CN207331105U - A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device - Google Patents
A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device Download PDFInfo
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- CN207331105U CN207331105U CN201721059463.0U CN201721059463U CN207331105U CN 207331105 U CN207331105 U CN 207331105U CN 201721059463 U CN201721059463 U CN 201721059463U CN 207331105 U CN207331105 U CN 207331105U
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- bar device
- monocrystal stove
- straight drawing
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Abstract
The utility model discloses a kind of CZ crystal for straight drawing monocrystal stove concubine to take bar device, includes pedestal, it is characterised in that：Fixed frame is provided with the pedestal, the fixed frame is equipped with liftable hoistable platform, and the hoistable platform is provided with telescopic arm on the hoistable platform by the Driven by Hydraulic Cylinder of its bottom, the telescopic arm is driven by the screw of its rear end, and the front end of the telescopic arm, which is provided with, embraces clamp device.The structure design of the utility model is reasonable, precession by embracing the screw on clamp device, which is stretched, drives an armful Zhang Yuhe for folder, to hold tightly, unclamp silicon single crystal rod, solves the problem that armful folder crystal bar and large scale monocrystal stove concubine in the long and narrow confined space take rod well, it can be adjusted in real time as needed, convenient operation control, it is manually time saving and energy saving, take rod efficient.
Description
Technical field：
Mechanical design field is the utility model is related to, a kind of CZ crystal for straight drawing monocrystal stove concubine is related generally to and takes bar device.
Background technology：
Monocrystal stove is a kind of flexible shaft of flexible shaft lifting type single crystal growing furnace, in the environmental protection of inert gas, with high-purity graphite electricity
Heater is hindered, by polycrystalline silicon semiconductor high temperature melt, a kind of dislocation-free silicon single crystal rod is grown with the mode of vertical pulling method.But
The condition requirement of monocrystalline silicon growing is completely harsh, from raw material, thermal field, control system, protective gas, equipment, silica crucible
Etc., each link must handle properly in earnest.
The vacuum environment of monocrystal stove is mainly made of main furnace chamber, bell, secondary furnace chamber etc., the structure of main furnace chamber be it is roomy,
Spaciousness flat short, that space is compared, for being structurally characterized in that for secondary furnace chamber be profound, space is relatively narrow and small.For some silicon lists
The concubine of brilliant stove, bell, main chamber three is can be separated.To be taken out for the silicon single crystal bar grown out of monocrystal stove,
Need to rise to silicon single crystal rod lifting in concubine cylinder, bell is isolated into down space with main chamber's flap valve.Then by concubine
Rise is separated with bell, is finally rotated concubine and is slowly declined silicon rod to one side by the transfer of silicon rod silicon rod transfer device.
The size of the silicon single crystal bar of CZ crystal for straight drawing monocrystal stove growth currently on the market is at 6-8 inches.With technology into
The diameter dimension requirement walked for silicon single crystal rod is increasing, and the single crystal growing furnace of more than 12 inches of the silicon single crystal bar grown at present is set
It is standby, for some large scale monocrystal stoves（The single crystal growing furnace of more than 12 inches silicon single crystal bars）Concubine cannot be separated with bell, this
Sample occurs draw two sections of silicon single crystal A/B in normal productive process in the case of, concubine can not be moved in normal productive process
Open and individually remove silicon single crystal A rods and bring problem.Under such real background, a kind of novel silicon auxiliary chamber of single crystal furnace is designed for ground
Take bar device.
Utility model content：
A kind of the defects of the utility model aim is exactly to make up prior art, there is provided CZ crystal for straight drawing monocrystal stove concubine
Take bar device, solve more than 12 inches monocrystal stoves of large scale occur drawing A in the case of B rods, it is not possible to individually remove concubine and take
Need to take out silicon single crystal A rods from concubine under conditions of rod.
The utility model is achieved through the following technical solutions：
A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device, includes pedestal, it is characterised in that：Set up on the pedestal
There is fixed frame, the fixed frame is equipped with liftable hoistable platform, and the hoistable platform is driven by the hydraulic cylinder of its bottom
It is dynamic, telescopic arm is installed, the telescopic arm is driven by the screw of its rear end, the front end peace of the telescopic arm on the hoistable platform
Equipped with an armful clamp device.
The bottom of the pedestal is provided with traveling wheel, and liftable supporting rod is distributed with the pedestal.
Four turnings of the hoistable platform are respectively equipped with directive wheel, the directive wheel and leading on fixed frame column
Rail, which is oriented to, to be coordinated.
The upper end of the fixed frame is separately installed with two corresponding fixed beams, is separately installed with the fixed beam
Pulley, has steel wire rope to bypass in the pulley, one end of the steel wire rope is fixed on hoistable platform, and the other end is fixed on hydraulic pressure
In the cylinder body fixed plate of cylinder.
The pulley is four, is symmetricly set on two-by-two in fixed beam, and the hydraulic cylinder is two.
