CN114622273A - External charging device and method for installing horizontal magnetic field single crystal furnace - Google Patents
External charging device and method for installing horizontal magnetic field single crystal furnace Download PDFInfo
- Publication number
- CN114622273A CN114622273A CN202210362850.0A CN202210362850A CN114622273A CN 114622273 A CN114622273 A CN 114622273A CN 202210362850 A CN202210362850 A CN 202210362850A CN 114622273 A CN114622273 A CN 114622273A
- Authority
- CN
- China
- Prior art keywords
- crucible
- single crystal
- rotating
- magnetic field
- suspension arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000000725 suspension Substances 0.000 claims abstract description 38
- 238000007789 sealing Methods 0.000 claims description 33
- 230000007246 mechanism Effects 0.000 claims description 12
- 238000000605 extraction Methods 0.000 claims description 5
- 230000006698 induction Effects 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 10
- 229910002804 graphite Inorganic materials 0.000 abstract description 9
- 239000010439 graphite Substances 0.000 abstract description 9
- 239000002994 raw material Substances 0.000 abstract description 4
- 238000005457 optimization Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B30/00—Production of single crystals or homogeneous polycrystalline material with defined structure characterised by the action of electric or magnetic fields, wave energy or other specific physical conditions
- C30B30/04—Production of single crystals or homogeneous polycrystalline material with defined structure characterised by the action of electric or magnetic fields, wave energy or other specific physical conditions using magnetic fields
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses an external charging device for mounting a horizontal magnetic field single crystal furnace, which belongs to the technical field of single crystal furnaces. The shaft sleeve rotates through the roller bearing, the angle of the suspension arm is adjusted, the electric push rod is controlled to stretch, the horizontal angle of the crucible is adjusted, the crucible is adsorbed through the sucker, the overall flexibility is high, a mechanical mode is adopted to replace a traditional manual loading mode, the labor intensity of workers is reduced, the loading time is shortened, the working efficiency is greatly improved, meanwhile, a graphite piece and a graphite felt cannot be rubbed in the loading process, and the phenomenon that carbon powder is mixed in raw materials is avoided.
Description
Technical Field
The invention relates to the technical field of single crystal furnaces, in particular to an external furnace charging device and method for installing a horizontal magnetic field single crystal furnace.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method, wherein the diameter of the single crystal can be influenced by factors such as temperature, pulling speed and rotating speed, crucible tracking speed and rotating speed, flow rate of protective gas and the like in the growing process. The temperature mainly determines whether the crystal can be formed, and the speed directly influences the inherent quality of the crystal, and the influence can only be known through detection after the single crystal is pulled out.
In the single crystal pulling process charging link, charging is needed, the conventional material transferring mode generally adopts an artificial charging mode, the artificial charging time is long, the labor intensity is high, the working efficiency is reduced, other single crystal furnaces cannot be looked after, and meanwhile, carbon powder is mixed in raw materials due to the fact that a graphite piece and a graphite felt are rubbed in the artificial charging process.
Disclosure of Invention
The invention aims at the problems and provides an external furnace charging device for installing a horizontal magnetic field single crystal furnace to solve the problems.
The invention is realized in such a way that the external charging device for installing the horizontal magnetic field single crystal furnace comprises a supporting seat, wherein a rotating assembly is arranged at the top of the supporting seat, and a bearing end cover is fixedly arranged at the top of the rotating assembly;
an electric push rod is arranged on the outer side of the rotating assembly, a suspension arm is arranged at the movable end of the electric push rod and the outer side of the rotating assembly, a rotating mechanism is arranged at one end, far away from the rotating assembly, of the suspension arm, and a sucking disc is arranged at the bottom of the rotating mechanism;
the bottom of sucking disc is provided with the crucible, be provided with seal assembly between crucible and the sucking disc.
In order to lift the crucible, it is preferable that, as the external charging device for installing the horizontal magnetic field single crystal furnace of the present invention, a movable end of the electric push rod is rotatably connected to a bottom of the suspension arm through a first connecting lug, and another end of the electric push rod is rotatably connected to an outer side of the rotating assembly through a third connecting lug.
