CN114657630B - Single crystal furnace charging barrel and seed crystal stabilizing device - Google Patents
Single crystal furnace charging barrel and seed crystal stabilizing device Download PDFInfo
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- CN114657630B CN114657630B CN202210229935.1A CN202210229935A CN114657630B CN 114657630 B CN114657630 B CN 114657630B CN 202210229935 A CN202210229935 A CN 202210229935A CN 114657630 B CN114657630 B CN 114657630B
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- gear
- guide rail
- ring
- stabilizing device
- charging barrel
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a single crystal furnace charging barrel and seed crystal stabilizing device, which comprises a stabilizing device (3) connected between a secondary chamber (1) and a main furnace chamber (2), wherein the stabilizing device comprises an upper flange (31), a box body (32) and a lower flange (33) which are sequentially connected up and down, the middle parts of the upper flange, the box body (32) and the lower flange are respectively provided with an equal-sized through hole (3 a), the box body (32) comprises an upper cover plate (321) and a lower shell (322) which are connected, a ring-shaped guide rail (4), a sliding block (5), a transmission gear (6), a ring-shaped gear (7), a driving gear (8) and a driving motor (9) which are matched with each other are arranged in the box body (32); the upper cover plate (321) is internally provided with a group of slide ways (321 a) corresponding to the guide grooves (4 a), and the sliding blocks (5) are embedded in the slide ways (321 a). The invention has the advantages of stabilizing the charging barrel and the seed crystal, reducing the risk of safety accidents and improving the production efficiency.
Description
Technical Field
The invention relates to the technical field of photovoltaic manufacturing, in particular to a charging barrel of a single crystal furnace and a seed crystal stabilizing device.
Background
The furnace body shell of the existing single crystal furnace consists of a main chamber and an auxiliary chamber, the auxiliary chamber is a circular cavity, a seed crystal rotating and lifting mechanism is arranged at the top end of the auxiliary chamber, an argon gas inlet and a vacuum pumping hole are formed in the upper part of the auxiliary chamber, the auxiliary chamber is required to be isolated independently during charging, argon gas is introduced to charge the auxiliary chamber to atmospheric pressure, the auxiliary chamber can be lifted out, after a charging barrel is hung, the auxiliary chamber is rotated, the auxiliary chamber is required to be ventilated, the air in the auxiliary chamber is completely discharged, oxygen is prevented from being brought into the furnace to cause oxidation in the furnace, at the moment, the auxiliary chamber is required to be subjected to two to three ventilation operations, namely, vacuumizing-flushing argon gas-vacuumizing are performed, and after the auxiliary chamber rotary plate valve is opened after ventilation, charging operation is performed.
If the charging is completed, when the seed crystal is replaced outside the furnace to carry out normal crystal pulling, the auxiliary chamber still needs to be operated to carry out ventilation operation, and then the auxiliary chamber rotary plate valve is opened to carry out normal crystal pulling operation. When the ventilation operation is carried out, due to the change of air flow and pressure in the auxiliary chamber, the charging barrel and the seed crystal can shake, the charging barrel can seriously shake to cause the charging barrel to descend to charge the main chamber, the furnace wall is bumped to cause fragmentation, accidents occur, however, after the seed crystal shakes, the seed crystal can cause the seed crystal to descend, the seed crystal draws an arc in molten silicon liquid, and the seeding single crystal silicon rod is pulled. The prior art only can open the auxiliary chamber observation window to manually support the charging barrel and seed crystals for stabilization before ventilation, but the effect is not ideal, the production efficiency is affected, and the safety accident risk exists.
