CN111979577A - Silicon single crystal four-claw equal-torque online gripping device - Google Patents
Silicon single crystal four-claw equal-torque online gripping device Download PDFInfo
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- CN111979577A CN111979577A CN202010969058.2A CN202010969058A CN111979577A CN 111979577 A CN111979577 A CN 111979577A CN 202010969058 A CN202010969058 A CN 202010969058A CN 111979577 A CN111979577 A CN 111979577A
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- 239000013078 crystal Substances 0.000 title claims abstract description 181
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 36
- 239000010703 silicon Substances 0.000 title claims abstract description 36
- 238000004804 winding Methods 0.000 claims abstract description 59
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 33
- 239000003638 chemical reducing agent Substances 0.000 claims description 31
- 238000005303 weighing Methods 0.000 claims description 30
- 230000007246 mechanism Effects 0.000 claims description 8
- 210000000078 claw Anatomy 0.000 claims description 6
- 239000005357 flat glass Substances 0.000 claims description 3
- 239000011553 magnetic fluid Substances 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 claims 2
- 230000035515 penetration Effects 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 abstract description 3
- 230000002708 enhancing effect Effects 0.000 abstract description 2
- 230000005284 excitation Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 8
- 238000007789 sealing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a silicon single crystal four-jaw equal-torque online grabbing device which comprises a single crystal bearing outer hard shaft vertically penetrating into a vacuum furnace chamber, wherein a small shoulder single crystal clamping jaw for clamping a single crystal is installed at the bottom of the single crystal bearing outer hard shaft, and a clamping jaw driving device for driving the single crystal clamping jaw to clamp or loosen the single crystal is arranged at the top of the single crystal bearing outer hard shaft; the single crystal clamping jaw comprises four clamping jaws, and the clamping jaw driving device comprises four wire winding wheels. The gripping device provided by the invention has no resonance characteristic of a simple pendulum, has stronger strength and rigidity, overcomes the problems of crystal disturbance caused by the aspects of symmetry deviation of a thermal field, symmetry deviation of airflow excitation acting force, single crystal growth parameters and the like, and plays a positive role in improving the internal and external quality, yield and capacity of the silicon single crystal, reducing the cost and enhancing the market competitiveness.
Description
Technical Field
The invention relates to an on-line grabbing device for lifting and rotating motion states without changing the rotation center position of a silicon single crystal in the growth process of the silicon single crystal, which is applied to a hard shaft heavy-load crystal lifting device of a photovoltaic grade or electronic grade silicon single crystal Czochralski method (CZ method) growth furnace with large size and heavy weight, in particular to a four-claw equal-moment on-line grabbing device for the silicon single crystal.
Background
The silicon single crystal is a basic material in the photovoltaic cell and semiconductor industry, more than 90 percent of photovoltaic cells and more than 95 percent of semiconductor devices adopt silicon-based substrates, wherein the technology of the Czochralski silicon single crystal has high maturity and occupies the main market. Silicon single crystals are being developed in the direction of large diameter and large weight for the reasons of productivity of photovoltaic cells and semiconductor devices and cost reduction. When the weight of the silicon single crystal is more than or equal to 500Kg, the bearing capacity of the crystal with the diameter of about 5mm at the seed crystal neck part can not meet the requirement, and a four-claw equal-moment online grabbing device and secondary online grabbing are required to replace the conventional method.
Disclosure of Invention
According to the technical problem, the four-claw equal-moment online grabbing device for the silicon single crystal is provided.
