CN111962141A - Hard shaft heavy-load silicon single crystal pulling device - Google Patents
Hard shaft heavy-load silicon single crystal pulling device Download PDFInfo
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- CN111962141A CN111962141A CN202010970479.7A CN202010970479A CN111962141A CN 111962141 A CN111962141 A CN 111962141A CN 202010970479 A CN202010970479 A CN 202010970479A CN 111962141 A CN111962141 A CN 111962141A
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- 239000013078 crystal Substances 0.000 title claims abstract description 203
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 35
- 239000010703 silicon Substances 0.000 title claims abstract description 35
- 230000001360 synchronised effect Effects 0.000 claims abstract description 5
- 238000005303 weighing Methods 0.000 claims description 32
- 239000003638 chemical reducing agent Substances 0.000 claims description 31
- 239000011553 magnetic fluid Substances 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 claims 2
- 230000033001 locomotion Effects 0.000 abstract description 7
- 230000005284 excitation Effects 0.000 abstract description 4
- 230000007812 deficiency Effects 0.000 abstract description 2
- 238000004804 winding Methods 0.000 description 28
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 25
- 238000000034 method Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 6
- 239000000155 melt Substances 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 210000000078 claw Anatomy 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004033 diameter control Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a hard shaft heavy-load silicon single crystal pulling device which comprises a supporting structure, a single crystal bearing outer hard shaft, a single crystal clamping jaw, a seed crystal bearing inner hard shaft, a seed crystal clamping head, a rotary driving device, an outer hard shaft lifting device and an inner hard shaft lifting device, wherein the single crystal bearing outer hard shaft is arranged at the bottom of the single crystal bearing outer hard shaft, the rotary driving device is used for driving the single crystal bearing outer hard shaft to rotate, the outer hard shaft lifting device is used for driving the single crystal bearing outer hard shaft to lift, and the inner hard shaft lifting device is used for driving. The invention realizes the synchronous rotation movement of the inner hard shaft and the outer hard shaft, the independent lifting movement of the outer hard shaft and the independent lifting movement of the inner hard shaft, has stronger strength and rigidity, can bear single crystals with the weight of more than 500Kg, makes up the deficiency of the bearing capacity of the flexible shaft pulling device, avoids the phenomena of flexible shaft swinging and simple pendulum resonance in the flexible shaft pulling device, and can overcome the crystal disturbance caused by the symmetry deviation of a thermal field, the symmetry deviation of an airflow excitation acting force and the like.
Description
Technical Field
The invention relates to a crystal pulling device in a large-size and heavy-weight photovoltaic or electronic grade silicon single crystal Czochralski method growth furnace, in particular to a hard-axis heavy-load silicon single crystal pulling device which has the advantages of high pulling guiding precision, small single crystal disturbance, high internal crystal quality and external crystal appearance quality and large bearing capacity, and particularly relates to a hard-axis heavy-load silicon single crystal pulling device.
Background
The silicon single crystal is a basic material in the photovoltaic cell and semiconductor industry, more than 90 percent of photovoltaic cells and more than 95 percent of semiconductor devices adopt silicon-based substrates, wherein the technology of the Czochralski silicon single crystal has high maturity and occupies the main market. Silicon single crystals are being developed in the direction of large diameter and large weight for the reasons of productivity of photovoltaic cells and semiconductor devices and cost reduction. When the weight of the silicon single crystal is more than or equal to 500Kg, the soft shaft winding device can not meet the requirement due to the limitation of the bearing capacity of the tungsten wire rope, and a hard shaft heavy-load lifting device is required to replace the soft shaft winding device.
Along with the continuous improvement of photoelectric conversion efficiency, service life and attenuation rate of a photovoltaic cell and the requirements of characteristic line width and performance parameters of a semiconductor device, the requirements on the quality of silicon single crystals are higher and higher.
In the process of growing silicon single crystals by using a tungsten wire rope flexible shaft as a pulling shaft, the phenomenon of crystal disturbance (or shaking) generally exists. When the crystal is disturbed, an ADC (Auto Diameter Control) Control system for monitoring the growth Diameter of the crystal cannot accurately monitor the Diameter, so that the feedback signal is abnormal, and the pulling speed fluctuates periodically along with the disturbance; the perturbation can cause the change of a microscopic diffusion layer at the moment of growth, so that the change of an effective segregation coefficient is caused, and the radial nonuniformity of the concentration distribution of the microscopic dopant is caused; the disturbance can also cause the unstable convection condition of the melt, so that the supercooling degree of a solid-liquid interface is changed during growth, and conditions are provided for dendritic crystal growth; meanwhile, as the crystal is lifted upwards and the length of the tungsten wire rope flexible shaft is reduced, the system resonance frequency of the lifting device is continuously changed, and the resonance of the crystal and the lifting device is easily caused. Therefore, the crystal disturbance adversely affects the resistivity, the intrinsic quality of the crystal such as crystal micro-defects, the extrinsic shape of the single crystal, the stability of crystal growth, and the like.
The crystal disturbance is caused by the vibration of a vacuum pump, circulating water, compressed air, a foundation and the environment; secondly, a thermal field: the thermal field symmetry is not good, and the melt in the crucible is easy to generate vortex, so that the melt becomes periodic disturbance force of crystal disturbance; thirdly, airflow: after the crystal enters the auxiliary furnace chamber, protective gas filled from the top of the auxiliary furnace chamber flows through the surface of the crystal, the flow area is reduced, the flow speed is increased, and if the symmetry of a thermal field is poor or vacuum extraction holes on two sides of a furnace chassis are partially blocked, so that the suction force fluctuates or a large difference is generated, the disturbance of the silicon single crystal is easily caused by the excitation action of airflow; fourthly, the single crystal growth process parameter setting influences the single crystal disturbance, the single crystal growth is a section of rotary pulling motion immersed in the melt, the process growth parameters such as crystal rotating speed and the like have larger influence on the melt convection, and meanwhile, the process parameter setting should avoid the resonance interval of the crystal disturbance as much as possible, so the good process setting is one of the ways of effectively reducing the single crystal disturbance; fifthly, disturbance is caused by human factors, such as treading on the base, relying on the furnace body, running operation and the like; sixthly, the crystal pulling shaft and the crucible shaft center have poor centering performance and are also excitation sources of disturbance.
Disclosure of Invention
In view of the above problems, a hard axis heavy-duty silicon single crystal pulling apparatus is provided.
The technical means adopted by the invention are as follows:
a hard spindle heavy-duty silicon single crystal pulling apparatus comprising:
the supporting structure is vertically fixed at the top of the vacuum furnace chamber;
the single crystal bearing outer hard shaft is of a hollow structure, is vertically arranged in the supporting structure, and the bottom of the single crystal bearing outer hard shaft penetrates into the vacuum furnace chamber;
the seed crystal bearing inner hard shaft is vertically arranged in the single crystal bearing outer hard shaft, and the outer wall of the seed crystal bearing inner hard shaft is provided with a spline matched with the spline groove;
the single crystal clamping jaw is fixedly connected with the bottom of the single crystal bearing outer hard shaft and is used for clamping the small shoulder of the single crystal;
the seed crystal chuck is fixedly connected with the bottom of the seed crystal bearing inner hard shaft and is used for fixing the seed crystal at the top of the single crystal;
the rotation driving device is arranged in the supporting structure and is positioned above the single crystal bearing outer hard shaft and used for driving the single crystal bearing outer hard shaft to rotate;
the outer hard shaft lifting device is arranged at the top of the supporting structure and is used for driving the single crystal bearing outer hard shaft to lift;
and the inner hard shaft lifting device is arranged in the supporting structure and is used for driving the seed crystal bearing inner hard shaft to lift.
Further, the outer hard shaft lifting device comprises:
the cross section of the supporting structure is square, and the four sliding rails are respectively arranged at four corners of the supporting structure;
the sliding seat is arranged at the upper part of the single crystal bearing outer hard shaft, the single crystal bearing outer hard shaft axially penetrates through the sliding seat, the sliding seat is axially and fixedly connected with the single crystal bearing outer hard shaft and is connected with the single crystal bearing outer hard shaft in a circumferential rotating mode through a magnetic fluid, and four corners of the sliding seat are respectively connected with the four sliding rails in a sliding mode;
the two outer hard shaft lifting driving devices are symmetrically arranged on two sides of the top of the supporting structure;
the outer hard shaft lifting driving device comprises:
the worm reducer is fixedly arranged on the outer wall of the supporting structure, and an outer hard shaft driving belt wheel is arranged at the output end of the worm reducer;
the output end of the planetary reducer is connected with the input end of the worm reducer;
the output end of the outer hard shaft servo motor is connected with the input end of the planetary reducer;
the outer hard shaft lead screw is vertically arranged in the supporting structure, an outer hard shaft driven belt pulley is fixed at the top of the lead screw, the lead screw penetrates through the sliding seat, and a lead screw nut is fixedly connected with the sliding seat;
and the synchronous toothed belt is used for connecting the outer hard shaft driving belt wheel and the outer hard shaft driven belt wheel.
Further, the rotation driving device includes:
the rotary speed reducer is fixedly arranged on the upper surface of the sliding seat, and the output end of the rotary speed reducer is provided with a rotary driving belt wheel;
a rotary driven pulley fixed on top of the single crystal bearing outer hard shaft;
the rotary platform is arranged above the rotary driven belt wheel and is fixedly connected with the rotary driven belt wheel;
a belt for connecting the rotary driving pulley and the rotary driven pulley.
Further, the inner hard shaft lifting device comprises:
the inner hard shaft screw rod is vertically arranged, the screw rod penetrates into the seed crystal bearing inner hard shaft, a screw rod nut of the inner hard shaft screw rod is fixedly connected with the inner wall of the top end of the seed crystal bearing inner hard shaft, and the top end of the seed crystal bearing inner hard shaft penetrates through the rotating platform;
the inner hard shaft servo motor is fixedly connected with the rotating platform through a bracket;
and the input end of the inner hard shaft speed reducer is connected with the output end of the inner hard shaft servo motor through a coupler, and the output end of the inner hard shaft speed reducer is connected with the top of the lead screw of the inner hard shaft lead screw through the coupler.
Further, the single crystal clamping jaws comprise four clamping jaws which are uniformly distributed around the axis of the single crystal bearing outer hard shaft, the middle parts of the four clamping jaws are hinged with the outer wall of the single crystal bearing outer hard shaft, the bottom of the single crystal bearing outer hard shaft is provided with an opening at the position of the upper part of the clamping jaws, and the bottom of each clamping jaw is provided with a clamping part; the four clamping parts extend towards the axis of the single crystal bearing outer hard shaft, the top surfaces of the clamping parts are provided with conical surfaces, and the conical surfaces are matched with the conical surfaces at the bottom of the small shoulder parts of the single crystal.
Further, a jaw driving means for driving the single crystal jaws to grip or release the small shoulder of the single crystal is fixed to the upper surface of the rotary table, and the top end of the seed crystal bearing inner hard shaft passes through the jaw driving means.
Furthermore, the claw driving device comprises a wire winding wheel box body fixedly connected with the top of the rotating platform, four wire winding shafts rotatably connected with the wire winding wheel box body are arranged in the wire winding wheel box body, the axes of the wire winding shafts are perpendicular to the axis of the single crystal bearing outer hard shaft, and wire winding wheels are fixed on the wire winding shafts; every it all is connected with the drive to roll up the silk wheel roll up silk axle actuating mechanism of silk axle pivoted, just it sets up to roll up silk axle actuating mechanism outside the silk wheel box, roll up silk axle actuating mechanism include servo motor, with the reduction gear that servo motor's output is connected, just the output of reduction gear pass through the shaft coupling with roll up the silk hub connection. The wire winding wheel is fixedly connected with one end of a tungsten wire rope, and the other end of the tungsten wire rope penetrates through a tungsten wire rope through hole vertically processed in the single crystal bearing outer hard shaft and then is fixedly connected with the upper part of the clamping jaw;
the bottom of the tungsten wire rope via hole is processed with a spring accommodating cavity, a pre-tightening spring sleeved outside the tungsten wire rope is arranged in the spring accommodating cavity, the top of the pre-tightening spring abuts against the top of the spring accommodating cavity, and the bottom of the pre-tightening spring abuts against the top of the clamping jaw.
The wire winding wheel box body and the weighing cover body are internally provided with tungsten wire rope limiting blocks for limiting tungsten wire ropes.
Further, the upper surface of the jaw driving device is fixed with a weighing cover body, a silicon single crystal weighing device is installed in the weighing cover body, and the silicon single crystal weighing device is used for weighing the single crystal. Silicon single crystal weighing device is including installing the weighing sensor on the inside top of the cover body of weighing, just weighing sensor's bottom is connected with installs the internal fixed pulley that weighs of cover, just the fixed pulley setting of weighing is four directly over one of the wire winding wheel, and the tungsten filament rope process that this wire winding wheel is connected get into behind the fixed pulley of weighing tungsten filament rope via hole, later with the upper portion fixed connection of jack catch.