Disclosure of Invention
The invention aims to solve the problems of poor stability, low production efficiency and potential safety hazard easily existing in the existing charging barrel and seed crystal, and provides the charging barrel and seed crystal stabilizing device of the single crystal furnace, which can stabilize the charging barrel and the seed crystal, reduce the risk of safety accidents and improve the production efficiency.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the utility model provides a single crystal furnace charging barrel and seed crystal stabilising arrangement, includes the stabilising arrangement who links to each other between auxiliary chamber and main furnace chamber, and stabilising arrangement includes upper flange, box body and the lower flange that links to each other in proper order from top to bottom, and the middle part of three all is equipped with equilarge through-hole, and the axis of through-hole coincides each other with the axis of auxiliary chamber and main furnace chamber for be used for descending charging barrel and the weight that is connected with the seed crystal to stabilising arrangement department;
the box body comprises an upper cover plate and a lower shell which are connected, the lower shell is connected with an annular guide rail, the inner diameter of the annular guide rail is not smaller than the diameter of the through hole, the axes of the annular guide rail and the through hole are mutually overlapped, a group of guide grooves are arranged on the upper surface of the annular guide rail, and extension lines of the guide grooves intersect at the center of the annular guide rail;
each guide groove is internally connected with a matched sliding block, one end of each sliding block can extend into the through hole, and one side of each sliding block is mutually meshed with a transmission gear so as to drive the sliding block to move back and forth along the guide groove through rotation of the transmission gear;
the lower shell is internally provided with a ring gear, the inner diameter of the ring gear is larger than the outer diameter of the ring guide rail, the axes of the ring gear and the ring guide rail are mutually overlapped, and the inner ring of the ring gear is meshed with the transmission gear so as to drive the transmission gear to rotate through the rotation of the ring gear;
the outer ring of the ring gear is meshed with a driving gear, the driving gear is connected with an output shaft of a driving motor, and the driving motor is arranged outside the box body and is used for driving the ring gear to rotate through the motor;
the upper cover plate is internally provided with a group of slide ways corresponding to the guide grooves, and the sliding blocks are embedded in the slide ways so as to further limit the forward and backward movement of the sliding blocks.
Further, the sliding block comprises a base, the base is just embedded in a slideway of the upper cover plate, a boss is arranged on the base, the boss is just embedded in a guide groove of the annular guide rail, a gear strip is arranged on one side of the base, the axis of the gear strip is parallel to the axis of the base, and the gear strip is meshed with the transmission gear.
Further, one end of the sliding block extending into the through hole is provided with a holding arm, and the holding arm is of an arc-shaped structure.
Further, an anti-slip pad is arranged at the end part of the enclasping arm so as to strengthen the friction force between the enclasping arm and the charging barrel and between the enclasping arm and the heavy hammer.
Further, the number of the sliding blocks is four, the number of corresponding guide grooves and sliding ways is also four, the guide grooves are uniformly distributed on the annular guide rail, and the axes of the four guide grooves are right intersected at the center of the annular guide rail.
Further, the transmission gear is arranged at the gap between the annular guide rail and the annular gear, and the size and the number of racks of the transmission gear are the same, so that the same distance of the sliding block expansion and contraction can be ensured.
Further, the driving motor is a servo motor.
According to the technical scheme, the feeding cylinder and the heavy hammer connected with the seed crystal are lowered to the through hole of the stabilizing device, the servo motor of the stabilizing device is turned on, the servo motor rotates to drive the driving gear to rotate, the driving gear rotates to drive the ring gear to rotate, the ring gear simultaneously drives the four transmission gears to rotate, the transmission gears rotate to drive the four sliding blocks to conduct telescopic motion, and the four sliding blocks simultaneously conduct telescopic motion to achieve the purposes of enclasping and loosening. The invention has the advantages that the servo motor is adopted for driving, the sliding blocks are simultaneously extended through gear group transmission, and the charging barrel or the heavy hammer connected with the seed crystal is tightly held for 1-3 minutes and then is slowly loosened, so that the purpose of stabilizing the charging barrel and the seed crystal is realized, the risk of safety accidents is reduced, and the production efficiency is improved.
