CN113550001B - Single crystal furnace positioning mechanism for automatically stabilizing seed crystal, single crystal furnace system and stabilizing method - Google Patents
Single crystal furnace positioning mechanism for automatically stabilizing seed crystal, single crystal furnace system and stabilizing method Download PDFInfo
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- CN113550001B CN113550001B CN202010338138.8A CN202010338138A CN113550001B CN 113550001 B CN113550001 B CN 113550001B CN 202010338138 A CN202010338138 A CN 202010338138A CN 113550001 B CN113550001 B CN 113550001B
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- lifting
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- 239000013078 crystal Substances 0.000 title claims abstract description 329
- 238000000034 method Methods 0.000 title claims abstract description 52
- 230000007246 mechanism Effects 0.000 title claims abstract description 41
- 230000000087 stabilizing effect Effects 0.000 title claims abstract description 33
- 230000008569 process Effects 0.000 claims abstract description 37
- 230000009471 action Effects 0.000 claims abstract description 36
- 230000006641 stabilisation Effects 0.000 claims abstract description 17
- 238000011105 stabilization Methods 0.000 claims abstract description 17
- 238000010899 nucleation Methods 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000003028 elevating effect Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 230000004308 accommodation Effects 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals, which comprises a lifting device and a positioning device, wherein the positioning device is connected with the lifting device, the lifting device is arranged at the top of a single crystal furnace auxiliary chamber, the positioning device is arranged in the single crystal furnace auxiliary chamber, the positioning device can slide relative to the single crystal furnace auxiliary chamber, and the positioning device is driven to act through the action of the lifting device to position and stabilize the seed crystals. The invention has the advantages that the invention is applied to the process of pulling up single crystal, and can stabilize the seed crystal in the process of pulling up single crystal, so that the process of stabilizing the seed crystal is automatically carried out, the automatic stabilization of the seed crystal is realized, the labor intensity is reduced, and the production efficiency is improved.
Description
Technical Field
The invention belongs to the technical field of Czochralski single crystals, and particularly relates to a single crystal furnace positioning mechanism, a single crystal furnace system and a stabilization method for automatically stabilizing seed crystals.
Background
Currently, the competition in the industry is increasingly strong, the automation degree of single crystal production enterprises is gradually improved, and the industry is gradually moved to 3.0 and 4.0 times from 2.0 times. In the process of pulling the single crystal, the constant diameter process is automatically controlled, and before pulling the single crystal, the seed crystal needs to be maintained in a stable state, so that the seed crystal can not shake in the process of growing the seed crystal, and the generation of stress is avoided.
At present, the seed crystal is positioned all by manual work, the process needs to lower the seed crystal to the visible position of the auxiliary chamber of the single crystal furnace, the seed crystal is stabilized to a static state by using a tool, and then the seed crystal is manually lifted to a designated position. The process usually needs seven to ten minutes, wastes time seriously, is an important reason for influencing the automation process of the single crystal furnace, and the stability and precision of seed crystals are difficult to ensure due to the relationship between skills, time and the like, so that abnormal accidents such as single crystal shaking and the like in the subsequent crystal pulling process can be caused.
Disclosure of Invention
In view of the above problems, the invention aims to provide a single crystal furnace positioning mechanism, a single crystal furnace system and a stabilizing method for automatically stabilizing seed crystals, which are applied to the process of pulling single crystals, and can stabilize the seed crystals in the process of pulling single crystals, so that the process of stabilizing the seed crystals is automatically carried out, the automatic stabilization of the seed crystals is realized, the labor intensity is reduced, and the production efficiency is improved.
In order to solve the technical problems, the invention adopts the following technical scheme: the utility model provides an automatic crystal growing furnace positioning mechanism of steady seed crystal, includes hoisting device and positioner, and positioner is connected with hoisting device, and hoisting device locates the top of crystal growing furnace auxiliary chamber, and positioner locates inside the crystal growing furnace auxiliary chamber, and positioner can slide for the crystal growing furnace auxiliary chamber, through hoisting device action, drives positioner action, fixes a position, stabilizes the seed crystal.
Specifically, the lifting device comprises a lifting driving device and a lifting connecting device, the lifting driving device is arranged at the top of the auxiliary chamber of the single crystal furnace, the lifting driving device is connected with one end of the lifting connecting device, the other end of the lifting connecting device is connected with the positioning device, the lifting driving device acts to drive the positioning device to act, and seed crystals are positioned and stabilized.
Specifically, the positioning device comprises a positioning piece and a connecting piece, one end of the connecting piece is connected with the positioning piece, and the other end of the connecting piece is in sliding connection with the inner wall of the auxiliary chamber of the single crystal furnace.
Further, the locating piece includes connecting portion and location portion, and connecting portion's one end and location portion fixed connection, connecting portion and the coaxial setting of location portion, location portion and the coaxial setting of single crystal growing furnace auxiliary chamber are convenient for fix a position, stabilize the seed crystal.
Further, the positioning part comprises a positioning part,
one end of the accommodating part is connected with the connecting part and is used for accommodating the seed crystal;
the guide part is connected with the other end of the accommodating part and is used for guiding the seed crystal; the method comprises the steps of,
the accommodating part and the guide part are coaxially arranged.
Further, connecting piece one end is connected with connecting portion, and the other end of connecting piece is equipped with the sliding part, is equipped with the slide on the vice indoor wall of single crystal growing furnace, and sliding part slide the setting to positioner removes in the vice indoor of single crystal growing furnace, so that fix a position, stabilize the seed crystal.
Furthermore, the guide part and the accommodating part are both annular structures.
The single crystal furnace system capable of automatically stabilizing the seed crystal comprises the single crystal furnace positioning mechanism capable of automatically stabilizing the seed crystal, a seed crystal lifting device and a control device, wherein the positioning mechanism is arranged on a single crystal furnace auxiliary chamber and can slide relative to the single crystal furnace auxiliary chamber;
the seed crystal lifting device passes through the positioning mechanism and is connected with the auxiliary chamber of the single crystal furnace;
the control device is respectively electrically connected with the seed crystal lifting device and the positioning mechanism, the seed crystal lifting device lifts and lowers the seed crystal under the action of the control device, and the positioning mechanism slides in the auxiliary chamber of the single crystal furnace under the action of the control device to position and stabilize the seed crystal.
An automatic seed crystal stabilizing method is carried out in the process of the rotation of an auxiliary chamber of a single crystal furnace and the replacement of the air of the auxiliary chamber with protective gas, and comprises the following steps,
the seed crystal descends to a first position under the action of the seed crystal lifting device;
the positioning mechanism descends to position and stabilize the seed crystal when descending to the first position;
after the seed crystal is stabilized, stabilizing and maintaining according to the stabilizing time;
after the stable holding is completed, seeding is performed.
Further, the seed crystal descends under the action of the seed crystal lifting device, the rotation speed of the seed crystal is reduced in the process of descending the seed crystal in the step of descending to the first position, and when the seed crystal descends to the first position, the rotation speed of the seed crystal is reduced to the first rotation speed, wherein the first rotation speed is 0rap/h.
Further, the seed crystal descends under the action of the seed crystal lifting device to a first position, wherein the first position is 1600-1800mm;
after the seed crystal is stabilized, the stabilization maintaining step is carried out according to the stabilization time, wherein the stabilization time is 1-3min.
By adopting the technical scheme, the positioning mechanism and the single crystal furnace system for realizing stable and automatic seed crystal are simple in structure and convenient to use, the positioning mechanism is arranged in the auxiliary chamber of the single crystal furnace and can slide along the auxiliary chamber of the single crystal furnace to position and stabilize the seed crystal; meanwhile, the device is provided with a lifting device, the positioning device moves up and down in the auxiliary chamber of the single crystal furnace under the action of the lifting device, the seed crystal is stably lowered, and after the stabilization is finished, the positioning device moves to the top end of the auxiliary chamber of the single crystal furnace, so that interference with the Czochralski single crystal is avoided;
the positioning device is provided with the positioning part, and the positioning part is provided with the conical guide part, so that when the seed crystal is positioned and stabilized, after the seed crystal stops descending, the heavy hammer is guided through the guide part, so that the heavy hammer can enter the accommodating part, the accommodating part is in close contact with the heavy hammer, the resistance to the heavy hammer can be applied, the heavy hammer can be stabilized, the heavy hammer does not shake any more, the heavy hammer is kept still under the action of the positioning device, the seed crystal is kept still, after the seed crystal is stabilized, the positioning device moves to the upper part of the inner part of the auxiliary chamber of the single crystal furnace under the action of the lifting device, the seed crystal is stabilized, the process of automatic proceeding of the seed crystal is realized, the automatic stabilizing of the seed crystal is realized, the labor intensity is reduced, the production efficiency is improved, the auxiliary chamber is enabled to automatically rotate back and the welding process of the next step is enabled to be in seamless connection, the step of adding manpower in two-step automatic operation is avoided, the automatic efficiency is reduced, and the industrial automatic progress is accelerated;
the automatic seed crystal stabilizing mechanism is adopted to automatically stabilize seed crystals, the automatic seed crystal stabilizing process can be carried out in the process of the secondary chamber rotation and the secondary chamber air replacement to argon, the process time of the secondary chamber rotation and the secondary chamber purification is utilized to finish, the invalid working hours are shortened, and the purpose of improving the output is achieved.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention;
FIG. 2 is a schematic view of a positioning device mounting structure according to an embodiment of the present invention;
fig. 3 is a schematic view of a positioning device according to an embodiment of the present invention.