Furthermore, an inner shaft corrugated pipe is sleeved outside the top of the seed crystal bearing inner hard shaft, the top end of the inner shaft corrugated pipe is fixedly connected with the top of the seed crystal bearing inner hard shaft and sealed by a sealing ring, and the bottom end of the inner shaft corrugated pipe is fixedly connected with the upper surface of the jaw driving device in a sealing manner.
Further, the outer hard axle overcoat of single crystal bearing has outer axle bellows, the top of outer axle bellows with the lower surface sealing fixed connection of slide, the bottom of outer axle bellows with the sealed fixed connection in vacuum furnace chamber top.
Compared with the prior art, the invention has the following advantages:
the growth of the silicon single crystal needs to go through the processes of shouldering, shoulder rotating, diameter equalizing and the like twice; the first shoulder-laying, shoulder-turning and diameter-equaling processes are that after the neck-leading is completed, the external diameter of the neck must be grown
Inch, equal diameter length greater than 1 inch, and tail diameter after ending
A small shoulder of inches, the small shoulder being a working surface for the single crystal jaws to grasp a single crystal; the second shouldering is that after the first closing, the diameter of the equal diameter is
Inches, and after a length of more than 2 inches, the remaining crystal growth process and shape and size characteristics are as required for single crystal products.
The inner hard shaft lifting device and the outer hard shaft lifting device are precision linear friction pairs, have high precision and stability, can effectively reduce the disturbance amount of crystals, reduce dislocation and improve the quality of the crystals, and are suitable for photovoltaic or electronic silicon single crystal growth systems with low crystal defect rate.
When the inner hard shaft bears the load, the crystal growth with the weight below 500Kg can be satisfied, and when the inner hard shaft and the outer hard shaft bear the load together, the silicon single crystal growth with the weight more than or equal to 500Kg can be satisfied. The invention realizes the synchronous rotation movement of the inner hard shaft and the outer hard shaft, the independent lifting movement of the outer hard shaft and the independent lifting movement of the inner hard shaft, has stronger strength and rigidity, can bear single crystals with the weight of more than 500Kg, makes up the deficiency of the bearing capacity of the flexible shaft pulling device, avoids the phenomena of flexible shaft swing and low rotating speed resonance in the flexible shaft pulling device, and can overcome the crystal disturbance caused by the symmetry deviation of a thermal field, the symmetry deviation of an airflow excitation acting force and the like.
The hoisting and pulling device of the tungsten wire rope flexible shaft is replaced, the defects of small bearing and large crystal disturbance are overcome, the internal quality and the external shape qualification rate of the single crystal of crystal such as lattice defects, resistivity and uniformity thereof, carbon and oxygen content, minority carrier lifetime and the like are improved, and the large-diameter electronic grade single crystal of phi 12-18 inches and the like is drawn.
Based on the reasons, the method can be widely popularized in the fields of production of large-size and heavy-weight photovoltaic grade or electronic grade silicon single crystals by a CZ method and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a front view of a hard spindle heavy-duty silicon single crystal pulling apparatus according to an embodiment of the present invention.
Fig. 2 is a view from a in fig. 1.
Fig. 3 is an enlarged view of a portion B in fig. 1.
Fig. 4 is a cross-sectional view taken along line C-C of fig. 1.
Fig. 5 is a front view of a single crystal jaw in an embodiment of the invention.
Fig. 6 is a cross-sectional view taken along line D-D of fig. 5.
Fig. 7 is a schematic structural diagram of a chuck actuating device according to an embodiment of the present invention.