Drawings
FIG. 1 is an assembly view of the stabilization device of the present invention on a primary furnace chamber and a secondary chamber;
FIG. 2 is an enlarged view of part of A of FIG. 1;
FIG. 3 is an external structural view of a single crystal furnace feed cylinder and seed crystal stabilization device of the present invention;
FIG. 4 is a first internal structure diagram of a single crystal furnace charging barrel and seed crystal stabilizing device of the invention;
FIG. 5 is a second internal structure diagram of a single crystal furnace charging barrel and seed crystal stabilizing device of the invention;
FIG. 6 is a block diagram of a slider of the present invention;
FIG. 7 is a block diagram of an upper cover plate of the present invention;
FIG. 8 is a block diagram of a circular rail of the present invention;
FIG. 9 is a schematic diagram showing the assembly of a seed crystal with a weight attached thereto according to the prior art;
FIG. 10 is a schematic illustration of the connection of a prior art feed cartridge.
Detailed Description
Example 1
In order that the invention may be more clearly understood, a single crystal furnace feed barrel and seed crystal stabilizing apparatus of the present invention will be further described with reference to the accompanying drawings, wherein the specific embodiments described herein are for purposes of illustration only and are not intended to be limiting.
Referring to fig. 1 and 2, a single crystal furnace charging barrel and seed crystal stabilizing device, comprising a stabilizing device 3 connected between a secondary chamber 1 and a main furnace chamber 2, is characterized in that:
referring to fig. 2 and 3, the stabilizing device 3 comprises an upper flange 31, a box body 32 and a lower flange 33 which are sequentially connected up and down, wherein the middle parts of the upper flange 31, the box body 32 and the lower flange 33 are respectively provided with an equal-sized through hole 3a, and the axes of the through holes 3a and the axes of the auxiliary chamber 1 and the main furnace chamber 2 are mutually overlapped so as to be used for descending a charging barrel and a heavy hammer connected with a seed crystal to the stabilizing device;
referring to fig. 3, 4, 5 and 8, the box 32 includes an upper cover 321 and a lower casing 322 which are connected, the lower casing 322 is connected with a ring-shaped guide rail 4, the inner diameter of the ring-shaped guide rail 4 is not smaller than the diameter of the through hole 3a, the axes of the two are overlapped, a group of guide grooves 4a are arranged on the upper surface of the ring-shaped guide rail 4, and the extension lines of the guide grooves 4a intersect at the center of the ring-shaped guide rail 4;
referring to fig. 4, 5, 6 and 7, a matched sliding block 5 is connected in each guide groove 4a, one end of the sliding block 5 can extend into the through hole 3a, the sliding block 5 comprises a base 51, the base 51 is just embedded into a slideway 321a of the upper cover plate 321, a boss 52 is arranged on the base 51, the boss 52 is just embedded into the guide groove 4a of the annular guide rail 4, one side of the base 51 is provided with a gear strip 53, the axis of the gear strip 53 is parallel to the axis of the base 51, and the gear strip 53 is meshed with a transmission gear 6 so as to drive the sliding block to move back and forth along the guide grooves through the rotation of the transmission gear;
one end of the sliding block 5 extending into the through hole 3a is provided with a holding arm 54, the holding arm 54 is of an arc-shaped structure, and the end part of the holding arm 54 is provided with an anti-slip pad for enhancing the friction force between the holding arm and the charging barrel and between the holding arm and the heavy hammer;
the number of the sliding blocks 5 is four, the number of corresponding guide grooves 4a and sliding ways 321a is also four, the guide grooves 4a are uniformly distributed on the annular guide rail 4, and the axes of the four guide grooves 4a are right intersected at the center of the annular guide rail 4;
referring to fig. 4 and 5, a ring gear 7 is further disposed in the lower housing 322, the inner diameter of the ring gear 7 is larger than the outer diameter of the ring guide 4, and the axes of the ring gear 7 and the ring guide are mutually overlapped, and the inner ring of the ring gear 7 is meshed with the transmission gear 6 for driving the transmission gear to rotate through the rotation of the ring gear;
the outer ring of the ring gear 7 is meshed with a driving gear 8, the driving gear 8 is connected with an output shaft of a driving motor 9, and the driving motor 9 is arranged outside the box body 32 and is used for driving the ring gear to rotate through the motor;
the upper cover 321 is provided with a set of slide ways 321a corresponding to the guide grooves 4a, and the sliding blocks 5 are embedded in the slide ways 321a to further limit the forward and backward movement of the sliding blocks.
In the invention, the transmission gear 6 is arranged at the gap between the annular guide rail 4 and the annular gear 7, and the size and the number of racks of the transmission gear 6 are the same, so as to ensure the same distance of the expansion and contraction of the sliding block.
In the present invention, the driving motor 9 is a servo motor.
Referring to fig. 9, the bottom of the weight 11 is connected to the seed crystal 12, and the upper portion of the weight is connected to the lifting mechanism at the top end of the auxiliary chamber 1 through the tungsten wire rope 10, wherein the E position on the weight 11 is the holding position of the stabilizing device of the present invention, and when the seed crystal 12 needs to be stabilized, the holding arm 54 of the sliding block 5 holds the weight tightly and stabilizes at the E position.
Referring to fig. 10, the upper part of the charging barrel 13 is connected with a connecting rod 14, the connecting rod 14 is connected with a heavy hammer in the auxiliary chamber 1 through a device for charging, wherein the F position at the lower part of the charging barrel 13 is the position where the stabilizing device of the invention is held tightly, and when the charging barrel needs to be stabilized, the holding arm 54 of the sliding block 5 extends out at the F position to hold the charging barrel tightly and stabilize.
During the use, with a reinforced section of thick bamboo and the weight of being connected with the seed crystal, descend to the through-hole 3a department of stabilising arrangement 3, open stabilising arrangement 3's servo motor, servo motor rotation drives driving gear 8 rotation, and driving ring gear 7 is rotatory after driving gear 8 rotation, and ring gear 7 drives four drive gear 6 rotation simultaneously after rotatory, drives four sliding blocks 5 and carries out telescopic motion after the drive gear 6 is rotatory, and four sliding blocks 5 stretch out and draw back simultaneously and reach the purpose of holding tightly and unclamping.
After the device is subjected to ventilation operation, the charging barrel and the seed crystal stabilizing device are driven by the servo motor to drive through the gear set, 4 telescopic rods simultaneously extend out to tightly hold the charging barrel or a heavy hammer connected with the seed crystal for 1-3 minutes and then slowly loosen, so that the purposes of stabilizing the charging barrel and the seed crystal are achieved, the risk of safety accidents is reduced, and the production efficiency is improved.
In addition to the embodiments described above, other embodiments of the invention are possible. All technical schemes formed by equivalent substitution or equivalent transformation fall within the protection scope of the invention.
Claims (4)
1. The utility model provides a single crystal growing furnace charging barrel and seed crystal stabilising arrangement, includes stabilizing device (3) between auxiliary chamber (1) and main furnace chamber (2), its characterized in that:
the stabilizing device (3) comprises an upper flange (31), a box body (32) and a lower flange (33) which are sequentially connected up and down, wherein the middle parts of the upper flange, the box body and the lower flange are respectively provided with an equal-sized through hole (3 a), and the axis of the through hole (3 a) is mutually overlapped with the axis of the auxiliary chamber (1) and the axis of the main furnace chamber (2);
the box body (32) comprises an upper cover plate (321) and a lower shell (322) which are connected, the lower shell (322) is connected with an annular guide rail (4), the inner diameter of the annular guide rail (4) is not smaller than the diameter of the through hole (3 a), the axes of the annular guide rail and the through hole are mutually overlapped, a group of guide grooves (4 a) are arranged on the upper surface of the annular guide rail (4), the extension lines of the guide grooves (4 a) are intersected at the center of the annular guide rail (4), and a group of slide ways (321 a) corresponding to the guide grooves (4 a) are arranged in the upper cover plate (321);
each guide groove (4 a) is connected with a matched sliding block (5), each sliding block (5) comprises a base (51), each base (51) is just embedded in a slideway (321 a) of an upper cover plate (321), each base (51) is provided with a boss (52), each boss (52) is just embedded in a guide groove (4 a) of an annular guide rail (4), one side of each base (51) is provided with a gear strip (53), the axes of the gear strips (53) and the axes of the bases (51) are mutually parallel, the gear strips (53) are mutually meshed with a transmission gear (6), one end of each sliding block (5) extending into a through hole (3 a) is provided with a holding arm (54), and each holding arm (54) is of an arc-shaped structure;
a ring gear (7) is further arranged in the lower shell (322), the inner diameter of the ring gear (7) is larger than the outer diameter of the ring guide rail (4), the axes of the ring gear (7) and the ring guide rail are mutually overlapped, the inner ring of the ring gear (7) is meshed with the transmission gear (6), the transmission gear (6) is arranged at a gap between the ring guide rail (4) and the ring gear (7), and the size and the number of racks of the transmission gear (6) are the same;
the outer ring of the ring gear (7) is meshed with a driving gear (8), the driving gear (8) is connected with an output shaft of a driving motor (9), and the driving motor (9) is arranged outside the box body (32).
2. The single crystal furnace charging barrel and seed crystal stabilizing device according to claim 1, wherein:
an anti-slip pad is arranged at the end part of the enclasping arm (54).
3. The single crystal furnace charging barrel and seed crystal stabilizing device according to claim 1 or 2, wherein:
the number of the sliding blocks (5) is four, the number of corresponding guide grooves (4 a) and the number of the sliding ways (321 a) are also four, the guide grooves (4 a) are uniformly distributed on the annular guide rail (4), and the axes of the four guide grooves (4 a) are positively intersected at the center of the annular guide rail (4).
4. The single crystal furnace charging barrel and seed crystal stabilizing device according to claim 1 or 2, wherein:
the driving motor (9) is a servo motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210229935.1A CN114657630B (en) | 2022-03-10 | 2022-03-10 | Single crystal furnace charging barrel and seed crystal stabilizing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210229935.1A CN114657630B (en) | 2022-03-10 | 2022-03-10 | Single crystal furnace charging barrel and seed crystal stabilizing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114657630A CN114657630A (en) | 2022-06-24 |
| CN114657630B true CN114657630B (en) | 2023-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210229935.1A Active CN114657630B (en) | 2022-03-10 | 2022-03-10 | Single crystal furnace charging barrel and seed crystal stabilizing device |
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| CN (1) | CN114657630B (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005040229B4 (en) * | 2005-08-25 | 2011-12-22 | Siltronic Ag | A supporting device for supporting a growing single crystal of semiconductor material and a process for producing a single crystal |
| CN201605352U (en) * | 2009-12-16 | 2010-10-13 | 浙江碧晶科技有限公司 | Crystal pulling furnace with lifting and rotating mechanism |
| CN113550001B (en) * | 2020-04-26 | 2024-02-20 | 内蒙古中环晶体材料有限公司 | Single crystal furnace positioning mechanism for automatically stabilizing seed crystal, single crystal furnace system and stabilizing method |
| CN212610983U (en) * | 2020-04-26 | 2021-02-26 | 内蒙古中环协鑫光伏材料有限公司 | Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals and single crystal furnace system |
| CN113549999A (en) * | 2020-04-26 | 2021-10-26 | 内蒙古中环协鑫光伏材料有限公司 | Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystal, single crystal furnace system and stabilizing method |
| CN215560796U (en) * | 2021-05-12 | 2022-01-18 | 弘元新材料(包头)有限公司 | Seed crystal rod clamping device for seeding of silicon single crystal Czochralski method |
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- 2022-03-10 CN CN202210229935.1A patent/CN114657630B/en active Active
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| CN114657630A (en) | 2022-06-24 |
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