JPH0585516B2 - - Google Patents

Info

Publication number
JPH0585516B2
JPH0585516B2 JP32197488A JP32197488A JPH0585516B2 JP H0585516 B2 JPH0585516 B2 JP H0585516B2 JP 32197488 A JP32197488 A JP 32197488A JP 32197488 A JP32197488 A JP 32197488A JP H0585516 B2 JPH0585516 B2 JP H0585516B2
Authority
JP
Japan
Prior art keywords
shaft
pulling
single crystal
weight sensor
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP32197488A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02167884A (ja
Inventor
Yasuaki Shinomya
Yasunaka Shinohara
Kyoshi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP32197488A priority Critical patent/JPH02167884A/ja
Publication of JPH02167884A publication Critical patent/JPH02167884A/ja
Publication of JPH0585516B2 publication Critical patent/JPH0585516B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP32197488A 1988-12-22 1988-12-22 単結晶育成装置 Granted JPH02167884A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32197488A JPH02167884A (ja) 1988-12-22 1988-12-22 単結晶育成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32197488A JPH02167884A (ja) 1988-12-22 1988-12-22 単結晶育成装置

Publications (2)

Publication Number Publication Date
JPH02167884A JPH02167884A (ja) 1990-06-28
JPH0585516B2 true JPH0585516B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-12-07

Family

ID=18138507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32197488A Granted JPH02167884A (ja) 1988-12-22 1988-12-22 単結晶育成装置

Country Status (1)

Country Link
JP (1) JPH02167884A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2519626B2 (ja) * 1992-04-16 1996-07-31 株式会社伸精機 結晶育成装置
CN102534760A (zh) * 2011-12-28 2012-07-04 苏州优晶光电科技有限公司 用于监测晶体生长的装置
CN110344108A (zh) * 2019-08-21 2019-10-18 眉山博雅新材料有限公司 上提拉真空炉

Also Published As

Publication number Publication date
JPH02167884A (ja) 1990-06-28

Similar Documents

Publication Publication Date Title
US5096677A (en) Single crystal pulling apparatus
GB1322582A (en) Pressure- and temperature-controlled crystal growing apparatus
JPH0585516B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US5330729A (en) Single crystal pulling apparatus
JPH0157080B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE69011619T2 (de) Verfahren und Vorrichtung zur Einstellung der Sauerstoff-Konzentration in einem Silizium-Einkristall.
KR970043344A (ko) 단결정 제조장치 및 이를 이용한 단결정 제조방법
CN217948340U (zh) 一种自动供气式碳化硅晶体生长炉
DE2516197A1 (de) Waegevorrichtung insbesondere zur automatischen regelung von kristallzuchtvorgaengen
JPS55130895A (en) Single crystal preparing method and apparatus therefor
JP2796687B2 (ja) 単結晶製造方法およびその装置
JP2849537B2 (ja) 単結晶引き上げ方法
GB1284017A (en) Apparatus for growing crystalline bodies
EP0416799B1 (en) A single crystal pulling apparatus
JPH05208893A (ja) 単結晶引上げ装置およびその制御方法
JP3041990B2 (ja) 単結晶育成方法及び装置
JP2560383B2 (ja) 単結晶製造装置
JPH07138040A (ja) 光ファイバ用母材の製造装置
JPS61122187A (ja) 単結晶引上機
JPH09315887A (ja) 単結晶の製造方法及びそれに用いられる単結晶製造装置
JPH0639353B2 (ja) シリコン単結晶の引上げ装置
JPS6272589A (ja) 単結晶引上げ方法およびその装置
JP2616002B2 (ja) 高解離圧化合物半導体単結晶成長方法及びその装置
JPH04182379A (ja) 単結晶引上げ装置
JPS60200892A (ja) 単結晶半導体の引上げ装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees