CN201605352U - Crystal pulling furnace with lifting and rotating mechanism - Google Patents
Crystal pulling furnace with lifting and rotating mechanism Download PDFInfo
- Publication number
- CN201605352U CN201605352U CN2009202027253U CN200920202725U CN201605352U CN 201605352 U CN201605352 U CN 201605352U CN 2009202027253 U CN2009202027253 U CN 2009202027253U CN 200920202725 U CN200920202725 U CN 200920202725U CN 201605352 U CN201605352 U CN 201605352U
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- crystal
- concubine
- seed crystal
- slide bar
- rotating mechanism
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Abstract
The utility model discloses a crystal pulling furnace with lifting and rotating mechanism, comprising a furnace body and a subsidiary chamber above the furnace body; the lifting and rotating mechanism comprises a rotating head arranged at the top part of the subsidiary chamber; a plurality of sliding rods which are arranged in the subsidiary chamber and can rotate relative to the furnace body; a sliding block which can slide along a sliding rod, and the sliding block is connected with the rotating head by a seed crystal rope; and a seed crystal holder arranged at the bottom surface of the sliding block; the crystal pulling furnace can effectively avoid shaking phenomenon of the seed crystal rope by the fixing function of the sliding rod and the sliding block; in addition, high torque force operation can be realized, the processing range for crystal growth is expanded by adopting a GZ method, and stable crystal growth can be realized when the air flow at the periphery of the crystal is unstable or the outside has large vibrating source.
Description
Technical field
The utility model relates to a kind of device for preparing silicon crystal, relates in particular to a kind of crystal pulling furnace that has lifting and rotating mechanism.
Background technology
Silicon crystal is semicon industry and the sun power industry material of normal use.Producing the most frequently used method of this material is mound krousky method (the Czochralski method is called for short the CZ method).Be called crystal pulling method or crystal pulling method in the industry again.The equipment that mound krousky legal system is equipped with silicon crystal is called crystal pulling furnace.As shown in Figure 1, this equipment is made up of concubine 1, body of heater 2, segregaion valve 7 and seed crystal shift mechanism etc.The graphite thermal field wherein is housed in body of heater 2.The graphite thermal field is made up of crucible 4, well heater 5 etc. usually.When crystal growth, by the lifting and the rotation of seed crystal shift mechanism control seed crystal, the silicon material after melting in seed crystal and the crucible 4 is contacted, go out columniform crystal 8 by the seed crystal induced growth.The seed crystal shift mechanism is made up of rotating head 3, the seed crystal rope 9 that is connected with rotating head 3 and seed chuck 6.Wherein seed chuck is held on the seed chuck 6, and seed chuck 6 then links to each other with seed crystal rope 9.Rotating head 3 can realize rotating the function with folding and unfolding seed crystal rope 9 in Machine Design.So can be implemented in, the seed crystal shift mechanism lifts simultaneously in the crystal growing process and rotating crystal 8.Because crystalline lifts and the power that rotates is that seed crystal rope by flexibility transmits, therefore this crystal pulling furnace is called the flexible axle czochralski crystal growing furnace again.
In crystal growing process,, therefore when drawing silicon crystal, often produce shake because seed crystal rope 9 is a flexible structure.The factors such as resonance that the shake of this class is normally caused by the washing away of shielding gas (being generally argon gas), the manufacturing accuracy of rotating head 3, extraneous trickle vibration produce.The shake meeting of seed crystal rope 9 directly influences and generates the crystalline quality, also makes the velocity of rotation of seed crystal shift mechanism be limited in certain scope.In order to address this problem, application number is to disclose a kind of rope support mechanism that is used for single crystal growing furnace in 200910021959.2 the Chinese invention patent application, is used for when seed crystal rope 9 rocks, and seed crystal rope 9 fast and stables are got off.In addition, be to disclose a kind of deoscillator that stops 9 shakes of seed crystal rope in the 200610031462.5 Chinese invention patent applications at application number, this deoscillator is eliminated the shake of seed crystal rope 9 with electromagnetic force.Above-described method has all solved the problem of seed crystal rope 9 shakes to a certain extent.
But in the time need realizing the operation of bigger torsion by seed crystal rope 9, seed crystal rope 9 can twist and shake by over-drastic, thereby causes operation failure.For example, be difficult to just crystal be realized at a high speed or the speed change rotation by the reactive force of seed crystal rope 9 transmissions.In addition, when environment on every side was unstable, the shaking amplitude of seed crystal rope 9 also can exceed tolerable scope.When for example needing at short notice the air flow rate in the feeding stove to be made bigger change because of particular requirement, seed crystal rope 9 tends to shake and rocks, even produces the simple harmonic motion of amplitude greater than 10mm.When crystal was in the isodiametric growth process, the shake of seed crystal rope 9 and rock and also will cause silicon liquid liquid level instability made crystal become brilliant difficulty.