In the figure:
1. a support structure;
2. a vacuum furnace chamber;
3. a single crystal load bearing outer hard shaft; 301. a tungsten wire rope via hole; 302. an outer shaft bellows;
4. bearing the seed crystal by the inner hard shaft; 401. an inner shaft bellows; 402. a seal ring;
5. a single crystal jaw; 501. a claw; 502. a chucking section;
6. a single crystal; 601. a small shoulder; 602. seed crystal;
7. a seed crystal chuck;
8. a rotation driving device; 801. rotating the speed reducer; 802. rotating the driving pulley; 803. rotating the driven pulley; 804. rotating the platform; 805. a belt;
9. an outer hard shaft lifting device; 901. a slide rail; 902. a slide base; 903. a worm reducer; 904. an outer hard shaft drive pulley; 905. a planetary reducer; 906. an outer hard shaft servo motor; 907. an outer hard shaft lead screw; 908. an outer hard shaft driven pulley; 909. a synchronous toothed belt;
10. an inner hard shaft lifting device; 1001. an inner hard shaft lead screw; 1002. an inner hard shaft servo motor; 1003. a support; 1004. an internal hard shaft reducer;
11. a jaw driving device; 1101. a wire winding wheel box body; 1102. a wire winding shaft; 1103. winding a wire wheel; 1104. a tungsten wire rope; 1105. pre-tightening the spring; 1106. weighing the cover body; 1107. a weighing sensor; 1108. weighing a fixed pulley; 1109. a tungsten wire rope limiting block;
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any specific values in all examples shown and discussed herein are to be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the orientation or positional relationship shown in the drawings, and are used for convenience of description and simplicity of description only, and in the absence of any contrary indication, these directional terms are not intended to indicate and imply that the device or element so referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore should not be considered as limiting the scope of the present invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
As shown in FIGS. 1 to 7, the present invention discloses a hard axis heavy load silicon single crystal pulling apparatus, comprising:
the supporting structure 1 is vertically fixed at the top of the vacuum furnace chamber 2, and the cross section of the supporting structure 1 is square;
a single crystal bearing outer hard shaft 3 which is a hollow structure and is vertically arranged in the supporting structure 1, the bottom of the single crystal bearing outer hard shaft penetrates into the vacuum furnace chamber 2, and the inner wall of the single crystal bearing outer hard shaft 3 is provided with a spline groove extending vertically;
the seed crystal bearing inner hard shaft 4 is vertically arranged in the single crystal bearing outer hard shaft, and the outer wall of the seed crystal bearing inner hard shaft 3 is provided with a spline matched with the spline groove; the single crystal bearing outer hard shaft 3 and the seed crystal bearing inner hard shaft 4 are in up-and-down sliding connection and can move synchronously in the circumferential direction through the spline and the spline groove;
a single crystal clamping jaw 5 fixedly connected with the bottom of the single crystal bearing outer hard shaft 3 and used for clamping a small shoulder 601 of a single crystal 6;
the seed crystal chuck 7 is fixedly connected with the bottom of the seed crystal bearing inner hard shaft 4 and is used for fixing the seed crystal 602 on the top of the single crystal 6;
the rotary driving device 8 is arranged in the supporting structure 1 and is positioned above the single crystal bearing outer hard shaft 3 and used for driving the single crystal bearing outer hard shaft 3 to rotate;
the outer hard shaft lifting device 9 is arranged at the top of the supporting structure 1 and is used for driving the single crystal bearing outer hard shaft 3 to lift;
and the inner hard shaft lifting device 10 is arranged in the supporting structure 1 and is used for driving the seed crystal bearing inner hard shaft to lift 4.
Further, the outer hard shaft lifting device 9 includes:
the four sliding rails 901 are vertically arranged, and the four sliding rails 901 are respectively installed at four corners of the supporting structure 1;
a sliding base 902, which is installed on the upper portion of the single crystal bearing outer hard shaft 3, wherein the single crystal bearing outer hard shaft 3 axially penetrates through the sliding base 902, the sliding base 902 is axially fixedly connected with the single crystal bearing outer hard shaft 3, and is circumferentially and rotatably connected with the single crystal bearing outer hard shaft 3 through a magnetic fluid, and four corners of the sliding base 902 are respectively slidably connected with the four sliding rails 901;
the two outer hard shaft lifting driving devices are symmetrically arranged on two sides of the top of the supporting structure 1;
the outer hard shaft lifting driving device comprises:
the worm reducer 903 is fixedly installed on the outer wall of the supporting structure 1, and an outer hard shaft driving pulley 904 is installed at the output end of the worm reducer 903;
a planetary reducer 905, an output end of which is connected with an input end of the worm reducer 903;
an output end of the outer hard shaft servo motor 906 is connected with an input end of the planetary reducer 905;
the outer hard shaft lead screw 907 is vertically arranged in the supporting structure 1, an outer hard shaft driven belt pulley 908 is fixed at the top of the lead screw, the lead screw penetrates through the sliding seat 902, and a lead screw nut is fixedly connected with the sliding seat 902;
a timing belt 909 for connecting the outer hard shaft driving pulley 904 and the outer hard shaft driven pulley 908.