In order to adjust the angle of the suspension arm, the external charging device for installing the horizontal magnetic field single crystal furnace is preferably used, the suspension arm and the rotating assembly are rotatably connected through the connecting lug II, and the suspension arm can be conveniently adjusted in angle.
In order to rotate the whole furnace, the rotating assembly preferably comprises a support shaft, a shaft sleeve, an upper roller bearing and a lower roller bearing, the support shaft is fixedly arranged at the top of the support seat, the shaft sleeve is arranged on the outer side of the support shaft, and the upper roller bearing and the lower roller bearing are arranged between the support shaft and the shaft sleeve from top to bottom.
In order to adjust the angle of the crucible, the rotating mechanism of the external charging device for installing the horizontal magnetic field single crystal furnace preferably comprises a fourth connecting lug, a rotating shaft and a connecting sleeve, wherein the fourth connecting lug is rotatably installed at one end of the suspension arm far away from the rotating assembly, the bottom of the fourth connecting lug is fixedly connected with the rotating shaft, and the connecting sleeve is arranged on the outer side of the rotating shaft.
In order to enable the crucible to rotate, the external charging device for installing the horizontal magnetic field single crystal furnace is preferably used, the connecting sleeve is fixedly installed at the top of the crucible, and the connecting sleeve is rotatably connected with the rotating shaft.
In order to seal the space between the crucible and the suction cup, the external charging device for installing the horizontal magnetic field single crystal furnace is preferably used, the sealing assembly comprises a sealing gasket and sealing rubber, the sealing gasket is fixedly installed at the bottom of the suction cup, the sealing rubber is fixedly installed at the top of the crucible, and the sealing rubber is in fit with the sealing gasket in an up-and-down fit manner.
The invention also provides a using method of the external charging device for installing the horizontal magnetic field single crystal furnace, which comprises the following steps:
s1: firstly, adjusting the integral angle, enabling the shaft sleeve to rotate on the outer side of the supporting shaft through the upper roller bearing and the lower roller bearing, and enabling an operator to move the suspension arm;
s2: the angle of the suspension arm is adjusted, and the suspension arm is jacked up or loosened by controlling the electric push rod to stretch;
s3: adjusting the horizontal angle of the crucible, and rotating the crucible through a rotating shaft;
s4: adsorb the crucible through the sucking disc, dock the top of crucible with the sucking disc, make sealed pad, sealing rubber laminate from top to bottom, then be connected to the induction port at sucking disc top through air extraction equipment, the inside air of extraction crucible utilizes the vacuum principle to adsorb can.
Compared with the prior art, the invention has the beneficial effects that:
the charging device and the charging method outside the furnace for installing the horizontal magnetic field single crystal furnace are characterized in that a shaft sleeve rotates outside a supporting shaft through an upper roller bearing and a lower roller bearing, an operator can adjust the angle of a suspension arm by moving the suspension arm, the suspension arm is extended and contracted by controlling an electric push rod so as to jack up or relax the suspension arm, the horizontal angle of a crucible is adjusted, the crucible rotates through a rotating shaft by rotating the crucible, the crucible is adsorbed through a sucking disc, the sucking disc is butted to the top of the crucible, a sealing pad and sealing rubber are vertically laminated, then the sealing pad and the sealing rubber are connected to an air suction port at the top of the sucking disc through air suction equipment, air in the crucible is extracted, the vacuum principle is utilized for adsorption, the flexibility of the whole is strong, the mechanical mode is adopted to replace the traditional manual charging mode, the labor intensity of workers is reduced, and the charging time is shortened, the work efficiency is greatly improved, and meanwhile, the graphite piece and the graphite felt cannot be rubbed in the process of tooling materials, so that carbon powder is prevented from being mixed in the raw materials.
Drawings
FIG. 1 is a cross-sectional structural view of an external charging apparatus and method for installing a horizontal magnetic field single crystal furnace according to the present invention;
FIG. 2 is a front view of an external furnace charging apparatus and method for installing a horizontal magnetic field single crystal furnace of the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 1;
FIG. 4 is a partial enlarged view of B in FIG. 1;
FIG. 5 is an enlarged view of a portion C of FIG. 1;
fig. 6 is a partial enlarged view of D in fig. 1.