Summary of the invention
The utility model provides a kind of crystal pulling furnace that has lifting and rotating mechanism, is used to solve the shake of seed crystal rope, rocks and distortion problem.
A kind of with promoting and the crystal pulling furnace of rotating mechanism, comprise the concubine above body of heater and the body of heater, described lifting and rotating mechanism comprise: the rotating head that is positioned at the concubine top; Be positioned at some slide bars that can rotate relative to body of heater of concubine; The slide block that can move along slide bar, slide block is connected with rotating head by the seed crystal rope; Be positioned at the seed chuck of slide block bottom surface.
Similar with flexible axle czochralski crystal growing furnace in the past, the curled hair that described seed crystal rope is wrapped in the rotating head is taken turns, lifting motor and rotating machine are installed on the described rotating head, wherein lifting motor can drive the rotation of curled hair wheel to realize the lifting of seed crystal rope, rotating machine can be realized the rotation of rotating head, and the seed crystal rope that drive links to each other with rotating head rotates.
Because slide block can be free to slide along slide bar, when slide block with after the seed crystal rope links to each other, under the interaction of the pulling force of slide block self gravitation and seed crystal rope, the up-and-down movement of seed crystal rope can be exchanged into the up-and-down movement of slide block; Under the reactive force of slide bar, rotatablely moving of rotating head can be transmitted rotatablely moving for slide block.Obviously, the moment of torsion that provides to slide block of slide bar is far longer than the moment of torsion that the seed crystal rope provides to slide block.Therefore, promote with seed crystal in the existing flexible axle czochralski crystal growing furnace and to compare with rotating mechanism, lifting of the present invention and rotating mechanism can be realized the more spinning movement of high pulling torque of seed crystal rope, and can not cause the seed crystal rope shake, rock and twist.For example, what rotating head can carry out various circular frequency is rotated counterclockwise (just change, see from the top down) or turn clockwise (counter-rotating, see from the top down), perhaps carries out periodicity and rotates and reverse motion, perhaps carries out that the high acceleration speed change rotatablely moves etc.
Described seed chuck is connected on the slide block can provide more mode for crystal growth.For example, the crystal pulling under the high rotating speed of crystal (rotating speed is 25～100 rev/mins), the perhaps crystal pulling under the unstable airflow scouring condition etc. around the crystal.Under the lifting in the present invention and the help of rotating mechanism, the crystal pulling process under the above-mentioned extreme condition can be avoided because of the shake of seed crystal rope, rock and twist the crystal pulling problem of bringing.
In order to drive the crystal rotation, both can be the relative body of heater rotation of rotating head, also can make the simultaneously relative body of heater rotation of rotating head and concubine, lay sealing bearing in place according to both of these case.Concrete mode is analyzed as follows:
First kind of mode: between described rotating head and the concubine sealing bearing is installed, described slide bar is fixedlyed connected with rotating head.Described sealing bearing can be selected this area sealing bearing commonly used for use, most preferably uses tubular shaft magnetic current sealing bearing.When slide bar is longer, described slide bar needs two ends fixing to improve the rigidity of slide bar, reduce distortion, solution is that slide bar one end is fixedlyed connected with rotating head, the bottom of concubine inner chamber is equipped with swivel bearing, the rotating part of swivel bearing is fixedlyed connected with the other end of slide bar, and the not rotating part of swivel bearing is fixed on the concubine.This mode can guarantee that when the relative body of heater of rotating head rotates under the non-rotary prerequisite of concubine, slide bar drives slide block and the final crystal that drives rotates.Described swivel bearing can be selected this area rotation bearing commonly used, for example spot contact bearing or roller bearing etc. for use.
The second way: described rotating head is fixedlyed connected with concubine, concubine links to each other by segregaion valve with body of heater, between concubine bottom and the segregaion valve sealing bearing is installed, described sealing bearing can be selected this area sealing bearing commonly used for use, most preferably uses tubular shaft magnetic current sealing bearing.Described slide bar two ends are fixed and are installed in the concubine.This mode can guarantee that when the simultaneously relative body of heater of rotating head and concubine rotates slide bar drives slide block and the final crystal that drives rotates.
Described slide bar distributes around the seed crystal rope, and the length direction of slide bar is parallel with the length direction of seed crystal rope.
Described slide bar and the distance between the seed crystal rope should be greater than being drawn the crystalline diameter, and like this, after crystal was thus lifted to concubine, crystal can be contained in the space between the slide bar.
In order to make the crystalline up-and-down movement steady, described slide bar is evenly distributed around the seed crystal rope, and is equidistant between each slide bar and the seed crystal rope.
The stirring mechanism that can stretch in the body of heater is installed on the described slide block.The stirring mechanism that utilizes rotating head to drive slide bar, slide block and link to each other with slide block is rotated stirring to silicon liquid, need not for stirring mechanism power set to be set separately.