The technical means adopted by the invention are as follows:
a four-jaw equal-torque online grabbing device for a silicon single crystal comprises a single crystal bearing outer hard shaft vertically penetrating into a vacuum furnace chamber, wherein a small-shoulder single crystal clamping jaw for clamping a single crystal is installed at the bottom of the single crystal bearing outer hard shaft, and a clamping jaw driving device for driving the single crystal clamping jaw to clamp or loosen the single crystal is arranged at the top of the single crystal bearing outer hard shaft;
the single crystal clamping jaws comprise four clamping jaws which are uniformly distributed around the axis of the single crystal bearing outer hard shaft, the middle parts of the four clamping jaws are hinged with the outer wall of the single crystal bearing outer hard shaft, the bottom of the single crystal bearing outer hard shaft is provided with an opening at the position of the upper part of the clamping jaw, and the bottom of the clamping jaw is provided with a clamping part;
the claw driving device comprises a wire winding wheel box body arranged at the top of the single crystal bearing outer hard shaft, four wire winding shafts rotationally connected with the wire winding wheel box body are arranged in the wire winding wheel box body, the axis of each wire winding shaft is perpendicular to the axis of the single crystal bearing outer hard shaft, and a wire winding wheel is fixed on each wire winding shaft; each wire winding wheel is connected with a wire winding shaft driving mechanism which drives the wire winding shaft to rotate, the wire winding shaft driving mechanism is arranged outside the box body of the wire winding wheel, the wire winding wheel is fixedly connected with one end of a tungsten wire rope, and the other end of the tungsten wire rope penetrates through a tungsten wire rope through hole which is vertically processed in the single crystal bearing outer hard shaft and then is fixedly connected with the upper part of the clamping jaw;
the bottom of the tungsten wire rope via hole is provided with a spring accommodating cavity, a pre-tightening spring sleeved outside the tungsten wire rope is arranged in the spring accommodating cavity, the top of the pre-tightening spring abuts against the top of the spring accommodating cavity, and the bottom of the pre-tightening spring abuts against the top of the clamping jaw.
Further, the top of book silk wheel box is fixed with the cover body of weighing, weighing sensor is installed on the inside top of the cover body of weighing, just weighing sensor's bottom is connected with and installs the internal fixed pulley that weighs of cover, just the fixed pulley setting of weighing is four directly over a book silk wheel in the book silk wheel, and the tungsten filament rope process that this book silk wheel is connected get into behind the fixed pulley of weighing tungsten filament rope via hole, later with the upper portion fixed connection of jack catch.
Further, the wire winding wheel box body and the weighing cover body are internally provided with tungsten wire rope limiting blocks for limiting tungsten wire ropes.
Furthermore, the four holding parts extend towards the axis of the single crystal bearing outer hard shaft, the top surfaces of the holding parts are provided with conical surfaces, and the conical surfaces are matched with the bottom conical surfaces of the small shoulders at the top of the single crystal.
Further, the wire winding wheel box body is provided with an observation window, and a window glass is arranged at the observation window.
The invention also provides a hard shaft heavy-load silicon single crystal pulling device, which comprises:
the supporting structure is vertically fixed at the top of the vacuum furnace chamber;
the silicon single crystal four-claw equal-moment online grabbing device is arranged in the supporting structure;
the spline groove is machined in the single crystal bearing outer hard shaft and extends vertically;
the seed crystal bearing inner hard shaft is vertically arranged in the single crystal bearing outer hard shaft, and the outer wall of the seed crystal bearing inner hard shaft is provided with a spline matched with the spline groove;
the seed crystal chuck is fixedly connected with the bottom of the seed crystal bearing inner hard shaft and is used for fixing the seed crystal at the top of the single crystal;
the rotation driving device is arranged in the supporting structure and is positioned above the single crystal bearing outer hard shaft and used for driving the single crystal bearing outer hard shaft to rotate;
the outer hard shaft lifting device is arranged at the top of the supporting structure and is used for driving the single crystal bearing outer hard shaft to lift;
and the inner hard shaft lifting device is arranged in the supporting structure and is used for driving the seed crystal bearing inner hard shaft to lift.
In one aspect, the outer hard shaft lifting device comprises:
the cross section of the supporting structure is square, and the four sliding rails are respectively arranged at four corners of the supporting structure;
the sliding seat is arranged at the upper part of the single crystal bearing outer hard shaft, the single crystal bearing outer hard shaft axially penetrates through the sliding seat, the sliding seat is axially and fixedly connected with the single crystal bearing outer hard shaft and is connected with the single crystal bearing outer hard shaft in a circumferential rotating mode through a magnetic fluid, and four corners of the sliding seat are respectively connected with the four sliding rails in a sliding mode;
the two outer hard shaft lifting driving devices are symmetrically arranged on two sides of the top of the supporting structure;
the outer hard shaft lifting driving device comprises:
the worm reducer is fixedly arranged on the outer wall of the supporting structure, and an output end of the worm reducer is provided with an outer hard shaft driving belt wheel;
the output end of the planetary reducer is connected with the input end of the worm reducer;
the output end of the outer hard shaft servo motor is connected with the input end of the planetary reducer;
the outer hard shaft lead screw is vertically arranged in the supporting structure, an outer hard shaft driven belt pulley is fixed at the top of the lead screw, the lead screw penetrates through the sliding seat, and a lead screw nut is fixedly connected with the sliding seat;
and the synchronous toothed belt is used for connecting the outer hard shaft driving belt wheel and the outer hard shaft driven belt wheel.