In the figure: 1. a supporting seat; 2. a rotating assembly; 3. a bearing end cap; 4. an electric push rod; 5. a suspension arm; 6. a first connecting lug; 7. a rotating mechanism; 8. a suction cup; 9. a crucible; 10. a seal assembly; 11. a second connecting lug; 12. a third connecting lug; 201. a support shaft; 202. a shaft sleeve; 203. an upper roller bearing; 204. a lower roller bearing; 701. a fourth connecting lug; 702. a rotating shaft; 703. connecting sleeves; 1001. a gasket; 1002. and (7) sealing rubber.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are used merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention. Further, in the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
Referring to fig. 1-6, an external charging device for installing a horizontal magnetic field single crystal furnace comprises a supporting seat 1, a rotating component 2 is arranged at the top of the supporting seat 1, and a bearing end cover 3 is fixedly arranged at the top of the rotating component 2;
an electric push rod 4 is arranged on the outer side of the rotating component 2, a suspension arm 5 is arranged at the movable end of the electric push rod 4 and the outer side of the rotating component 2, a rotating mechanism 7 is arranged at one end, far away from the rotating component 5, of the suspension arm 5, and a sucker 8 is arranged at the bottom of the rotating mechanism 7;
the bottom of the suction cup 8 is provided with a crucible 9, and a sealing component 10 is arranged between the crucible 9 and the suction cup 8.
In this embodiment: adjust the horizontal angle of davit 5 through the rotating assembly 2 that sets up, can realize that no dead angle is rotatory, adjust davit 5's dip angle from top to bottom through the electric putter 4 that sets up, electric putter 4 carries out the jacking or relaxs davit 5, davit 5 uses engaging lug two 11 to rotate as the basic point, thereby adjust davit 5's dip angle, thereby lift crucible 9 or put down, slewing mechanism 7 through the setting adjusts crucible 9's angle, seal the junction between sucking disc 8 and the crucible 9 through the seal assembly 10 that sets up, the later stage operation of bleeding of being convenient for, so that crucible 9 is sucked to sucking disc 8.
As a technical optimization scheme of the invention, the movable end of the electric push rod 4 is rotatably connected with the bottom of the suspension arm 5 through a first connecting lug 6, and the other end of the electric push rod 4 is rotatably connected with the outer side of the rotating component 2 through a third connecting lug 12.
In this embodiment: the electric push rod 4 stretches out and draws back, and in the stretching process of the electric push rod 4, the electric push rod 4 rotates by taking the first connecting lug 6 and the third connecting lug 12 as circle centers, so that the inclination angle of the suspension arm 5 is controlled, and the crucible 9 is lifted up or put down.
As a technical optimization scheme of the invention, the suspension arm 5 is rotatably connected with the rotating assembly 2 through the second connecting lug 11.
In this embodiment: in the process of extension and retraction of the electric push rod 4, the suspension arm 5 rotates up and down with the connecting lug II 11 on the outer side of the rotating assembly 2 as a base point, and one end of the suspension arm 5 far away from the rotating assembly 2 ascends or descends, so that the angle of the suspension arm 5 is controlled to be adjusted.
As a technical optimization scheme of the invention, the rotating assembly 2 comprises a supporting shaft 201, a shaft sleeve 202, an upper roller bearing 203 and a lower roller bearing 204, wherein the supporting shaft 201 is fixedly arranged at the top of the supporting seat 1, the shaft sleeve 202 is arranged on the outer side of the supporting shaft 201, and the upper roller bearing 203 and the lower roller bearing 204 are arranged between the supporting shaft 201 and the shaft sleeve 202 from top to bottom.
In this embodiment: when the overall horizontal angle needs to be adjusted, the shaft sleeve 202 is rotated, and the shaft sleeve 202 rotates outside the support shaft 201 through the upper roller bearing 203 and the lower roller bearing 204, so that the overall angle is adjusted, and the rotating effect is stable.