Further, the rotation driving device 8 includes:
the rotary speed reducer 801 is fixedly arranged on the upper surface of the sliding seat 902, and the output end of the rotary speed reducer is provided with a rotary driving belt wheel 802;
a rotary driven pulley 803 fixed on top of the single crystal bearing outer hard shaft 3;
a rotary platform 804 provided above the rotary driven pulley 803 and fixedly connected to the rotary driven pulley 803;
a belt 805 for connecting the rotary driving pulley 802 and the rotary driven pulley 803.
The inner hard shaft lifting device 10 includes:
the inner hard shaft lead screw 1001 is vertically arranged, the lead screw penetrates into the seed crystal bearing inner hard shaft 4, a lead screw nut of the inner hard shaft is fixedly connected with the inner wall of the top end of the seed crystal bearing inner hard shaft 4, and the top end of the seed crystal bearing inner hard shaft 4 penetrates through the rotating platform 804;
the inner hard shaft servo motor 1002 is fixedly connected with the rotating platform 804 through a bracket 1003;
an input end of the inner hard shaft speed reducer 1004 is connected with an output end of the inner hard shaft servo motor 1002 through a coupler, and an output end of the inner hard shaft speed reducer is connected with the top of a lead screw of the inner hard shaft lead screw 1001 through a coupler.
Further, the single crystal jaws 5 comprise four jaws 501, the four jaws 501 are uniformly distributed around the axis of the single crystal bearing outer hard shaft 3, the middle parts of the four jaws 501 are hinged with the outer wall of the single crystal bearing outer hard shaft 3, the bottom of the single crystal bearing outer hard shaft 3 is provided with an opening at the upper part of the jaws, and the bottom of the jaws 501 is provided with a holding part 502; the four retainers 502 extend toward the axis of the single crystal support outer hard shaft 3, and the top surfaces of the retainers 502 have a tapered surface matching the bottom tapered surface of the small shoulder 601 of the single crystal 6.
Further, a jaw driving device 11 is fixed on the upper surface of the rotating platform 804, the jaw driving device 11 is used for driving the single crystal jaw 5 to grasp or release the small shoulder 601 of the single crystal 6, and the top end of the seed crystal bearing inner hard shaft 4 passes through the jaw driving device 11.
Further, the claw driving device 11 comprises a wire winding wheel box 1101 fixedly connected with the top of the rotating platform 804, four wire winding shafts 1102 (only one is visible and the number is four in the present invention, the view is a cross-sectional view) rotatably connected with the wire winding wheel box 1101 are arranged in the wire winding wheel box 1101, the axes of the wire winding shafts 1102 are perpendicular to the axis of the single crystal bearing outer hard shaft 3, and a wire winding wheel 1103 is fixed on the wire winding shafts 1102; every it all is connected with the drive to roll up silk wheel 1103 roll up silk axle 1102 pivoted and roll up silk axle actuating mechanism, just it sets up to roll up silk wheel box 1101 outward to roll up silk axle actuating mechanism, roll up silk axle actuating mechanism include servo motor, with the reduction gear that servo motor's output is connected, just the output of reduction gear pass through the shaft coupling with roll up the silk hub connection. The wire winding wheel 1103 is fixedly connected with one end of a tungsten wire rope 1104, and the other end of the tungsten wire rope 1104 penetrates through a tungsten wire rope through hole 301 vertically processed in the single crystal bearing outer hard shaft 3 and then is fixedly connected with the upper part of the clamping jaw 501;
the bottom of the tungsten wire rope via hole 301 is processed with a spring accommodating cavity, a pre-tightening spring 1105 sleeved outside the tungsten wire rope 1104 is arranged in the spring accommodating cavity, the top of the pre-tightening spring 1105 is abutted to the top of the spring accommodating cavity, and the bottom of the pre-tightening spring 1105 is abutted to the top of the clamping jaw 501.