Advantageously, the rotary drive device comprises:
the rotating speed reducer is fixedly arranged on the upper surface of the sliding seat, and the output end of the rotating speed reducer is provided with a rotating driving belt wheel;
a rotary driven pulley fixed on top of the single crystal bearing outer hard shaft;
the rotary platform is arranged above the rotary driven belt wheel and is fixedly connected with the rotary driven belt wheel, and the jaw driving device is arranged on the rotary platform;
a belt for connecting the rotary driving pulley and the rotary driven pulley.
In one aspect, the inner hard shaft lifting device comprises:
the inner hard shaft screw rod is vertically arranged, the screw rod penetrates into the seed crystal bearing inner hard shaft, a screw rod nut is fixedly connected with the inner wall of the top end of the seed crystal bearing inner hard shaft, and the top end of the seed crystal bearing inner hard shaft penetrates through the rotating platform;
the inner hard shaft servo motor is fixedly connected with the rotating platform through a bracket;
and the input end of the inner hard shaft speed reducer is connected with the output end of the inner hard shaft servo motor through a coupler, and the output end of the inner hard shaft speed reducer is connected with the top of the lead screw of the inner hard shaft lead screw through the coupler.
Furthermore, an inner shaft corrugated pipe is sleeved outside the top of the seed crystal bearing inner hard shaft, the top end of the inner shaft corrugated pipe is fixedly connected with the top of the seed crystal bearing inner hard shaft and sealed by a sealing ring, and the bottom end of the inner shaft corrugated pipe is fixedly connected with the upper surface of the jaw driving device in a sealing manner.
Further, the outer hard axle overcoat of single crystal bearing has outer axle bellows, the top of outer axle bellows with the lower surface sealing fixed connection of slide, the bottom of outer axle bellows with the sealed fixed connection in vacuum furnace roof portion.
Compared with the prior art, the invention has the following advantages:
1. along with the continuous improvement of photoelectric conversion efficiency, service life and attenuation rate of photovoltaic cells and the requirements of characteristic line width and performance parameters of semiconductor devices, the requirements on the quality of silicon single crystals are higher and higher. The technology is applied to a hard shaft heavy-load lifting device, and mechanisms such as an inner hard shaft, an outer hard shaft, a linear ball guide rail, a linear ball screw, a 4-claw equal-moment grabbing mechanism and the like do not have the resonance characteristic of a simple pendulum, overcome crystal disturbance caused by the aspects of thermal field symmetry deviation, air flow excitation acting force symmetry deviation, single crystal growth parameters and the like with stronger strength and rigidity, and play a positive role in improving the internal and external quality, yield and capacity of the silicon single crystal, reducing the cost and enhancing the market competitiveness.
2. The weight of the single crystal can be measured.
3. The hoisting and pulling device of the tungsten wire rope flexible shaft is replaced, the defects of small bearing and large crystal disturbance are overcome, the internal quality of the crystal such as lattice defects, resistivity and uniformity thereof, carbon and oxygen content, minority carrier lifetime and the like and the external shape qualification rate of the single crystal are improved, and the large-diameter electronic grade single crystal with the diameter of 12-18 inches is drawn.
Based on the reasons, the method can be widely popularized in the fields of production of large-size and heavy-weight photovoltaic grade or electronic grade silicon single crystals by a CZ method and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a front view of an on-line four-jaw equal-moment gripping device for silicon single crystals in embodiments 1 and 2 of the present invention.
Fig. 2 is a schematic view of a single crystal jaw structure in embodiment 1 and embodiment 2 of the present invention.
Fig. 3 is a sectional view taken along line a-a in fig. 2.
Fig. 4 is a schematic structural view of a chuck driving device in embodiments 1 and 2 of the present invention.