In the figure:
1. lifting drive 2, lifting device 3 and positioning device
4. Auxiliary chamber 5, heavy hammer 6 and seed crystal of single crystal furnace
20. Lifting drive 21, lifting connection 30 and connection piece
310. Connection part 311, accommodation part 312, and guide part
40. Slide 300, sliding portion 31, and positioning member
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific examples.
Fig. 1 shows a schematic structural diagram of an embodiment of the present invention, specifically shows the structure of the embodiment, and relates to a single crystal furnace positioning mechanism, a single crystal furnace system and a stabilizing method for automatically stabilizing seed crystals, which are used for automatically positioning and stabilizing seed crystals in the process of pulling single crystals, so as to realize automatic stabilization of seed crystals, reduce labor intensity, and improve productivity.
1-3, including hoisting device 2 and positioner 3, positioner 3 is connected with hoisting device 2, and hoisting device 2 locates the top of single crystal furnace auxiliary chamber 4, and positioner 3 locates single crystal furnace auxiliary chamber 4 inside, and positioner 3 can slide for single crystal furnace auxiliary chamber 4, through hoisting device 2 action, drives positioner 3 action, fixes a position, stabilizes seed crystal 6, and this positioner 3 slides locates the inside of single crystal furnace auxiliary chamber 4, can reciprocate along single crystal furnace auxiliary chamber 4 inner wall, and positioner 3 reciprocates under the effect of hoisting device 2, fixes a position, stabilizes seed crystal 6.
Specifically, the lifting device 2 includes a lifting driving device 20 and a lifting connection device 21, the lifting driving device 20 is disposed at the top of the auxiliary chamber 4 of the single crystal furnace, the lifting driving device 20 is connected with one end of the lifting connection device 21, the other end of the lifting connection device 21 is connected with the positioning device 3, the lifting driving device 20 acts to drive the positioning device 3 to act, and the seed crystal 6 is positioned and stabilized. The lifting driving device 20 is fixedly arranged at the top end of the auxiliary chamber 4 of the single crystal furnace, the lifting driving device 20 is driven by power of the lifting device 2 to drive the lifting connecting device 21 to act, and the lifting driving device 20 can be a motor, a motor or other power devices, and is selected according to actual requirements.
The lifting connection means 21 may be a rod-like structure, or a chain-like structure, or a rope-like structure, or other structures, chosen according to the actual needs, without specific requirements. The number of the lifting connection means 21 may be two, three, four, or other, and is selected according to the actual requirements, and is not specifically limited. In this embodiment, the number of the lifting connection devices 21 is preferably four, and the four lifting connection devices 21 are arranged at equal intervals, so that the positioning device 3 is stressed uniformly and moves stably, and the positioning device 3 can move up and down along the inner wall of the auxiliary chamber 4 of the single crystal furnace conveniently to position and stabilize the seed crystal 6.
When the lifting connection devices 21 are in a rope-shaped structure, the number of the lifting driving devices 20 is consistent with that of the lifting connection devices 21, each lifting driving device 20 drives one lifting connection device 21, and the lifting connection devices 21 move up and down, so that the positioning device 3 moves up and down, and the seed crystal 6 is positioned and stabilized. Preferably, the lifting connection device 21 is a wire rope, one end of the lifting connection device is connected with a rotating roller arranged on a rotating shaft of the motor, the other end of the lifting connection device is connected with the positioning device 3, and the wire rope is wound on the rotating roller through the action of the motor to lift the positioning device 3.
When the lifting connection device 21 is in a rod-shaped structure, one ends, which are far away from the ends connected with the positioning devices 3, of the lifting connection devices 21 are connected with the lifting connection pieces, the lifting connection pieces are in an annular structure, the lifting connection devices 21 are arranged on the periphery of the lifting connection pieces at equal intervals, the other ends of the lifting connection devices 21 are connected with the positioning devices 3, the lifting connection devices 21 ascend or descend at the same time, and then the positioning devices 3 ascend or descend, are uniformly stressed and move stably. Any one is fixedly provided with a rack on the lifting connecting device 21, a gear is fixedly provided on the rotating shaft of the motor of the lifting driving device 20, the gear is meshed with the rack, the lifting connecting device 21 is lifted through the rotation of the motor and the meshing of the gear and the rack, the positioning device 3 is driven to lift, and the seed crystal 6 is positioned and stabilized. Preferably, the cross-section of the rod-shaped lifting connection means 21 is rectangular, facilitating the mounting of the rack.
The positioning device 3 comprises a positioning piece 31 and a connecting piece 30, one end of the connecting piece 30 is connected with the positioning piece 31, the other end of the connecting piece 30 is connected with the inner wall of the auxiliary chamber 4 of the single crystal furnace in a sliding manner, the end of the connecting piece 30 is connected with the lifting connecting device 21, the connecting piece 30 is arranged on the periphery of the positioning piece 31, the positioning piece 31 is connected with the lifting connecting device 21 through the arrangement of the connecting piece 30, and the positioning device 3 is lifted under the action of the lifting driving device 20 and the lifting connecting device 21, so that the positioning piece 31 positions and stabilizes the seed crystal 6. The number of the connecting pieces 30 is consistent with the number of the lifting connecting devices 21, so that each connecting piece 30 is connected with each lifting connecting device 21, and meanwhile, the connecting pieces 30 are arranged on the periphery of the positioning piece 31 at equal intervals, so that the positioning piece 31 is uniformly stressed, and the seed crystal 6 can be accurately positioned and stabilized.
The above-mentioned locating piece 31 includes connecting portion 310 and location portion, connecting portion 310's one end and location portion fixed connection, connecting portion 310 and the coaxial setting of location portion, location portion and the coaxial setting of single crystal furnace auxiliary chamber 4, be convenient for fix a position seed crystal 6, stability, that is, in vertical direction, connecting portion 310's one end is connected with location portion, and location portion and the coaxial setting of single crystal furnace auxiliary chamber 4, the axis of location portion coincides with the axis of single crystal furnace auxiliary chamber 4, make location portion lie in the axis of single crystal furnace auxiliary chamber 4, because seed crystal 6 is when carrying out the straight single crystal, lie in the axis of single crystal furnace auxiliary chamber 4, reciprocate along the axis of single crystal furnace auxiliary chamber 4, be convenient for location portion fix a position seed crystal 6, stability. The upper and lower ends of the connecting portion 310 are opened, so that the connecting portion is convenient to pass through the steel wire rope of the seed crystal and the heavy hammer which are connected together, and the seed crystal is lifted and lowered, so that the positioning piece 31 is convenient to position and stabilize the seed crystal.
The connecting part 310 is connected with one end of the connecting piece 30 on the periphery, the other end of the connecting piece 30 is connected with the inner wall of the auxiliary chamber 4 of the single crystal furnace in a sliding way, a sliding part 300 is arranged at the end of the connecting piece 30, a slideway 40 is arranged on the inner wall of the auxiliary chamber 4 of the single crystal furnace, and the sliding part 300 are arranged in a sliding way, so that the positioning device 3 can move up and down in the auxiliary chamber 4 of the single crystal furnace, and the seed crystal 6 can be positioned and stabilized conveniently. The connecting piece is in a rod-shaped structure, a sliding part 300 is arranged at one end, far away from the connecting part 310, of the connecting piece, the shape of the sliding part 300 is adapted to the shape of the slideway 40, and the sliding part 300 is conveniently arranged in the slideway 40 to perform ascending or descending movement along the slideway 40. The inner wall of the auxiliary chamber 4 of the single crystal furnace is provided with a plurality of slide ways 40, the number of the slide ways 40 is consistent with that of the connecting pieces 30, and the sliding part 300 of each connecting piece 30 is arranged in one slide way 40 in a sliding way, so that the positioning part is uniformly stressed and moves stably.
In this embodiment, the sliding portion 300 is preferably T-shaped, the cross-section of the sliding track 40 is preferably T-shaped, the sliding portion 300 is slidably disposed in the sliding track 40, and one end of the connecting member 30 near the sliding portion 300 is fixedly connected with the lifting connection device 21, so that the connecting member 30 ascends or descends along the inner wall of the auxiliary chamber 4 of the single crystal furnace under the action of the lifting device 2 and the sliding track 40, and further the positioning portion ascends or descends to position and stabilize the seed crystal 6.
In order to reduce the occupation of the lifting connection device 21 in the internal space of the auxiliary chamber 4 of the single crystal furnace, the lifting connection device 21 is positioned in the slideway 40 of the auxiliary chamber 4 of the single crystal furnace, so that the positioning device 3 moves up and down under the action of the lifting device 2.
The positioning part comprises a containing part 311, wherein one end of the containing part 311 is connected with the connecting part 310 and is used for containing the seed crystal 6; a guide portion 312, the guide portion 312 being connected to the other end of the accommodating portion 311 for guiding the seed crystal 6; and, the accommodating part 311 is coaxially arranged with the guide part 312, so as to ensure that after the seed crystal 6 is positioned and stabilized, the axis of the seed crystal 6 is coaxially arranged with the axis of the auxiliary chamber 4 of the single crystal furnace, so that the subsequent procedures of welding and the like are continued; this guide portion 312 is located the one side that connecting portion 310 is close to the single crystal growing furnace, at the in-process that locating portion moved down, guide portion 312 and weight 5 contact, guide portion 312 leads weight 5 through the guide effect of guide portion 312, weight 5 gets into guide portion 312, and get into accommodation portion 311 along guide portion 312, make weight 5 can accurately get into accommodation portion 311, weight 5 and accommodation portion 311 in close contact, accommodation portion 311 exerts the resistance to weight 5, make weight 5 no longer rock, and then make seed crystal 6 no longer rock, guarantee that locating portion is accurate to fix a position seed crystal 6, stability.
The accommodating part 311 is of a ring structure, so that the seed crystal 6 is conveniently positioned and stabilized and then the heavy hammer 5 is conveniently accommodated, two ends of the accommodating part 311 are opened, a steel wire rope connected with the heavy hammer 5 is conveniently penetrated, the seed crystal 6 is conveniently lifted and lowered, the shape of the accommodating part 311 can be of a cylindrical ring structure, the diameter of the accommodating part is larger than that of the connecting part 310, the accommodating part 311 is connected with the connecting part 310 through an inclined connecting part, the inclined connecting part is of a ring structure, the connecting part 310 is conveniently communicated with the accommodating part 311, and the steel wire rope connected with the heavy hammer 5 is conveniently penetrated; the accommodating portion 311 may be a conical annular structure, or an annular structure with other shapes, which is selected according to practical requirements, and the shape of the accommodating portion 311 is preferably adapted to the shape of the weight 5, so that the weight 5 is accommodated by the accommodating portion 311, the weight 5 is not rocked, and the seed crystal 6 is positioned, stable and accurate.
The guide portion 312 is of a variable diameter annular structure, and has a large diameter end and a small diameter end, the small diameter end is connected with the accommodating portion 311, that is, the guide portion 312 is of a horn-shaped structure, and two ends of the guide portion are open, so that the guide portion 312 is communicated with the outside, and a steel wire rope connected with the heavy hammer 5 and the seed crystal 6 which are connected together is convenient to pass through the guide portion 312, and the seed crystal 6 is convenient to rise and fall. The small diameter end of the guide part 312 is connected with one end of the accommodating part 311 far away from the connection part 310, the large diameter end is a free end, the large diameter end extends outwards in an inclined way, the extending line intersects with the axis of the accommodating part 311, meanwhile, the axis of the guide part 312 and the axis of the accommodating part 311 are coaxially arranged, so that the heavy hammer 5 enters the guide part 312, is guided by the guide part 312 and enters the accommodating part 311, and the accommodating part 311 is accommodated by the accommodating part 311, so that the heavy hammer 5 and the seed crystal 6 which are connected together are quickly stable and positioned under the action of the accommodating part 311; the diameter of the small diameter end is not smaller than the diameter of the joint of the accommodating part 311 and the small diameter end, so that the joint of the accommodating part 311 and the guide part 312 is smooth in transition, the connection mode is preferably integrated, and the structure is stable; the arrangement of the accommodating part 311 and the guide part 312 ensures that the single crystal pulling process is fast and stable, the single crystal pulling process is automatically stable, the labor intensity is reduced, the production efficiency is improved, the auxiliary chamber is automatically rotated and the next welding process is seamlessly connected, the manual steps are prevented from being added in the two-step automatic operation, the automatic efficiency is reduced, and the industrial automation progress is accelerated.
This hold portion 311, guide portion 312 and connecting portion 310 coaxial setting, and all with the vice room 4 coaxial setting of single crystal growing furnace, be convenient for pass connecting portion 310, hold portion 311 and guide portion 312 with the wire rope that is connected at weight 5, seed crystal 6, reciprocate, and then make seed crystal 6 rise or descend, realize the lift of seed crystal 6, simultaneously, at positioner 3's lift in-process, guide portion 312 and hold portion 311 lead, hold seed crystal 6, fix a position seed crystal 6, stability. When the seed crystal 6 descends to a set position, the positioning device 3 descends under the action of the lifting device 2, and when the positioning device 3 descends to the position where the seed crystal 6 is located, the heavy hammer 5 enters the accommodating part 311 along the guide part 312, and is guided under the action of the guide part 312, so that the heavy hammer 5 smoothly enters the accommodating part 311, the accommodating part 311 is in close contact with the heavy hammer 5, and resistance is applied to the heavy hammer 5, so that the heavy hammer 5 does not shake any more, the heavy hammer 5 is stabilized, and the seed crystal 6 is stabilized; after the seed crystal 6 is stable, the positioning device 3 is lifted to the original position under the action of the lifting device 2 and is positioned at the top end of the auxiliary chamber 4 of the single crystal furnace, and the positioning device does not interfere with the movement of the Czochralski single crystal.