As a technical optimization scheme of the invention, the rotating mechanism 7 comprises a four connecting lugs 701, a rotating shaft 702 and a connecting sleeve 703, wherein the four connecting lugs 701 are rotatably installed at one end of the suspension arm 5 far away from the rotating component 2, the bottom of the four connecting lugs 701 is fixedly connected with the rotating shaft 702, and the connecting sleeve 703 is arranged on the outer side of the rotating shaft 702.
In this embodiment: the angle of the crucible 9 is adjusted by the arranged rotating mechanism 7, the crucible 9 rotates through the rotating shaft 702 in the rotating process, the connecting sleeve 703 on the outer side of the rotating shaft 702 is rotatably connected with the rotating shaft 702, the rotating shaft 702 does not rotate, and the connecting sleeve 703 performs rotary motion.
As a technical optimization scheme of the invention, the connecting sleeve 703 is fixedly arranged at the top of the crucible 9, and the connecting sleeve 703 is rotatably connected with the rotating shaft 702.
In this embodiment: when the crucible 9 needs to be rotated, the worker rotates the crucible 9, the crucible 9 is forced to rotate through the rotating shaft 702, and the connecting sleeve 703 rotates on the outside of the connecting shaft 702, so that the crucible 9 rotates.
As a technical optimization scheme of the invention, the sealing assembly 10 comprises a sealing gasket 1001 and sealing rubber 1002, the sealing gasket 1001 is fixedly arranged at the bottom of the sucking disc 8, the sealing rubber 1002 is fixedly arranged at the top of the crucible 9, and the sealing rubber 1002 and the sealing gasket 1001 are vertically attached and matched.
In this embodiment: the crucible 9 and the suction cup 8 are sealed by the sealing assembly 10, no gap is ensured between the sealing gasket 1001 and the sealing rubber 1002, and then air in the crucible 9 is pumped out by adopting air pumping equipment, so that vacuum adsorption of the crucible 9 is realized.
The use method of the external charging device for installing the horizontal magnetic field single crystal furnace comprises the following steps:
s1: firstly, the overall angle is adjusted, the shaft sleeve 202 rotates at the outer side of the supporting shaft 201 through the upper roller bearing 203 and the lower roller bearing 204, and an operator can move the suspension arm 5;
s2: the angle of the suspension arm 5 is adjusted, and the electric push rod 4 is controlled to stretch, so that the suspension arm 5 is jacked up or loosened;
s3: the horizontal angle of the crucible 9 is adjusted, and by rotating the crucible 9, the crucible 9 is rotated through the rotating shaft 702;
s4: adsorb crucible 9 through sucking disc 8, dock the top of crucible 9 with sucking disc 8, make sealed pad 1001, sealed rubber 1002 laminate from top to bottom, then be connected to the induction port at sucking disc 8 top through air extraction equipment, extract the inside air of crucible 9, utilize the vacuum principle to adsorb can.
The working principle and the using process of the invention are as follows: firstly, the whole angle is adjusted, the worker rotates the shaft sleeve 202, the shaft sleeve 202 rotates outside the supporting shaft 201 through the upper roller bearing 203 and the lower roller bearing 204, so that the whole angle is adjusted, the rotating effect is stable, the suspension arm 5 is jacked up or loosened by controlling the electric push rod 4 to extend and retract, the horizontal angle of the crucible 9 is adjusted, the electric push rod 4 rotates up and down by taking the connecting lug two 11 at the outer side of the rotating component 2 as a base point during the extending and retracting process, one end of the suspension arm 5 far away from the rotating component 2 rises or falls, so that the angle of the suspension arm 5 is controlled to be adjusted, the crucible 9 rotates through the rotating shaft 702 by rotating the crucible 9, the crucible 9 is adsorbed through the sucking disc 8, the sucking disc 8 is butted to the top of the crucible 9, the sealing pad 1001 and the sealing rubber 1002 are jointed up and down, and then the suction port at the top of the sucking disc 8 is connected through an air extractor, the inside air of extraction crucible 9 utilizes the vacuum principle adsorb can, and whole flexibility is strong, adopts the mode of machinery to replace the mode of traditional manual work feeding, has reduced staff's intensity of labour, and has shortened the charge time, very big promotion work efficiency, simultaneously, can not rub graphite spare and graphite felt at frock material in-process, avoids causing the carbon dust of mixing in the raw materials.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalents and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The utility model provides a charging devices outside stove for installing horizontal magnetic field single crystal growing furnace, includes supporting seat (1), its characterized in that: a rotating assembly (2) is arranged at the top of the supporting seat (1), and a bearing end cover (3) is fixedly arranged at the top of the rotating assembly (2);
an electric push rod (4) is arranged on the outer side of the rotating component (2), a suspension arm (5) is arranged at the movable end of the electric push rod (4) and the outer side of the rotating component (2), a rotating mechanism (7) is arranged at one end, far away from the rotating component (5), of the suspension arm (5), and a sucker (8) is arranged at the bottom of the rotating mechanism (7);
the bottom of sucking disc (8) is provided with crucible (9), be provided with seal assembly (10) between crucible (9) and sucking disc (8).