FIG. 5 is a front view of a hard spindle heavy-duty silicon single crystal pulling apparatus according to example 2.
Fig. 6 is a view from direction B of fig. 5.
Fig. 7 is an enlarged view of the portion C in fig. 5.
Fig. 8 is a cross-sectional view taken along line D-D of fig. 5.
In the figure:
1. a support structure;
2. a vacuum furnace chamber;
3. a single crystal load bearing outer hard shaft; 301. a tungsten wire rope via hole; 302. an outer shaft bellows;
4. bearing the seed crystal by the inner hard shaft; 401. an inner shaft bellows; 402. a seal ring;
5. a single crystal jaw; 501. a claw; 502. a chucking section;
6. a single crystal; 601. a small shoulder; 602. seed crystal;
7. a seed crystal chuck;
8. a rotation driving device; 801. rotating the speed reducer; 802. rotating the driving pulley; 803. rotating the driven pulley; 804. rotating the platform; 805. a belt;
9. an outer hard shaft lifting device; 901. a slide rail; 902. a slide base; 903. a worm reducer; 904. an outer hard shaft drive pulley; 905. a planetary reducer; 906. an outer hard shaft servo motor; 907. an outer hard shaft lead screw; 908. an outer hard shaft driven pulley; 909. a synchronous toothed belt;
10. an inner hard shaft lifting device; 1001. an inner hard shaft lead screw; 1002. an inner hard shaft servo motor; 1003. a support; 1004. an internal hard shaft reducer;
11. a jaw driving device; 1101. a wire winding wheel box body; 1102. a wire winding shaft; 1103. winding a wire wheel; 1104. A tungsten wire rope; 1105. pre-tightening the spring; 1106. weighing the cover body; 1107. a weighing sensor; 1108. weighing a fixed pulley; 1109. a tungsten wire rope limiting block;
Detailed Description
It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the invention. As used herein, the singular is intended to include the plural unless the context clearly dictates otherwise, and further it is to be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of the stated features, steps, operations, devices, components, and/or combinations thereof.
The relative arrangement of parts and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Also, it should be understood that the dimensions of the various features shown in the drawings are not drawn to scale in practice for ease of illustration. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any specific values in all examples shown and discussed herein are to be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion of it is not necessary in subsequent figures.
In the description of the present invention, it is to be understood that the directions or positional relationships indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the directions or positional relationships shown in the drawings for the convenience of description and simplicity of description, and that the directional terms do not indicate and imply that the device or element so referred to must have a particular orientation or be constructed and operated in a particular orientation without being described to the contrary, and therefore, should not be considered as limiting the scope of the present invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
Example 1
As shown in fig. 1 to 4, a silicon single crystal four-jaw equal-torque online gripping device comprises a single crystal bearing outer hard shaft 3 vertically penetrating into a vacuum furnace chamber 2, a single crystal jaw 5 with a small shoulder 601 for clamping a single crystal 6 is arranged at the bottom of the single crystal bearing outer hard shaft 3, and a jaw driving device 11 for driving the single crystal jaw 5 to clamp the single crystal 6 or loosen the single crystal 6 is arranged at the top of the single crystal bearing outer hard shaft 3;
the single crystal clamping jaws 5 comprise four clamping jaws 501, the four clamping jaws 501 are uniformly distributed around the axis of the single crystal body bearing outer hard shaft 3, the middle parts of the four clamping jaws 501 are hinged with the outer wall of the single crystal body bearing outer hard shaft 3, an opening is processed at the position of the upper part of each clamping jaw 501 at the bottom of the single crystal body bearing outer hard shaft 3, and a clamping part 502 is arranged at the bottom of each clamping jaw 501;
the claw driving device 11 comprises a wire winding wheel box 1101 arranged at the top of the single crystal bearing outer hard shaft, four wire winding shafts 1102 (only one wire winding shaft can be seen, actually four wire winding shafts are arranged in the wire winding wheel box 1101 and are rotatably connected with the wire winding wheel box 1101, the axis of each wire winding shaft 1102 is perpendicular to the axis of the single crystal bearing outer hard shaft 3, and a wire winding wheel 1103 is fixed on each wire winding shaft 1102; each wire winding wheel 1103 is connected with a wire winding shaft driving mechanism for driving the wire winding shaft to rotate, the wire winding shaft driving mechanism is arranged outside the wire winding wheel box 1101, the wire winding wheel 1103 is fixedly connected with one end of a tungsten wire rope 1104, and the other end of the tungsten wire rope 1104 penetrates through a tungsten wire rope through hole 301 vertically processed in the single crystal bearing outer hard shaft 3 and then is fixedly connected with the upper part of the clamping jaw 501;
a spring accommodating cavity is processed at the bottom of the tungsten wire rope via hole 301, a pre-tightening spring 1105 sleeved outside the tungsten wire rope 1104 is arranged in the spring accommodating cavity, the top of the pre-tightening spring 1105 abuts against the top of the spring accommodating cavity, and the bottom of the pre-tightening spring 1105 abuts against the top of the clamping jaw 501.