The utility model provides an automatic crystal growing furnace system of stable seed crystal, including foretell crystal growing furnace positioning mechanism of stable seed crystal, seed crystal elevating gear and controlling means, positioning mechanism locates on the crystal growing furnace auxiliary chamber 4, and positioning mechanism can slide for the crystal growing furnace auxiliary chamber 4, elevating gear 2 fixed mounting of positioning mechanism is at the top of crystal growing furnace auxiliary chamber 4, elevating gear 3 slides locates the inside of crystal growing furnace auxiliary chamber 4, elevating gear 2's promotion connecting device 21 one end is connected with lifting drive device 20, the other end is connected with elevating gear 3, and the slider 300 of connecting piece 30 of positioning device 3 slides and locates on the slide 40 on the inner wall of crystal growing furnace auxiliary chamber 4, under elevating gear 2's effect, elevating gear 3 goes up and down along the inner wall of crystal growing furnace auxiliary chamber 4, fix a position, stabilize seed crystal 6.
The seed crystal lifting device passes through the positioning mechanism and is arranged in the auxiliary chamber 4 of the single crystal furnace, the seed crystal lifting device comprises a lifting driving device 1, a seed crystal connecting device and a heavy hammer 5, the lifting driving device 1 is fixedly arranged at the top of the auxiliary chamber 4 of the single crystal furnace, one end of the seed crystal connecting device is connected with the lifting driving device 1, the other end of the seed crystal connecting device is connected with the heavy hammer 5, the end of the seed crystal connecting device passes through the positioning part and is connected with the heavy hammer 5 when being arranged, the heavy hammer 5 is connected with a seed crystal 6, and under the action of the lifting driving device 1, the heavy hammer 5 ascends or descends through the seed crystal connecting device, so that the seed crystal 6 ascends or descends, and the single crystal is pulled vertically. The lift drive 20 is preferably an electric motor and the seed crystal attachment is preferably a wire rope.
The control device is respectively electrically connected with the seed crystal lifting device and the positioning mechanism, the seed crystal lifting device lifts under the action of the control device, and the positioning mechanism slides in the auxiliary chamber 4 of the single crystal furnace under the action of the control device to position and stabilize the seed crystal 6. The control device is preferably a PLC controller, a preset program is arranged in the control device, the control device is respectively electrically connected with the motor of the lifting driving device 1 and the motor of the lifting driving device 20, the motor of the lifting driving device 1 and the motor of the lifting driving device 20 are controlled to act according to the preset program, then the rising and the falling of the seed crystal 6 are controlled, and the positioning mechanism is controlled to position and stabilize the seed crystal 6.
The automatic seed crystal stabilizing process is carried out in the process of rotating the auxiliary chamber 4 of the single crystal furnace and replacing the air in the auxiliary chamber with protecting gas, which is inert gas, preferably argon, and the seed crystal is stabilized and positioned in the process of rotating the auxiliary chamber and purifying the auxiliary chamber, so that the invalid working time is shortened and the aim of improving the output is fulfilled.
A method for automatically stabilizing seed crystals comprises the following steps,
the seed crystal 6 descends to a first position under the action of a seed crystal lifting device, the seed crystal 6 is arranged on the heavy hammer 5, the auxiliary chamber 4 of the single crystal furnace rotates, air replacement is carried out after the auxiliary chamber rotates, and the air in the single crystal furnace is replaced by protective gas so as to facilitate the smooth proceeding of the subsequent straight pulling single crystal; in the process of the rotation of the auxiliary chamber and the replacement of the air of the auxiliary chamber into the protective gas, the seed crystal 6 descends under the action of the seed crystal lifting device to a first position, wherein the first position is 1600-1800mm, and is selected according to actual requirements, and specific requirements are not required here, and preferably, in the embodiment, the first position is 1750mm.
The seed crystal 6 is lowered under the action of the seed crystal lifting device to a first position, the rotation speed of the seed crystal 6 is reduced in the process of lowering the seed crystal 6, when the seed crystal 6 is lowered to the first position, the rotation speed of the seed crystal 6 is lowered to a first rotation speed, wherein the first rotation speed is 0rap/h, that is, the rotation speed of the seed crystal 6 is gradually reduced in the process of lowering the seed crystal 6, and when the seed crystal 6 is lowered to the first position, the rotation speed of the seed crystal 6 is lowered to 0rap/h, that is, the seed crystal 6 is not rotated any more.
When the seed crystal 6 is lowered to this position, the lowering is not performed, and the seed crystal 6 is not rotated any more, but the seed crystal 6 is rocked in the auxiliary chamber 4 of the single crystal furnace.