Further, a weighing cover body 1106 is fixed on the upper surface of the jaw driving device 11, and a silicon single crystal weighing device is installed in the weighing cover body 1106 and used for weighing the single crystal. The silicon single crystal weighing device comprises a weighing sensor 1107 which is installed at the top end inside a weighing cover body 1106, the bottom of the weighing sensor 1107 is connected with a weighing fixed pulley 1108 which is installed in the weighing cover body 1106, the weighing fixed pulley 1108 is arranged right above one wire winding wheel 1103 in the wire winding wheel 1103, and a tungsten wire rope 1104 connected with the wire winding wheel 1103 passes through the weighing fixed pulley 1108 and then enters the tungsten wire rope through hole 301, and then is fixedly connected with the upper part of the claw 501.
Tungsten wire rope limiting blocks 1109 used for limiting a tungsten wire rope 1104 are arranged in the wire winding wheel box 1101 and the weighing cover body 1106.
An inner shaft corrugated pipe 401 is sleeved outside the top of the seed crystal bearing inner hard shaft 4, the top end of the inner shaft corrugated pipe is fixedly connected with the top of the seed crystal bearing inner hard shaft 4 and is sealed by a sealing ring, and the bottom end of the inner shaft corrugated pipe is fixedly connected with the upper surface of the jaw driving device 11 in a sealing manner.
Further, outer axle bellows 302 has been overcoat to single crystal bearing outer hard axle 3, the top of outer axle bellows 302 with the sealed fixed connection of the lower surface of slide 902, the bottom of outer axle bellows 302 with the sealed fixed connection in vacuum furnace chamber 2 top.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (8)
1. A hard shaft heavy-load silicon single crystal pulling device is characterized by comprising:
the supporting structure is vertically fixed at the top of the vacuum furnace chamber;
the single crystal bearing outer hard shaft is of a hollow structure, is vertically arranged in the supporting structure, and the bottom of the single crystal bearing outer hard shaft penetrates into the vacuum furnace chamber;
the seed crystal bearing inner hard shaft is vertically arranged in the single crystal bearing outer hard shaft, and the outer wall of the seed crystal bearing inner hard shaft is provided with a spline matched with the spline groove;
the single crystal clamping jaw is fixedly connected with the bottom of the single crystal bearing outer hard shaft and is used for clamping the small shoulder of the single crystal;
the seed crystal chuck is fixedly connected with the bottom of the seed crystal bearing inner hard shaft and is used for fixing the seed crystal at the top of the single crystal;
the rotation driving device is arranged in the supporting structure and is positioned above the single crystal bearing outer hard shaft and used for driving the single crystal bearing outer hard shaft to rotate;
the outer hard shaft lifting device is arranged at the top of the supporting structure and is used for driving the single crystal bearing outer hard shaft to lift;
and the inner hard shaft lifting device is arranged in the supporting structure and is used for driving the seed crystal bearing inner hard shaft to lift.
2. A hard shaft heavy-duty silicon single crystal pulling apparatus as set forth in claim 1, wherein said outer hard shaft elevating means comprises:
the cross section of the supporting structure is square, and the four sliding rails are respectively arranged at four corners of the supporting structure;
the sliding seat is arranged at the upper part of the single crystal bearing outer hard shaft, the single crystal bearing outer hard shaft axially penetrates through the sliding seat, the sliding seat is axially and fixedly connected with the single crystal bearing outer hard shaft and is connected with the single crystal bearing outer hard shaft in a circumferential rotating mode through a magnetic fluid, and four corners of the sliding seat are respectively connected with the four sliding rails in a sliding mode;
the two outer hard shaft lifting driving devices are symmetrically arranged on two sides of the top of the supporting structure;
the outer hard shaft lifting driving device comprises:
the worm reducer is fixedly arranged on the outer wall of the supporting structure, and an outer hard shaft driving belt wheel is arranged at the output end of the worm reducer;
the output end of the planetary reducer is connected with the input end of the worm reducer;
the output end of the outer hard shaft servo motor is connected with the input end of the planetary reducer;
the outer hard shaft lead screw is vertically arranged in the supporting structure, an outer hard shaft driven belt pulley is fixed at the top of the lead screw, the lead screw penetrates through the sliding seat, and a lead screw nut is fixedly connected with the sliding seat;
and the synchronous toothed belt is used for connecting the outer hard shaft driving belt wheel and the outer hard shaft driven belt wheel.