Further, the top of the wire winding wheel box 1101 is fixed with a weighing cover body 1106, a weighing sensor 1107 is installed at the top end of the interior of the weighing cover body 1106, the bottom of the weighing sensor 1107 is connected with a weighing fixed pulley 1108 (only one weighing sliding wheel) installed in the weighing cover body 1106, the weighing fixed pulley 1108 is arranged right above one wire winding wheel 1103 in the four wire winding wheels 1103, and a tungsten wire rope 1104 connected with the wire winding wheels 1103 enters the tungsten wire rope through hole 301 after passing through the weighing fixed pulley 1108, and then is fixedly connected with the upper portion of the claw 501. The weight sensor 1107 receives a weight that is one-fourth the weight of the single crystal 6.
Further, tungsten wire rope limiting blocks 1109 for limiting the tungsten wire rope 1104 are arranged in the wire winding wheel box 1101 and the weighing cover body 1106, and are used for ensuring that the tungsten wire rope 1104 is vertical up and down in the vertical direction and the joint of the tungsten wire rope 1104 and the weighing fixed pulley 1108 is a standard semicircle.
Further, the four retainers 502 extend toward the axis of the single crystal support outer hard shaft 3, and the top surfaces of the retainers 502 have a tapered surface matching the bottom tapered surface of the small shoulder 601 at the top of the single crystal 6.
Further, the wire winding wheel box 1101 is provided with an observation window, and a window glass is arranged at the observation window, so that a user can observe the wire winding wheel box conveniently.
Example 2
As shown in FIGS. 1 to 8, the present invention also provides a hard axis heavy-duty silicon single crystal pulling apparatus, comprising:
the supporting structure 1 is vertically fixed at the top of the vacuum furnace chamber 2, and the cross section of the supporting structure 1 is square;
the four-jaw equal-moment online grabbing device for the silicon single crystal, disclosed by the embodiment 1, is arranged in the supporting structure 1;
spline grooves machined in the single crystal bearing outer hard shaft 3 and extending vertically;
the seed crystal bearing inner hard shaft 4 is vertically arranged in the single crystal bearing outer hard shaft 3, and the outer wall of the seed crystal bearing inner hard shaft 4 is provided with a spline matched with the spline groove; the single crystal bearing outer hard shaft 3 and the seed crystal bearing inner hard shaft 4 are in up-and-down sliding connection and can move synchronously in the circumferential direction through the spline and the spline groove;
the seed crystal chuck 7 is fixedly connected with the bottom of the seed crystal bearing inner hard shaft 4 and is used for fixing the seed crystal 602 at the top of the single crystal 6;
the rotary driving device 8 is arranged in the supporting structure 1 and is positioned above the single crystal bearing outer hard shaft 3 and used for driving the single crystal bearing outer hard shaft 3 to rotate;
the outer hard shaft lifting device 9 is arranged at the top of the supporting structure 1 and is used for driving the single crystal bearing outer hard shaft 3 to lift;
and the inner hard shaft lifting device 10 is arranged in the supporting structure 1 and is used for driving the seed crystal bearing inner hard shaft to lift 4.