When the positioning mechanism descends to the first position, the seed crystal 6 is positioned and stabilized, after the seed crystal 6 descends to the first position, the positioning mechanism acts, the lifting driving device 20 acts, the lifting connecting device 21 descends, the positioning device 3 descends along the inner wall of the auxiliary chamber 4 of the single crystal furnace, when the positioning device 3 descends to the first position, the heavy hammer 5 connected with the seed crystal 6 is guided by the guide part 312 and enters the accommodating part 311, the accommodating part 311 is in close contact with the periphery of the heavy hammer 5, and the resistance is applied to the heavy hammer 5, so that the heavy hammer 5 does not shake any more, and the seed crystal 6 does not shake any more.
After the seed crystal 6 is stabilized, the seed crystal is kept stable according to the stabilization time, the seed crystal is prevented from being stabilized with poor precision due to short time, the stabilization time is 1-3min, the seed crystal is selected according to actual requirements, specific requirements are not needed here, and preferably, the stabilization time is 2min in the embodiment.
After the stable holding is completed, seeding is performed, and when the seed crystal 6 is stable, the positioning mechanism is lifted to the upper part of the inside of the auxiliary chamber 4 of the single crystal furnace, so that the seed crystal 6 does not interfere with the pulled single crystal, and seeding is performed to pull the single crystal.
By adopting the technical scheme, the positioning mechanism and the single crystal furnace system for realizing stable and automatic seed crystal are simple in structure and convenient to use, the positioning mechanism is arranged in the auxiliary chamber of the single crystal furnace and can slide along the auxiliary chamber of the single crystal furnace to position and stabilize the seed crystal; meanwhile, the device is provided with a lifting device, the positioning device moves up and down in the auxiliary chamber of the single crystal furnace under the action of the lifting device, the seed crystal is stably lowered, and after the stabilization is finished, the positioning device moves to the top end of the auxiliary chamber of the single crystal furnace, so that interference with the Czochralski single crystal is avoided;
the positioning device is provided with the positioning part, and the positioning part is provided with the conical guide part, so that when the seed crystal is positioned and stabilized, after the seed crystal stops descending, the heavy hammer is guided through the guide part, so that the heavy hammer can enter the accommodating part, the accommodating part is in close contact with the heavy hammer, the resistance to the heavy hammer can be applied, the heavy hammer can be stabilized, the heavy hammer does not shake any more, the heavy hammer is kept still under the action of the positioning device, the seed crystal is kept still, after the seed crystal is stabilized, the positioning device moves to the upper part of the inner part of the auxiliary chamber of the single crystal furnace under the action of the lifting device, the seed crystal is stabilized, the process of automatic proceeding of the seed crystal is realized, the automatic stabilizing of the seed crystal is realized, the labor intensity is reduced, the production efficiency is improved, the auxiliary chamber is enabled to automatically rotate back and the welding process of the next step is enabled to be in seamless connection, the step of adding manpower in two-step automatic operation is avoided, the automatic efficiency is reduced, and the industrial automatic progress is accelerated;
the automatic seed crystal stabilizing mechanism is adopted to automatically stabilize seed crystals, the automatic seed crystal stabilizing process can be carried out in the process of the secondary chamber rotation and the secondary chamber air replacement to argon, the process time of the secondary chamber rotation and the secondary chamber purification is utilized to finish, the invalid working hours are shortened, and the purpose of improving the output is achieved.
The foregoing describes the embodiments of the present invention in detail, but the description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.
Claims (7)
1. A single crystal furnace positioning mechanism for automatically stabilizing seed crystals is characterized in that: the device comprises a lifting device and a positioning device, wherein the positioning device is connected with the lifting device, the lifting device is arranged at the top of a secondary chamber of the single crystal furnace, the positioning device is arranged in the secondary chamber of the single crystal furnace, the positioning device can slide relative to the secondary chamber of the single crystal furnace, and the positioning device is driven to act through the action of the lifting device to position and stabilize seed crystals;
the positioning device comprises a positioning piece and a connecting piece, one end of the connecting piece is connected with the positioning piece, and the other end of the connecting piece is connected with the inner wall of the auxiliary chamber of the single crystal furnace in a sliding manner;
the positioning piece comprises a connecting part and a positioning part, one end of the connecting part is fixedly connected with the positioning part, the connecting part and the positioning part are coaxially arranged, and the positioning part and the auxiliary chamber of the single crystal furnace are coaxially arranged, so that seed crystals can be positioned and stabilized conveniently;
the positioning portion includes a plurality of positioning portions,
one end of the accommodating part is connected with the connecting part and used for accommodating seed crystals;
the guide part is connected with the other end of the accommodating part and is used for guiding the seed crystal; the method comprises the steps of,
the accommodating part and the guide part are coaxially arranged;
the lifting device comprises a lifting driving device and a lifting connecting device, the lifting driving device is arranged at the top of the auxiliary chamber of the single crystal furnace, the lifting driving device is connected with one end of the lifting connecting device, the other end of the lifting connecting device is connected with the positioning device, the lifting driving device acts and drives the positioning device to act so as to position and stabilize seed crystals, and the lifting connecting device is of a rope-shaped structure.