Armful clamp device includes the fixed plate installed in telescopic arm front end, is provided between the upper and lower in the fixed plate
Folder is embraced every arranged in rows, described armful of folder includes the two left and right clamping jaws being mutually correspondingly arranged respectively, the left and right clamping jaw
Both ends are connected by slotted link respectively, and the both ends corner of the slotted link is hinged in fixed seat by shipping and reselling on another market respectively,
The fixed seat is installed in fixed plate, and the middle part of the slotted link is oriented to by mandril and fixed plate to be coordinated, and on mandril
The hollow screw pipe screwed with fixed plate is set with, and the end of mandril is provided with limiting plate.
The folder of embracing is three, is arranged at intervals up and down.
The interior corner of the slotted link is equipped with the arc for being used to connect adjacent links and reinforces connecting lever.
The utility model has the advantages that：
The structure design of the utility model is reasonable, by embrace clamp device on screw precession stretch drive embrace folder with
Close, to hold tightly, unclamp silicon single crystal rod, solve folder crystal bar and large scale silicon single crystal are embraced in the long and narrow confined space well
Stove concubine takes the problem of rod, can be adjusted in real time as needed, convenient operation control, manually time saving and energy saving, takes rod efficient.
Brief description of the drawings：
Fig. 1 is the structure diagram of the utility model.
Fig. 2 is the partial enlarged view of the utility model.
Embodiment：
Referring to attached drawing.
A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device, includes pedestal 1, fixed frame is provided with the pedestal 1
Frame 2, the fixed frame 2 are equipped with liftable hoistable platform 3, and the hoistable platform 3 is driven by the hydraulic cylinder 4 of its bottom,
Telescopic arm 5 is installed, the telescopic arm 5 is driven by the screw of its rear end, the front end of the telescopic arm 5 on the hoistable platform 3
It is provided with and embraces clamp device.
The bottom of the pedestal 1 is provided with traveling wheel 7, and liftable supporting rod 8 is distributed with the pedestal 1.
Four turnings of the hoistable platform 3 are respectively equipped with directive wheel, the directive wheel with 2 column of fixed frame
Guide rail, which is oriented to, to be coordinated.
The upper end of the fixed frame 2 is separately installed with two corresponding fixed beams 9, pacifies respectively in the fixed beam 9
Equipped with pulley 10, there is steel wire rope 11 to bypass in pulley 10, one end of the steel wire rope 11 is fixed on hoistable platform 3, the other end
It is fixed in the cylinder body fixed plate 6 of hydraulic cylinder 4.
The pulley 10 is four, is symmetricly set on two-by-two in fixed beam 9, and the hydraulic cylinder 4 is two.
The clamp device of embracing includes the fixed plate 18 installed in 5 front end of telescopic arm, is provided with the fixed plate 18
Armful folder that row are set is partitioned into up and down, and described armful of folder includes the two left and right clamping jaws 12,13 being mutually correspondingly arranged respectively, described
The both ends of left and right clamping jaw 12,13 are connected by slotted link 14 respectively, and the both ends corner of the slotted link 14 passes through respectively
Ship and resell on another market and be hinged in fixed seat 15, the fixed seat 15 is installed in fixed plate 18, and the middle part of the slotted link 14 passes through top
Bar 16 is oriented to fixed plate 18 to be coordinated, and the hollow screw pipe 17 screwed with fixed plate is set with mandril 18, and mandril 16
End limiting plate is installed.
The folder of embracing is three, is arranged at intervals up and down.
The interior corner of the slotted link 14 is equipped with the arc for being used to connect adjacent links and reinforces connecting lever 19.
The related of its structure sets explanation：
（1）The utility model device designs the height of rising according to the actual position height for taking rod of height of monocrystal stove
Maximum 3.5m.
（2）The maximal tensility of the device telescopic arm is 800mm.
（3）The overall width 360mm. of clamp device is embraced since the maximum width of concubine door is 380mm.
（4）Embrace clamp device on screw precession stretch drive embrace folder a Zhang Yuhe, to hold tightly, unclamp silicon single crystal rod.
（5）The steel wire rope of the device and the rear portion of telescopic arm link together, it may be connected to suitable fixed position
The clump weight effect of the device is served as, anti-locking apparatus is tilted because front and rear deviation of weight is larger.
It specifically takes rod production process：
（1）In czochralski silicon monocrystal normal productive process, if there is draw A rods in the case of, operating personnel according to
After technological requirement ending, the melt liquid level in A rods silicon single crystal rod and silicon monocrystalline furnace thermal field in silica crucible is departed from.
(2) after band monocrystalline silicon A rods reach certain position in single crystal growing furnace by the normal cooling technique of technique, the lifting of A rods is arrived
Flap valve is closed in concubine, allows main chamber to isolate with down space on concubine.