2. The external charging device for installing a horizontal magnetic field single crystal furnace of claim 1, wherein: the movable end of the electric push rod (4) is rotatably connected with the bottom of the suspension arm (5) through a first connecting lug (6), and the other end of the electric push rod (4) is rotatably connected with the outer side of the rotating assembly (2) through a third connecting lug (12).
3. The external charging device for installing a horizontal magnetic field single crystal furnace of claim 1, wherein: the suspension arm (5) is rotatably connected with the rotating assembly (2) through a second connecting lug (11).
4. The external charging device for installing the horizontal magnetic field single crystal furnace of claim 1, wherein: rotating assembly (2) including back shaft (201), axle sleeve (202), go up roller bearing (203), lower roller bearing (204), back shaft (201) fixed mounting is at the top of supporting seat (1), the outside of back shaft (201) is provided with axle sleeve (202), from last roller bearing (203), lower roller bearing (204) of being provided with down between back shaft (201) and axle sleeve (202).
5. The external charging device for installing a horizontal magnetic field single crystal furnace of claim 1, wherein: slewing mechanism (7) are including engaging lug four (701), axis of rotation (702), adapter sleeve (703), the one end of keeping away from rotating assembly (2) is installed in davit (5) is rotated in engaging lug four (701), the bottom fixedly connected with axis of rotation (702) of engaging lug four (701), the outside of axis of rotation (702) is equipped with adapter sleeve (703).
6. The external charging device for installing a horizontal magnetic field single crystal furnace as claimed in claim 5, wherein: the connecting sleeve (703) is fixedly arranged at the top of the crucible (9), and the connecting sleeve (703) is rotatably connected with the rotating shaft (702).
7. The external charging device for installing the horizontal magnetic field single crystal furnace of claim 1, wherein: the sealing assembly (10) comprises a sealing gasket (1001) and sealing rubber (1002), the sealing gasket (1001) is fixedly installed at the bottom of the sucker (8), the sealing rubber (1002) is fixedly installed at the top of the crucible (9), and the sealing rubber (1002) and the sealing gasket (1001) are jointed up and down.