2. The single crystal growing furnace positioning mechanism of automatic seed crystal stabilization according to claim 1, wherein: one end of the connecting piece is connected with the connecting part, the other end of the connecting piece is provided with a sliding part, a slideway is arranged on the inner wall of the auxiliary chamber of the single crystal furnace, and the sliding part is arranged in a sliding way with the sliding part so that the positioning device can move in the auxiliary chamber of the single crystal furnace to position and stabilize seed crystals.
3. The single crystal growing furnace positioning mechanism of automatic seed crystal stabilization according to claim 2, wherein: the guide part and the containing part are both annular structures.
4. A single crystal furnace system for automatically stabilizing seed crystals is characterized in that: a single crystal furnace positioning mechanism comprising the automatic stable seed crystal according to any one of claims 1-3, a seed crystal lifting device and a control device, wherein the positioning mechanism is arranged on the auxiliary chamber of the single crystal furnace and can slide relative to the auxiliary chamber of the single crystal furnace;
the seed crystal lifting device is connected with the auxiliary chamber of the single crystal furnace through the positioning mechanism;
the control device is respectively and electrically connected with the seed crystal lifting device and the positioning mechanism, the seed crystal lifting device lifts the seed crystal under the action of the control device, and the positioning mechanism slides in the auxiliary chamber of the single crystal furnace under the action of the control device to position and stabilize the seed crystal.
5. A method for automatically stabilizing seed crystals, which is characterized in that: a single crystal furnace positioning mechanism using the automatic stable seed crystal according to claim 1, which is carried out during the process of the rotation of a sub-chamber of the single crystal furnace and the replacement of the air of the sub-chamber with a protective gas, comprises the following steps,
the seed crystal descends to a first position under the action of the seed crystal lifting device;
the positioning mechanism descends, and when the positioning mechanism descends to the first position, the seed crystal is positioned and stabilized;
after the seed crystal is stabilized, stabilizing and maintaining according to the stabilizing time;
after the stable holding is completed, seeding is performed.
6. The method for automatically stabilizing a seed crystal according to claim 5, wherein: the seed crystal descends under the action of the seed crystal lifting device, the rotation speed of the seed crystal is reduced in the step of descending to the first position in the process of descending the seed crystal, and when the seed crystal descends to the first position, the rotation speed of the seed crystal is reduced to the first rotation speed, wherein the first rotation speed is 0rap/h.
7. The method for automatically stabilizing a seed crystal according to claim 6, wherein: descending seed crystal under the action of a seed crystal lifting device to a first position, wherein the first position is 1600-1800mm;
and after the seed crystal is stabilized, performing a stabilization maintaining step according to the stabilization time, wherein the stabilization time is 1-3min.
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| CN114836824B (en) * | 2022-03-29 | 2024-03-29 | 中环领先(徐州)半导体材料有限公司 | Seed crystal pulling device, crystal growth equipment and seed crystal pulling method |
| CN115287746A (en) * | 2022-09-02 | 2022-11-04 | 宇泽半导体(云南)有限公司 | Single crystal furnace auxiliary chamber structure for stabilizing single crystal seed crystal and seed crystal stabilizing method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11314998A (en) * | 1998-05-01 | 1999-11-16 | Nippon Steel Corp | Silicon single crystal pulling equipment and pulling method using the same |
| CN201605352U (en) * | 2009-12-16 | 2010-10-13 | 浙江碧晶科技有限公司 | Crystal pulling furnace with lifting and rotating mechanism |
| CN203530481U (en) * | 2013-11-06 | 2014-04-09 | 江苏华盛天龙光电设备股份有限公司 | Stable positioning device for flexible shaft of lift head of crystal growth furnace |
| CN212476949U (en) * | 2020-04-26 | 2021-02-05 | 内蒙古中环协鑫光伏材料有限公司 | Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals and single crystal furnace system |
-
2020
- 2020-04-26 CN CN202010338138.8A patent/CN113550001B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11314998A (en) * | 1998-05-01 | 1999-11-16 | Nippon Steel Corp | Silicon single crystal pulling equipment and pulling method using the same |
| CN201605352U (en) * | 2009-12-16 | 2010-10-13 | 浙江碧晶科技有限公司 | Crystal pulling furnace with lifting and rotating mechanism |
| CN203530481U (en) * | 2013-11-06 | 2014-04-09 | 江苏华盛天龙光电设备股份有限公司 | Stable positioning device for flexible shaft of lift head of crystal growth furnace |
| CN212476949U (en) * | 2020-04-26 | 2021-02-05 | 内蒙古中环协鑫光伏材料有限公司 | Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals and single crystal furnace system |
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