3. A hard spindle heavy-duty silicon single crystal pulling apparatus as set forth in claim 2, wherein said rotary drive means comprises:
the rotary speed reducer is fixedly arranged on the upper surface of the sliding seat, and the output end of the rotary speed reducer is provided with a rotary driving belt wheel;
a rotary driven pulley fixed on top of the single crystal bearing outer hard shaft;
the rotary platform is arranged above the rotary driven belt wheel and is fixedly connected with the rotary driven belt wheel;
a belt for connecting the rotary driving pulley and the rotary driven pulley.
4. A hard shaft heavy-duty silicon single crystal pulling apparatus as set forth in claim 3, wherein said inner hard shaft elevating means comprises:
the inner hard shaft screw rod is vertically arranged, the screw rod penetrates into the seed crystal bearing inner hard shaft, a screw rod nut of the inner hard shaft screw rod is fixedly connected with the inner wall of the top end of the seed crystal bearing inner hard shaft, and the top end of the seed crystal bearing inner hard shaft penetrates through the rotating platform;
the inner hard shaft servo motor is fixedly connected with the rotating platform through a bracket;
and the input end of the inner hard shaft speed reducer is connected with the output end of the inner hard shaft servo motor through a coupler, and the output end of the inner hard shaft speed reducer is connected with the top of the lead screw of the inner hard shaft lead screw through the coupler.
5. A hard axis heavy-duty silicon single crystal pulling apparatus as set forth in claim 4,
and a jaw driving device is fixed on the upper surface of the rotating platform and is used for driving the single crystal jaws to grasp or release the small shoulder of the single crystal, and the top end of the seed crystal bearing inner hard shaft penetrates through the jaw driving device.
6. A hard shaft heavy-duty silicon single crystal pulling apparatus as set forth in claim 5, wherein an inner shaft bellows is sleeved on the top of said seed crystal bearing inner hard shaft, the top end of said inner shaft bellows is fixedly connected to the top of said seed crystal bearing inner hard shaft, and the bottom end of said inner shaft bellows is fixedly connected to the upper surface of said jaw driving means.
7. A hard shaft heavy-duty silicon single crystal pulling apparatus as defined in claim 5, wherein a weighing cover is fixed on the upper surface of said jaw driving means, and a silicon single crystal weighing means is installed in said weighing cover for weighing said single crystal.
8. The pulling apparatus as claimed in claim 2, wherein an outer bellows is sleeved outside the single crystal bearing outer hard shaft, the top end of the outer bellows is fixedly connected with the lower surface of the sliding seat, and the bottom end of the outer bellows is fixedly connected with the top of the vacuum furnace chamber.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010970479.7A CN111962141A (en) | 2020-09-15 | 2020-09-15 | Hard shaft heavy-load silicon single crystal pulling device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010970479.7A CN111962141A (en) | 2020-09-15 | 2020-09-15 | Hard shaft heavy-load silicon single crystal pulling device |
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| CN111962141A true CN111962141A (en) | 2020-11-20 |
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| CN202010970479.7A Pending CN111962141A (en) | 2020-09-15 | 2020-09-15 | Hard shaft heavy-load silicon single crystal pulling device |
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| CN (1) | CN111962141A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114232071A (en) * | 2021-11-23 | 2022-03-25 | 浙江晶盛机电股份有限公司 | Crystal pulling device of single crystal furnace |
| CN114395792A (en) * | 2021-11-26 | 2022-04-26 | 浙江晶盛机电股份有限公司 | Crystal pulling device of hard shaft single crystal furnace |
| CN114395793A (en) * | 2021-11-26 | 2022-04-26 | 浙江晶盛机电股份有限公司 | Crystal bar anti-collision structure of hard shaft single crystal furnace |
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| US20200208295A1 (en) * | 2018-12-28 | 2020-07-02 | Globalwafers Co., Ltd. | Mono-crystalline silicon growth apparatus |
| CN212357451U (en) * | 2020-09-15 | 2021-01-15 | 连城凯克斯科技有限公司 | Hard shaft heavy-load silicon single crystal pulling device |
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| CN102877118A (en) * | 2012-09-19 | 2013-01-16 | 浙江晶盛机电股份有限公司 | Lower shaft moving mechanism for zone melting single-crystal furnace |
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| CN114395792A (en) * | 2021-11-26 | 2022-04-26 | 浙江晶盛机电股份有限公司 | Crystal pulling device of hard shaft single crystal furnace |
| CN114395793A (en) * | 2021-11-26 | 2022-04-26 | 浙江晶盛机电股份有限公司 | Crystal bar anti-collision structure of hard shaft single crystal furnace |
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