The utlity model has following advantage:
The crystal pulling furnace of lifting of the utility model band and rotating mechanism, fixed action by slide bar and slide block, can effectively avoid the shake and the shaking phenomenon of seed crystal rope, and can realize needing the operation (for example operation of stir silicon liquid) of big torsion effectively, enlarged the processing range that adopts the CZ method to carry out crystal growth, can under the unstable or extraneous situation about having of air-flow around the crystal, realize the crystalline stable growth than big vibration source.
Description of drawings
Fig. 1 is the perspective view of existing crystal pulling furnace;
Fig. 2 is a kind of structural representation of the crystal pulling furnace of lifting of the utility model band and rotating mechanism;
Fig. 3 is the another kind of structural representation of the crystal pulling furnace of lifting of the utility model band and rotating mechanism;
Label among Fig. 1～Fig. 3 is:
1. concubine, 2. body of heater, 3. rotating head, 4. crucible, 5. well heater, 6. seed chuck, 7. segregaion valve, 8. crystal, 9. seed crystal rope, 10. slide block, 11. sealing bearings, 12. slide bars, 13. swivel bearings.
Embodiment
As shown in Figure 2, the utility model band promotes and the crystal pulling furnace of rotating mechanism, comprises the concubine 1 of body of heater 2 and body of heater 2 tops, and lifting and rotating mechanism comprise: the rotating head 3 that is positioned at concubine 1 top; Be positioned at two slide bars 12 that can rotate relative to body of heater 2 of concubine 1; The slide block 10 that can move along slide bar 12, the centre of slide block 10 is connected with rotating head 3 by seed crystal rope 9; And the seed chuck 6 that is positioned at slide block 10 bottom surfaces.
Between rotating head 3 and the concubine 1 sealing bearing 11 is installed, the bottom of concubine 1 is equipped with swivel bearing 13.
Fixedlying connected with rotating head 3 in the upper end of slide bar 12, fixedlys connected with swivel bearing 13 in the lower end of slide bar 12.Slide bar 12 is evenly distributed around seed crystal rope 9, and slide bar 12 and the distance between seed crystal rope 9 are greater than the diameter that is drawn crystal 8.
With seed chuck 6 that slide block 10 centres are connected on＜100〉silicon single-crystal seed crystals are installed, by the seed crystal seeding, lift out diameter and be 6 inches monocrystalline.In the crystal pulling process, lifting and rotating mechanism rotate with 30 rev/mins circular frequency, thereby grow the silicon single crystal of very special quality requirement.In high speed rotating, crystal and seed crystal rope 9 non-jitters and shaking phenomenon.
As shown in Figure 3, the utility model band promotes and the crystal pulling furnace of rotating mechanism, comprises the concubine 1 of body of heater 2 and body of heater 2 tops, and lifting and rotating mechanism comprise: the rotating head 3 that is positioned at concubine 1 top; Be positioned at two slide bars 12 that can rotate relative to body of heater 2 of concubine 1; The slide block 10 that can move along slide bar 12, the centre of slide block 10 is connected with rotating head 3 by seed crystal rope 9; And the seed chuck 6 that is positioned at slide block 10 bottom surfaces.
Rotating head 3 is fixedlyed connected with concubine 1, and the bottom of concubine 1 is equipped with sealing bearing 11.
Stirring mechanism also is installed on the slide block 10, and stirring mechanism has enough length can stretch in the silicon liquid.After stirring mechanism stretched into silicon liquid, rotating head 3 drive slide bars 12, slide block 10 and the stirring mechanism that links to each other with slide block 10 were rotated stirring to silicon liquid.Rotation mode has being rotated counterclockwise or turning clockwise of various circular frequency, perhaps carries out periodicity and rotates and reverse motion, perhaps carries out that the high acceleration speed change rotatablely moves etc.When doing above rotation, stirring mechanism and seed crystal rope 9 equal non-jitter and shaking phenomenon.
Claims (8)
1. one kind with promoting and the crystal pulling furnace of rotating mechanism, comprises the concubine (1) above body of heater (2) and the body of heater (2), it is characterized in that described lifting and rotating mechanism comprise:
Be positioned at the rotating head (3) at concubine (1) top;
Be positioned at some slide bars (12) that can rotate of concubine (1) relative to body of heater (2);
Can be along the slide block (10) of slide bar (12) motion, slide block (10) is connected with rotating head (3) by seed crystal rope (9);
Be positioned at the seed chuck (6) of slide block (10) bottom surface.
2. the crystal pulling furnace of band lifting as claimed in claim 1 and rotating mechanism, it is characterized in that: between described rotating head (3) and the concubine (1) sealing bearing (11) is installed, described slide bar (12) one ends are fixedlyed connected with rotating head (3), the bottom of concubine (1) inner chamber is equipped with swivel bearing (13), the rotating part of swivel bearing (13) is fixedlyed connected with the other end of slide bar (12), and the not rotating part of swivel bearing (13) is fixed on the concubine (1).
