP S6244435 U JPS6244435 U JP S6244435U
- Authority
- JP
- Japan
- Prior art keywords
- photo
- reaction chamber
- pressure oil
- vapor pressure
- cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
Description
第１図は本考案光ＣＶＤ装置の概略を示す模式
図、第２図は本考案装置と従来装置との成膜速度
の経時変化を示す特性図である。
１……反応室、２……照射窓、３……光源、１
１……傾斜面、１２……防止液、１３……流出口
、１４……回収口、１５……浄化フイルタ、１６
……タンク、１７……送り出しポンプ。
FIG. 1 is a schematic diagram showing the outline of the optical CVD apparatus of the present invention, and FIG. 2 is a characteristic diagram showing the change over time in the film formation rate of the apparatus of the present invention and the conventional apparatus. 1...Reaction chamber, 2...Irradiation window, 3...Light source, 1
DESCRIPTION OF SYMBOLS 1... Inclined surface, 12... Prevention liquid, 13... Outlet, 14... Collection port, 15... Purification filter, 16
... Tank, 17 ... Delivery pump.
Claims (1)
を光源から輻射された光エネルギにより分解し薄
膜を形成する光ＣＶＤ装置であつて、上記光源か
ら輻射される光エネルギは装置の底部に傾斜して
設けられた照射窓から反応室内に供給されると共
に、上記照射窓の反応室側傾斜面に該傾斜面への
膜の付着を防止する防止液が移動自在に設けられ
ていることを特徴とした光ＣＶＤ装置。 (2) 上記防止液は低蒸気圧油脂であることを特
徴とした実用新案登録請求の範囲第１項記載の光
ＣＶＤ装置。 (3) 上記低蒸気圧油脂はパーフロポリエールで
あることを特徴とした実用新案登録請求の範囲第
２項記載の光ＣＶＤ装置。[Claims for Utility Model Registration] (1) A photo-CVD device that introduces a reaction gas into a reaction chamber and decomposes the reaction gas using light energy radiated from a light source to form a thin film, The light energy is supplied into the reaction chamber from an irradiation window provided at an angle at the bottom of the apparatus, and a prevention liquid that prevents the film from adhering to the slanted surface moves to the slanted surface of the irradiation window on the reaction chamber side. An optical CVD device characterized by being freely installed. (2) The photo-CVD apparatus according to claim 1, wherein the prevention liquid is a low vapor pressure oil or fat. (3) The photo-CVD apparatus according to claim 2, wherein the low vapor pressure oil is perfluoropolier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13526185U JPH058670Y2 (en) | 1985-09-04 | 1985-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13526185U JPH058670Y2 (en) | 1985-09-04 | 1985-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244435U true JPS6244435U (en) | 1987-03-17 |
| JPH058670Y2 JPH058670Y2 (en) | 1993-03-04 |
Family
ID=31037276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13526185U Expired - Lifetime JPH058670Y2 (en) | 1985-09-04 | 1985-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058670Y2 (en) |
-
1985
- 1985-09-04 JP JP13526185U patent/JPH058670Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058670Y2 (en) | 1993-03-04 |
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