Further, the outer hard shaft lifting device 9 includes:
the four sliding rails 901 are vertically arranged, and the four sliding rails 901 are respectively installed at four corners of the supporting structure 1;
a sliding base 902, which is installed on the upper portion of the single crystal bearing outer hard shaft 3, wherein the single crystal bearing outer hard shaft 3 axially penetrates through the sliding base 902, the sliding base 902 is axially fixedly connected with the single crystal bearing outer hard shaft 3, and is circumferentially rotatably connected with the single crystal bearing outer hard shaft 3 through a magnetic fluid, and four corners of the sliding base 902 are respectively slidably connected with the four sliding rails 901;
the two outer hard shaft lifting driving devices are symmetrically arranged on two sides of the top of the supporting structure 1;
the outer hard shaft lifting driving device comprises:
the worm reducer 903 is fixedly installed on the outer wall of the supporting structure 1, and an outer hard shaft driving pulley 904 is installed at the output end of the worm reducer 903;
a planetary reducer 905, an output end of which is connected with an input end of the worm reducer 903;
an output end of the outer hard shaft servo motor 906 is connected with an input end of the planetary reducer 905;
the outer hard shaft lead screw 907 is vertically arranged in the supporting structure 1, an outer hard shaft driven belt pulley 908 is fixed at the top of the lead screw, the lead screw penetrates through the sliding seat 902, and a lead screw nut is fixedly connected with the sliding seat 902;
a timing belt 909 for connecting the outer hard shaft driving pulley 904 and the outer hard shaft driven pulley 908.
Further, the rotation driving device 8 includes:
the rotary speed reducer 801 is fixedly arranged on the upper surface of the sliding seat 902, and the output end of the rotary speed reducer is provided with a rotary driving belt wheel 802;
a rotary driven pulley 803 fixed on top of the single crystal bearing outer hard shaft 3;
a rotary platform 804 provided above the rotary driven pulley 803 and fixedly connected to the rotary driven pulley 803;
a belt 805 for connecting the rotary driving pulley 802 and the rotary driven pulley 803.
The inner hard shaft lifting device 10 includes:
the inner hard shaft lead screw 1001 is vertically arranged, the lead screw penetrates into the seed crystal bearing inner hard shaft 4, a lead screw nut of the inner hard shaft is fixedly connected with the inner wall of the top end of the seed crystal bearing inner hard shaft 4, and the top end of the seed crystal bearing inner hard shaft 4 penetrates through the rotating platform 804;
the inner hard shaft servo motor 1002 is fixedly connected with the rotating platform 804 through a bracket 1003;
an input end of the inner hard shaft speed reducer 1004 is connected with an output end of the inner hard shaft servo motor 1002 through a coupler, and an output end of the inner hard shaft speed reducer is connected with the top of a lead screw of the inner hard shaft lead screw 1001 through a coupler.
An inner shaft corrugated pipe 401 is sleeved outside the top of the seed crystal bearing inner hard shaft 4, the top end of the inner shaft corrugated pipe is fixedly connected with the top of the seed crystal bearing inner hard shaft 4 and is sealed by a sealing ring 402, and the bottom end of the inner shaft corrugated pipe is fixedly connected with the upper surface of the jaw driving device 11 in a sealing manner.
Further, outer axle bellows 302 has been overcoat to single crystal bearing outer hard axle 3, the top of outer axle bellows 302 with the sealed fixed connection of the lower surface of slide 902, the bottom of outer axle bellows 302 with the sealed fixed connection in vacuum furnace chamber 2 top.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (9)
1. The utility model provides a four claws of silicon single crystal are moment on line grabbing device such as, includes vertical penetration the indoor single crystal bearing outer hard axle of vacuum furnace, its characterized in that: the single crystal bearing outer hard shaft is provided with a small shoulder single crystal clamping jaw for clamping a single crystal at the bottom, and the single crystal bearing outer hard shaft is provided with a clamping jaw driving device at the top for driving the single crystal clamping jaw to clamp the single crystal or loosen the single crystal;
the single crystal clamping jaws comprise four clamping jaws which are uniformly distributed around the axis of the single crystal bearing outer hard shaft, the middle parts of the four clamping jaws are hinged with the outer wall of the single crystal bearing outer hard shaft, the bottom of the single crystal bearing outer hard shaft is provided with an opening at the position of the upper part of the clamping jaws, and the bottom of each clamping jaw is provided with a clamping part;
the claw driving device comprises a wire winding wheel box body arranged at the top of the single crystal bearing outer hard shaft, four wire winding shafts rotationally connected with the wire winding wheel box body are arranged in the wire winding wheel box body, the axis of each wire winding shaft is perpendicular to the axis of the single crystal bearing outer hard shaft, and a wire winding wheel is fixed on each wire winding shaft; each wire winding wheel is connected with a wire winding shaft driving mechanism which drives the wire winding shaft to rotate, the wire winding shaft driving mechanism is arranged outside the box body of the wire winding wheel, the wire winding wheel is fixedly connected with one end of a tungsten wire rope, and the other end of the tungsten wire rope penetrates through a tungsten wire rope through hole which is vertically processed in the single crystal bearing outer hard shaft and then is fixedly connected with the upper part of the clamping jaw;
the bottom of the tungsten wire rope via hole is processed with a spring accommodating cavity, a pre-tightening spring sleeved outside the tungsten wire rope is arranged in the spring accommodating cavity, the top of the pre-tightening spring abuts against the top of the spring accommodating cavity, and the bottom of the pre-tightening spring abuts against the top of the clamping jaw.
