GB1284017A - Apparatus for growing crystalline bodies - Google Patents
Apparatus for growing crystalline bodiesInfo
- Publication number
- GB1284017A GB1284017A GB3672470A GB3672470A GB1284017A GB 1284017 A GB1284017 A GB 1284017A GB 3672470 A GB3672470 A GB 3672470A GB 3672470 A GB3672470 A GB 3672470A GB 1284017 A GB1284017 A GB 1284017A
- Authority
- GB
- United Kingdom
- Prior art keywords
- rod
- crystal
- furnace body
- clear
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
1284017 Zone melting COMMISSARIAT A L'ENERGIE ATOMIQUE 29 July 1970 36724/70 Heading B1S [Also in Division F4] Apparatus for growing crystals comprises a water cooled furnace body 10 provided with a base 12, a domed cover 14, resistance heating elements 36 and a melt containing crucible 16. In operation, a crystal is pulled from melt 34 under vacuum, or in a nitrogen, argon or, helium or reducing atmosphere introduced via inlet 44 and plenum chamber 40, whilst the crucible 16 and the crystal pulling rod 20 are rotated by their respective motors 50, 50'. The crystal is pulled by rod 20 being raised, the crucible 16 likewise being raised at a relative rate determined by the desired crystal growth rate. This desired raising is effected by corresponding raising of the crucible and rod supports 52, 52' along hollow columns 54, 54' to which the supports are splined, in response to the drives from motors 56, 56', 58 and 58' transmitted through screw and nut gearing (Fig. 4 not shown) mounted within the columns. Once a desired crystal length has been pulled and detached from melt 34 and subsequently cooled, jack 80 raises shaft 72, and with it lateral arms 70, 88 which carry the cover 14 and the crystal pulling rod 20 with its drive and support means, respectively, so that cover 14 and rod 20 together with the crystal grown on it are moved clear of furnace body 10. In this raised position (Fig. 2 not shown), keys 76 on shaft 72, which previously prevented the shaft 72 rotating, by running in keyways 78 in bearing members 74 used to guide and mount the shaft, are raised clear of the keyways 78, to allow rotation of the shaft 72 and so pivoting of the arms 70, 88 and the cover 14 and crystal puffing rod 20 clear of the furnace body 10, whereby the crystal may be removed from the rod. Slots 77 in a U sectioned supporting frame 28 which carries the bearing members 74, limit the degree of pivoting of the arms 70, 88 to an amount just sufficient for the rod 20 to swing clear of furnace body 10. Clear access to furnace body 10 or crucible 16 may be obtained after withdrawal of rod 20 from cover 14 by swinging the latter about pivot pin 68 clear of the furnace body (Fig. 3 not shown) after release of latch 71.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3672470A GB1284017A (en) | 1970-07-29 | 1970-07-29 | Apparatus for growing crystalline bodies |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3672470A GB1284017A (en) | 1970-07-29 | 1970-07-29 | Apparatus for growing crystalline bodies |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1284017A true GB1284017A (en) | 1972-08-02 |
Family
ID=10390679
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3672470A Expired GB1284017A (en) | 1970-07-29 | 1970-07-29 | Apparatus for growing crystalline bodies |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1284017A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2116871A (en) * | 1982-03-16 | 1983-10-05 | Vnii Monokristallov | Apparatus for growing single crystals from a melt using the Czochralski method |
EP0498652A1 (en) * | 1991-02-08 | 1992-08-12 | Shin-Etsu Handotai Company Limited | A single crystal pulling apparatus |
CN114622273A (en) * | 2022-04-08 | 2022-06-14 | 宁夏中晶半导体材料有限公司 | External charging device and method for installing horizontal magnetic field single crystal furnace |
WO2023142104A1 (en) * | 2022-01-30 | 2023-08-03 | 浙江晶盛机电股份有限公司 | Single crystal furnace |
-
1970
- 1970-07-29 GB GB3672470A patent/GB1284017A/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2116871A (en) * | 1982-03-16 | 1983-10-05 | Vnii Monokristallov | Apparatus for growing single crystals from a melt using the Czochralski method |
EP0498652A1 (en) * | 1991-02-08 | 1992-08-12 | Shin-Etsu Handotai Company Limited | A single crystal pulling apparatus |
WO2023142104A1 (en) * | 2022-01-30 | 2023-08-03 | 浙江晶盛机电股份有限公司 | Single crystal furnace |
US11821690B2 (en) | 2022-01-30 | 2023-11-21 | Zhejiang Jingsheng M & E Co., Ltd | Single crystal furnace |
CN114622273A (en) * | 2022-04-08 | 2022-06-14 | 宁夏中晶半导体材料有限公司 | External charging device and method for installing horizontal magnetic field single crystal furnace |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
435 | Patent endorsed 'licences of right' on the date specified (sect. 35/1949) | ||
PCNP | Patent ceased through non-payment of renewal fee |