8. An external charging device for installing a horizontal magnetic field single crystal furnace according to claims 1 to 7, characterized in that the use method is as follows:
s1: firstly, the integral angle is adjusted, the shaft sleeve (202) rotates at the outer side of the supporting shaft (201) through an upper roller bearing (203) and a lower roller bearing (204), and an operator can move the suspension arm (5);
s2: the angle of the suspension arm (5) is adjusted, and the suspension arm (5) is jacked up or loosened by controlling the electric push rod (4) to stretch;
s3: the horizontal angle of the crucible (9) is adjusted, and the crucible (9) rotates through the rotating shaft (702) by rotating the crucible (9);
s4: adsorb crucible (9) through sucking disc (8), dock the top of crucible (9) with sucking disc (8), make sealed pad (1001), sealed rubber (1002) laminate from top to bottom, then be connected to the induction port at sucking disc (8) top through air extraction equipment, extract the inside air of crucible (9), utilize the vacuum principle to adsorb can.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210362850.0A CN114622273A (en) | 2022-04-08 | 2022-04-08 | External charging device and method for installing horizontal magnetic field single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210362850.0A CN114622273A (en) | 2022-04-08 | 2022-04-08 | External charging device and method for installing horizontal magnetic field single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114622273A true CN114622273A (en) | 2022-06-14 |
Family
ID=81905472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210362850.0A Pending CN114622273A (en) | 2022-04-08 | 2022-04-08 | External charging device and method for installing horizontal magnetic field single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114622273A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1284017A (en) * | 1970-07-29 | 1972-08-02 | Commissariat Energie Atomique | Apparatus for growing crystalline bodies |
| CN203639598U (en) * | 2013-12-03 | 2014-06-11 | 杭州慧翔电液技术开发有限公司 | External loading mechanism used for single crystal furnace |
| CN204174307U (en) * | 2014-09-11 | 2015-02-25 | 浙江晶盛机电股份有限公司 | A kind of outside charging structure |
| CN106917144A (en) * | 2015-12-25 | 2017-07-04 | 有研半导体材料有限公司 | A kind of method of the outer shove charge of stove |
-
2022
- 2022-04-08 CN CN202210362850.0A patent/CN114622273A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1284017A (en) * | 1970-07-29 | 1972-08-02 | Commissariat Energie Atomique | Apparatus for growing crystalline bodies |
| CN203639598U (en) * | 2013-12-03 | 2014-06-11 | 杭州慧翔电液技术开发有限公司 | External loading mechanism used for single crystal furnace |
| CN204174307U (en) * | 2014-09-11 | 2015-02-25 | 浙江晶盛机电股份有限公司 | A kind of outside charging structure |
| CN106917144A (en) * | 2015-12-25 | 2017-07-04 | 有研半导体材料有限公司 | A kind of method of the outer shove charge of stove |
Non-Patent Citations (1)
| Title |
|---|
| 责任编辑：胡清运: "输送机械与辅助设备》", 中国财政经济出版社, pages: 206 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108818507A (en) | A kind of height-adjustable palletizing mechanical arm | |
| CN205711046U (en) | Small furnace cover lifting rotation mechanism | |
| CN110453277A (en) | A kind of Czochralski method mono-crystal furnace thermal field quickly cooling device and cooling means | |
| CN114622273A (en) | External charging device and method for installing horizontal magnetic field single crystal furnace | |
| CN112265638A (en) | Unmanned aerial vehicle is used in topographic survey and drawing | |
| CN204174307U (en) | A kind of outside charging structure | |
| CN213770471U (en) | Sucking disc transport installation device for construction | |
| CN207113633U (en) | Multidimensional dust arrester | |
| CN107984613A (en) | A kind of construction is with concrete mixing machine people | |
| CN108773758B (en) | Vacuum glass lifting device | |
| CN207309640U (en) | Numerical control gantry type environment-friendly plane polishing machine | |
| CN115584554A (en) | Single crystal furnace | |
| CN214032224U (en) | Vacuum tube sealing device for quartz tube | |
| CN215100593U (en) | Electronic component automatic vacuum handling device with good stability | |
| CN211585566U (en) | Large-diameter shallow sand filter | |
| CN107356126B (en) | Multidimensional dust removing device | |
| CN208819851U (en) | A kind of production and processing wafer means for communicating | |
| CN214801395U (en) | Automatic leveling device for hydraulic support leg of sprinkler | |
| CN214611347U (en) | Be used for integrative frock car of single crystal growing furnace die-pin and crucible support dismouting | |
| CN112878931A (en) | Tool for installing drill rod of raise boring machine, raise boring machine and using method thereof | |
| CN114657630B (en) | Single crystal furnace charging barrel and seed crystal stabilizing device | |
| CN217602000U (en) | Manipulator for laying floor tiles | |
| CN218725803U (en) | Carbon peak detection sampling device | |
| CN212794130U (en) | Feeding mechanical arm for bearing machining | |
| CN214881935U (en) | Tray lifting mechanism based on crystal furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20220614 |
|
| RJ01 | Rejection of invention patent application after publication |