2. The silicon single crystal four-jaw equal-torque online grabbing device according to claim 1, characterized in that a weighing cover body is fixed to the top of the wire winding wheel box, a weighing sensor is mounted at the top end of the inside of the weighing cover body, a weighing fixed pulley mounted in the weighing cover body is connected to the bottom of the weighing sensor, the weighing fixed pulley is arranged right above one of the four wire winding wheels, and a tungsten wire rope connected with the wire winding wheels passes through the weighing fixed pulley and then enters the tungsten wire rope through hole, and then is fixedly connected with the upper portions of the jaws.
3. The silicon single crystal four-jaw equal-moment online grabbing device according to claim 2, characterized in that tungsten wire rope limiting blocks for limiting tungsten wire ropes are arranged in the wire winding wheel box body and the weighing cover body.
4. The silicon single crystal four-jaw equal-moment online grabbing device according to claim 1, wherein the four holding parts extend towards the axis of the single crystal bearing outer hard shaft, the top surfaces of the holding parts are provided with conical surfaces, and the conical surfaces are matched with the bottom conical surfaces of the small shoulders at the top of the single crystal.
5. The silicon single crystal four-jaw equal-moment online grabbing device according to claim 1, wherein the wire winding wheel box body is provided with an observation window, and window glass is arranged at the observation window.
6. A hard shaft heavy-load silicon single crystal pulling device is characterized by comprising:
the supporting structure is vertically fixed at the top of the vacuum furnace chamber;
the silicon single crystal four-jaw equal-moment online grabbing device of any claim 1 to 5, wherein the silicon single crystal four-jaw equal-moment online grabbing device is arranged in the supporting structure;
the spline groove is machined in the single crystal bearing outer hard shaft and extends vertically;
the seed crystal bearing inner hard shaft is vertically arranged in the single crystal bearing outer hard shaft, and the outer wall of the seed crystal bearing inner hard shaft is provided with a spline matched with the spline groove;
the seed crystal chuck is fixedly connected with the bottom of the seed crystal bearing inner hard shaft and is used for fixing the seed crystal at the top of the single crystal;
the rotation driving device is arranged in the supporting structure and is positioned above the single crystal bearing outer hard shaft and used for driving the single crystal bearing outer hard shaft to rotate;
the outer hard shaft lifting device is arranged at the top of the supporting structure and is used for driving the single crystal bearing outer hard shaft to lift;
and the inner hard shaft lifting device is arranged in the supporting structure and is used for driving the seed crystal bearing inner hard shaft to lift.
7. A hard shaft heavy-duty silicon single crystal pulling apparatus as set forth in claim 6, wherein said outer hard shaft elevating means comprises:
the cross section of the supporting structure is square, and the four sliding rails are respectively arranged at four corners of the supporting structure;
the sliding seat is arranged at the upper part of the single crystal bearing outer hard shaft, the single crystal bearing outer hard shaft axially penetrates through the sliding seat, the sliding seat is axially and fixedly connected with the single crystal bearing outer hard shaft and is connected with the single crystal bearing outer hard shaft in a circumferential rotating mode through a magnetic fluid, and four corners of the sliding seat are respectively connected with the four sliding rails in a sliding mode;
the two outer hard shaft lifting driving devices are symmetrically arranged on two sides of the top of the supporting structure;
the outer hard shaft lifting driving device comprises:
the worm reducer is fixedly arranged on the outer wall of the supporting structure, and an outer hard shaft driving belt wheel is arranged at the output end of the worm reducer;
the output end of the planetary reducer is connected with the input end of the worm reducer;
the output end of the outer hard shaft servo motor is connected with the input end of the planetary reducer;
the outer hard shaft lead screw is vertically arranged in the supporting structure, an outer hard shaft driven belt pulley is fixed at the top of the lead screw, the lead screw penetrates through the sliding seat, and a lead screw nut is fixedly connected with the sliding seat;
and the synchronous toothed belt is used for connecting the outer hard shaft driving belt wheel and the outer hard shaft driven belt wheel.
