JPS61159367U - - Google Patents
Info
- Publication number
- JPS61159367U JPS61159367U JP4073085U JP4073085U JPS61159367U JP S61159367 U JPS61159367 U JP S61159367U JP 4073085 U JP4073085 U JP 4073085U JP 4073085 U JP4073085 U JP 4073085U JP S61159367 U JPS61159367 U JP S61159367U
- Authority
- JP
- Japan
- Prior art keywords
- window
- reaction tank
- liquid
- light source
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000006303 photolysis reaction Methods 0.000 claims 1
- 230000015843 photosynthesis, light reaction Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の一実施例の断面図、第２図は
従来装置の断面図、第３図は本考案の異なる実施
例の断面図である。
１：反応槽、２：基板、４：透明窓、５：光源
、８：排気管、１１：オイル槽、１２：オイル、
１３：オイル供給口、１４：オイル流路、１５：
オイル溜め。
FIG. 1 is a sectional view of one embodiment of the present invention, FIG. 2 is a sectional view of a conventional device, and FIG. 3 is a sectional view of a different embodiment of the present invention. 1: reaction tank, 2: substrate, 4: transparent window, 5: light source, 8: exhaust pipe, 11: oil tank, 12: oil,
13: Oil supply port, 14: Oil flow path, 15:
oil reservoir.
Claims (1)
必要な光を窓を介して入射させるものにおいて、
窓が水平面に対して傾斜しており、その上縁に蒸
気圧が低く光源からの光を透過する液体の供給手
段、下縁に該液体の収集手段を備えたことを特徴
とする光ＣＶＤ装置。 In a device that allows the light necessary for photolysis inside the reaction tank to enter through a window from a light source outside the reaction tank,
An optical CVD apparatus characterized in that the window is inclined with respect to a horizontal plane, and the upper edge thereof is provided with a means for supplying a liquid that has a low vapor pressure and transmits light from a light source, and the lower edge thereof is provided with a means for collecting the liquid. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4073085U JPS61159367U (en) | 1985-03-20 | 1985-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4073085U JPS61159367U (en) | 1985-03-20 | 1985-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61159367U true JPS61159367U (en) | 1986-10-02 |
Family
ID=30549898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4073085U Pending JPS61159367U (en) | 1985-03-20 | 1985-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61159367U (en) |
-
1985
- 1985-03-20 JP JP4073085U patent/JPS61159367U/ja active Pending
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