3. the crystal pulling furnace of band lifting as claimed in claim 1 and rotating mechanism, it is characterized in that: described rotating head (3) is fixedlyed connected with concubine (1), concubine (1) links to each other by segregaion valve (7) with body of heater (2), between concubine (1) bottom and the segregaion valve (7) sealing bearing (11) is installed, described slide bar (12) is fixedly mounted in the concubine (1).
4. the crystal pulling furnace of band lifting as claimed in claim 1 and rotating mechanism, it is characterized in that: described slide bar (12) distributes around seed crystal rope (9), and the length direction of slide bar (12) is parallel with the length direction of seed crystal rope (9).
5. the crystal pulling furnace of band lifting as claimed in claim 4 and rotating mechanism is characterized in that: described slide bar (12) and the distance between seed crystal rope (9) are greater than the diameter that is drawn crystal (8).
6. the crystal pulling furnace of band lifting as claimed in claim 5 and rotating mechanism, it is characterized in that: described slide bar (12) is evenly distributed around seed crystal rope (9), and is equidistant between each slide bar (12) and the seed crystal rope (9).
7. as the crystal pulling furnace of each described band lifting of claim 1～6 and rotating mechanism, it is characterized in that: the stirring mechanism that can stretch in the body of heater (2) is installed on the described slide block (10).
8. as the crystal pulling furnace of claim 2 or 3 described bands liftings and rotating mechanism, it is characterized in that: described sealing bearing (11) is a tubular shaft magnetic current sealing bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202027253U CN201605352U (en) | 2009-12-16 | 2009-12-16 | Crystal pulling furnace with lifting and rotating mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202027253U CN201605352U (en) | 2009-12-16 | 2009-12-16 | Crystal pulling furnace with lifting and rotating mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201605352U true CN201605352U (en) | 2010-10-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202027253U Expired - Fee Related CN201605352U (en) | 2009-12-16 | 2009-12-16 | Crystal pulling furnace with lifting and rotating mechanism |
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| Country | Link |
|---|---|
| CN (1) | CN201605352U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103603035A (en) * | 2013-03-15 | 2014-02-26 | 北京志光伯元科技有限公司 | Crystal growth lifting device and crystal growth furnace using same |
| CN105525341A (en) * | 2014-10-21 | 2016-04-27 | 镇江大成新能源有限公司 | Electricity saving-type double-furnace barrel |
| CN106894078A (en) * | 2017-02-16 | 2017-06-27 | 温州隆润科技有限公司 | The preparation facilities and preparation method of a kind of monocrystalline silicon piece |
| CN113549999A (en) * | 2020-04-26 | 2021-10-26 | 内蒙古中环协鑫光伏材料有限公司 | Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystal, single crystal furnace system and stabilizing method |
| CN113550001A (en) * | 2020-04-26 | 2021-10-26 | 内蒙古中环协鑫光伏材料有限公司 | Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystal, single crystal furnace system and stabilizing method |
| CN114657630A (en) * | 2022-03-10 | 2022-06-24 | 包头美科硅能源有限公司 | Single crystal furnace feeding cylinder and seed crystal stabilizing device |
-
2009
- 2009-12-16 CN CN2009202027253U patent/CN201605352U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103603035A (en) * | 2013-03-15 | 2014-02-26 | 北京志光伯元科技有限公司 | Crystal growth lifting device and crystal growth furnace using same |
| CN105525341A (en) * | 2014-10-21 | 2016-04-27 | 镇江大成新能源有限公司 | Electricity saving-type double-furnace barrel |
| CN106894078A (en) * | 2017-02-16 | 2017-06-27 | 温州隆润科技有限公司 | The preparation facilities and preparation method of a kind of monocrystalline silicon piece |
| CN113549999A (en) * | 2020-04-26 | 2021-10-26 | 内蒙古中环协鑫光伏材料有限公司 | Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystal, single crystal furnace system and stabilizing method |
| CN113550001A (en) * | 2020-04-26 | 2021-10-26 | 内蒙古中环协鑫光伏材料有限公司 | Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystal, single crystal furnace system and stabilizing method |
| CN113550001B (en) * | 2020-04-26 | 2024-02-20 | 内蒙古中环晶体材料有限公司 | Single crystal furnace positioning mechanism for automatically stabilizing seed crystal, single crystal furnace system and stabilizing method |
| CN114657630A (en) * | 2022-03-10 | 2022-06-24 | 包头美科硅能源有限公司 | Single crystal furnace feeding cylinder and seed crystal stabilizing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101013 Termination date: 20151216 |
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| EXPY | Termination of patent right or utility model |