8. A hard spindle heavy-duty silicon single crystal pulling apparatus as set forth in claim 7, wherein said rotary drive means comprises:
the rotary speed reducer is fixedly arranged on the upper surface of the sliding seat, and the output end of the rotary speed reducer is provided with a rotary driving belt wheel;
a rotary driven pulley fixed on top of the single crystal bearing outer hard shaft;
the rotary platform is arranged above the rotary driven belt wheel and is fixedly connected with the rotary driven belt wheel, and the jaw driving device is arranged on the rotary platform;
a belt for connecting the rotary driving pulley and the rotary driven pulley.
9. A hard shaft heavy-duty silicon single crystal pulling apparatus as set forth in claim 8, wherein said inner hard shaft elevating means comprises:
the inner hard shaft screw rod is vertically arranged, the screw rod penetrates into the seed crystal bearing inner hard shaft, a screw rod nut of the inner hard shaft screw rod is fixedly connected with the inner wall of the top end of the seed crystal bearing inner hard shaft, and the top end of the seed crystal bearing inner hard shaft penetrates through the rotating platform;
the inner hard shaft servo motor is fixedly connected with the rotating platform through a bracket;
and the input end of the inner hard shaft speed reducer is connected with the output end of the inner hard shaft servo motor through a coupler, and the output end of the inner hard shaft speed reducer is connected with the top of the lead screw of the inner hard shaft lead screw through the coupler.
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| CN202010969058.2A CN111979577B (en) | 2020-09-15 | 2020-09-15 | Silicon single crystal four-claw equal-moment on-line grabbing device |
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| CN202010969058.2A CN111979577B (en) | 2020-09-15 | 2020-09-15 | Silicon single crystal four-claw equal-moment on-line grabbing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114232071A (en) * | 2021-11-23 | 2022-03-25 | 浙江晶盛机电股份有限公司 | Crystal pulling device of single crystal furnace |
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| JPH03285893A (en) * | 1990-03-30 | 1991-12-17 | Shin Etsu Handotai Co Ltd | Crystal pulling-up apparatus |
| JPH07172981A (en) * | 1993-12-14 | 1995-07-11 | Komatsu Electron Metals Co Ltd | Apparatus for producing semiconductor single crystal and its production |
| CN110904499A (en) * | 2019-12-24 | 2020-03-24 | 大连连城数控机器股份有限公司 | Wire winding wheel transmission guide mechanism for single crystal furnace |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2664617B1 (en) * | 1990-07-16 | 1993-08-06 | Lorraine Laminage | PROCESS FOR COATING ALUMINUM BY HOT TEMPERING OF A STEEL STRIP AND STEEL STRIP OBTAINED BY THIS PROCESS. |
| JP7172981B2 (en) * | 2017-03-10 | 2022-11-16 | コニカミノルタ株式会社 | BASE FILM FOR TRANSPARENT ELECTRODE AND METHOD FOR MANUFACTURING THE SAME |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285893A (en) * | 1990-03-30 | 1991-12-17 | Shin Etsu Handotai Co Ltd | Crystal pulling-up apparatus |
| JPH07172981A (en) * | 1993-12-14 | 1995-07-11 | Komatsu Electron Metals Co Ltd | Apparatus for producing semiconductor single crystal and its production |
| CN110904499A (en) * | 2019-12-24 | 2020-03-24 | 大连连城数控机器股份有限公司 | Wire winding wheel transmission guide mechanism for single crystal furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114232071A (en) * | 2021-11-23 | 2022-03-25 | 浙江晶盛机电股份有限公司 | Crystal pulling device of single crystal furnace |
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