（3）When opening concubine argon gas waits until secondary indoor pressure and basically identical ambient pressure, concubine argon gas gas is closed
Body.Concubine door is opened.
（4）There are operating personnel to take bar device to shift suitable position immediately ahead of furnace body onto from designated position concubine, by device
Base supports bar props fixed position.Steel wire rope on device is fixed to suitable position along vertical direction.It is and lifting is flat
Platform is raised to appropriate height
（5）Screw precession Telescopic boom is driven to be elongated to inside concubine by slowly shaking the hand-operated wheel on the device
Suitable position, embraces folder and is in complete open configuration
（6）Folder, which will be embraced, by three screws embraced on clamp device firmly holds silicon single crystal rod tightly.
（7）After embracing folder and holding silicon single crystal rod tightly completely, seed crystal is cut, then by hand-operated wheel slowly by silicon single crystal rod
It is shifted out out of concubine.
（8）Slowly decline hoistable platform, silicon single crystal rod is reduced to proper height is put into crystal bar transfer device, will take
Under crystal bar be transferred to designated position cooling.
（9）Finally there is operator to take bar device to shift designated position onto from newly concubine.
Claims (8)
1. a kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device, include pedestal, it is characterised in that：It is provided with the pedestal
Fixed frame, the fixed frame are equipped with liftable hoistable platform, the hoistable platform by its bottom Driven by Hydraulic Cylinder,
Telescopic arm is installed, the telescopic arm is driven by the screw of its rear end, the front end installation of the telescopic arm on the hoistable platform
Have and embrace clamp device.
2. CZ crystal for straight drawing monocrystal stove concubine according to claim 1 takes bar device, it is characterised in that：The pedestal
Bottom is provided with traveling wheel, and liftable supporting rod is distributed with the pedestal.
3. CZ crystal for straight drawing monocrystal stove concubine according to claim 1 takes bar device, it is characterised in that：The lifting is put down
Four turnings of platform are respectively equipped with directive wheel, and the directive wheel is oriented to the guide rail on fixed frame column to be coordinated.
4. CZ crystal for straight drawing monocrystal stove concubine according to claim 1 takes bar device, it is characterised in that：The fixed frame
Upper end be separately installed with two corresponding fixed beams, pulley is separately installed with the fixed beam, has steel in the pulley
Cord bypasses, and one end of the steel wire rope is fixed on hoistable platform, and the other end is fixed in the cylinder body fixed plate of hydraulic cylinder.
5. CZ crystal for straight drawing monocrystal stove concubine according to claim 4 takes bar device, it is characterised in that：The pulley is
Four, it is symmetricly set on two-by-two in fixed beam, the hydraulic cylinder is two.
6. CZ crystal for straight drawing monocrystal stove concubine according to claim 1 takes bar device, it is characterised in that：Described embracing clamps
The fixed plate included installed in telescopic arm front end is put, is provided with the fixed plate and is partitioned into armful folder that row are set up and down, institute
State to embrace to press from both sides and include the two left and right clamping jaws being mutually correspondingly arranged respectively, the both ends of the left and right clamping jaw pass through slotted link respectively
Connection, the both ends corner of the slotted link are hinged in fixed seat by shipping and reselling on another market respectively, and the fixed seat, which is installed on, fixes
On plate, the middle part of the slotted link is oriented to by mandril and fixed plate to be coordinated, and is set with what is screwed with fixed plate on mandril
Hollow screw pipe, and the end of mandril is provided with limiting plate.
7. CZ crystal for straight drawing monocrystal stove concubine according to claim 6 takes bar device, it is characterised in that：A described folder of embracing is
Three, it is arranged at intervals up and down.
8. CZ crystal for straight drawing monocrystal stove concubine according to claim 6 takes bar device, it is characterised in that：The flute profile connects
The interior corner of bar is equipped with the arc for being used to connect adjacent links and reinforces connecting lever.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721059463.0U CN207331105U (en) | 2017-08-23 | 2017-08-23 | A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721059463.0U CN207331105U (en) | 2017-08-23 | 2017-08-23 | A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device |
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| Publication Number | Publication Date |
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| CN207331105U true CN207331105U (en) | 2018-05-08 |
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| CN201721059463.0U Active CN207331105U (en) | 2017-08-23 | 2017-08-23 | A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107299389A (en) * | 2017-08-23 | 2017-10-27 | 马四海 | A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device |
| CN114277440A (en) * | 2021-11-23 | 2022-04-05 | 浙江晶盛机电股份有限公司 | Clamp, crystal bar grabbing device and single crystal furnace |
-
2017
- 2017-08-23 CN CN201721059463.0U patent/CN207331105U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107299389A (en) * | 2017-08-23 | 2017-10-27 | 马四海 | A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device |
| CN114277440A (en) * | 2021-11-23 | 2022-04-05 | 浙江晶盛机电股份有限公司 | Clamp, crystal bar grabbing device and single crystal furnace |
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