GB1284017A - Apparatus for growing crystalline bodies - Google Patents

Apparatus for growing crystalline bodies

Info

Publication number
GB1284017A
GB1284017A GB3672470A GB3672470A GB1284017A GB 1284017 A GB1284017 A GB 1284017A GB 3672470 A GB3672470 A GB 3672470A GB 3672470 A GB3672470 A GB 3672470A GB 1284017 A GB1284017 A GB 1284017A
Authority
GB
United Kingdom
Prior art keywords
rod
crystal
furnace body
clear
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3672470A
Inventor
Francis Forrat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to GB3672470A priority Critical patent/GB1284017A/en
Publication of GB1284017A publication Critical patent/GB1284017A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30Mechanisms for rotating or moving either the melt or the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

1284017 Zone melting COMMISSARIAT A L'ENERGIE ATOMIQUE 29 July 1970 36724/70 Heading B1S [Also in Division F4] Apparatus for growing crystals comprises a water cooled furnace body 10 provided with a base 12, a domed cover 14, resistance heating elements 36 and a melt containing crucible 16. In operation, a crystal is pulled from melt 34 under vacuum, or in a nitrogen, argon or, helium or reducing atmosphere introduced via inlet 44 and plenum chamber 40, whilst the crucible 16 and the crystal pulling rod 20 are rotated by their respective motors 50, 50'. The crystal is pulled by rod 20 being raised, the crucible 16 likewise being raised at a relative rate determined by the desired crystal growth rate. This desired raising is effected by corresponding raising of the crucible and rod supports 52, 52' along hollow columns 54, 54' to which the supports are splined, in response to the drives from motors 56, 56', 58 and 58' transmitted through screw and nut gearing (Fig. 4 not shown) mounted within the columns. Once a desired crystal length has been pulled and detached from melt 34 and subsequently cooled, jack 80 raises shaft 72, and with it lateral arms 70, 88 which carry the cover 14 and the crystal pulling rod 20 with its drive and support means, respectively, so that cover 14 and rod 20 together with the crystal grown on it are moved clear of furnace body 10. In this raised position (Fig. 2 not shown), keys 76 on shaft 72, which previously prevented the shaft 72 rotating, by running in keyways 78 in bearing members 74 used to guide and mount the shaft, are raised clear of the keyways 78, to allow rotation of the shaft 72 and so pivoting of the arms 70, 88 and the cover 14 and crystal puffing rod 20 clear of the furnace body 10, whereby the crystal may be removed from the rod. Slots 77 in a U sectioned supporting frame 28 which carries the bearing members 74, limit the degree of pivoting of the arms 70, 88 to an amount just sufficient for the rod 20 to swing clear of furnace body 10. Clear access to furnace body 10 or crucible 16 may be obtained after withdrawal of rod 20 from cover 14 by swinging the latter about pivot pin 68 clear of the furnace body (Fig. 3 not shown) after release of latch 71.
GB3672470A 1970-07-29 1970-07-29 Apparatus for growing crystalline bodies Expired GB1284017A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3672470A GB1284017A (en) 1970-07-29 1970-07-29 Apparatus for growing crystalline bodies

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3672470A GB1284017A (en) 1970-07-29 1970-07-29 Apparatus for growing crystalline bodies

Publications (1)

Publication Number Publication Date
GB1284017A true GB1284017A (en) 1972-08-02

Family

ID=10390679

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3672470A Expired GB1284017A (en) 1970-07-29 1970-07-29 Apparatus for growing crystalline bodies

Country Status (1)

Country Link
GB (1) GB1284017A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2116871A (en) * 1982-03-16 1983-10-05 Vnii Monokristallov Apparatus for growing single crystals from a melt using the Czochralski method
EP0498652A1 (en) * 1991-02-08 1992-08-12 Shin-Etsu Handotai Company Limited A single crystal pulling apparatus
CN114622273A (en) * 2022-04-08 2022-06-14 宁夏中晶半导体材料有限公司 External charging device and method for installing horizontal magnetic field single crystal furnace
WO2023142104A1 (en) * 2022-01-30 2023-08-03 浙江晶盛机电股份有限公司 Single crystal furnace

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2116871A (en) * 1982-03-16 1983-10-05 Vnii Monokristallov Apparatus for growing single crystals from a melt using the Czochralski method
EP0498652A1 (en) * 1991-02-08 1992-08-12 Shin-Etsu Handotai Company Limited A single crystal pulling apparatus
WO2023142104A1 (en) * 2022-01-30 2023-08-03 浙江晶盛机电股份有限公司 Single crystal furnace
US11821690B2 (en) 2022-01-30 2023-11-21 Zhejiang Jingsheng M & E Co., Ltd Single crystal furnace
CN114622273A (en) * 2022-04-08 2022-06-14 宁夏中晶半导体材料有限公司 External charging device and method for installing horizontal magnetic field single crystal furnace

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Legal Events

Date Code Title Description
PS Patent sealed
435 Patent endorsed 'licences of right' on the date specified (sect. 35/1949)
PCNP Patent ceased through non-payment of renewal fee