CN111979577B - Silicon single crystal four-claw equal-moment on-line grabbing device - Google Patents
Silicon single crystal four-claw equal-moment on-line grabbing device Download PDFInfo
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- CN111979577B CN111979577B CN202010969058.2A CN202010969058A CN111979577B CN 111979577 B CN111979577 B CN 111979577B CN 202010969058 A CN202010969058 A CN 202010969058A CN 111979577 B CN111979577 B CN 111979577B
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- 239000013078 crystal Substances 0.000 title claims abstract description 179
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 32
- 239000010703 silicon Substances 0.000 title claims abstract description 32
- 238000004804 winding Methods 0.000 claims abstract description 57
- 210000000078 claw Anatomy 0.000 claims abstract description 43
- 230000000149 penetrating effect Effects 0.000 claims abstract description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 33
- 238000005303 weighing Methods 0.000 claims description 32
- 239000003638 chemical reducing agent Substances 0.000 claims description 30
- 230000007246 mechanism Effects 0.000 claims description 8
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 239000005357 flat glass Substances 0.000 claims description 3
- 239000011553 magnetic fluid Substances 0.000 claims description 3
- 230000002708 enhancing effect Effects 0.000 abstract description 2
- 230000005284 excitation Effects 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a moment online grabbing device for four claws of a silicon single crystal, which comprises a single crystal bearing outer hard shaft vertically penetrating into a vacuum furnace chamber, wherein a small shoulder single crystal claw for clamping the single crystal is arranged at the bottom of the single crystal bearing outer hard shaft, and a claw driving device for driving the single crystal claw to clamp the single crystal or loosening the single crystal is arranged at the top of the single crystal bearing outer hard shaft; the single crystal claw comprises four claws, and the claw driving device comprises four winding wheels. The grabbing device provided by the invention has no resonance characteristic of a simple pendulum, has stronger strength and rigidity, overcomes the problems of crystal disturbance caused by thermal field symmetry deviation, airflow excitation acting force symmetry deviation, single crystal growth parameters and the like, and plays a positive role in improving the internal and external quality, yield and productivity of silicon single crystals, reducing cost and enhancing market competitiveness.
Description
Technical Field
The invention relates to an on-line grabbing device which does not change the rotation center position, lifting and rotation movement state of a silicon single crystal in the growth process of the silicon single crystal, which is applied to a hard-axis heavy-duty crystal pulling device of a large-size and large-weight photovoltaic-level or electronic-level silicon single crystal straight pulling (CZ method) growth furnace, in particular to an on-line grabbing device for moments such as four claws of the silicon single crystal.
Background
Silicon single crystals are basic materials of photovoltaic cells and semiconductor industry, more than 90% of photovoltaic cells and more than 95% of semiconductor devices adopt silicon-based substrates, and the silicon single crystal Czochralski technology has high maturity and occupies the main market. For reasons of productivity and cost reduction of photovoltaic cells and semiconductor devices, silicon single crystals are being developed in the direction of large diameter and weight. When the weight of the silicon single crystal is more than or equal to 500Kg, the bearing capacity of the crystal with the diameter of about 5mm at the leading part of the seed crystal can not meet the requirement, and the on-line grabbing device with moments such as four claws and the like and the secondary on-line grabbing are needed to replace the on-line grabbing device.
Disclosure of Invention
According to the technical problems, the online moment grabbing device for the silicon single crystal four claws and the like is provided.
The invention adopts the following technical means:
the on-line gripping device comprises a single crystal bearing outer hard shaft vertically penetrating into a vacuum furnace chamber, wherein a small shoulder single crystal claw for clamping a single crystal is arranged at the bottom of the single crystal bearing outer hard shaft, and a claw driving device for driving the single crystal claw to clamp the single crystal or release the single crystal is arranged at the top of the single crystal bearing outer hard shaft;
the single crystal clamping claws comprise four clamping claws, the four clamping claws are uniformly distributed around the axis of the single crystal bearing outer hard shaft, the middle parts of the four clamping claws are hinged with the outer wall of the single crystal bearing outer hard shaft, the bottom of the single crystal bearing outer hard shaft is provided with an opening at the position of the upper part of the clamping claw, and the bottom of the clamping claw is provided with a clamping part;
the claw driving device comprises a wire winding wheel box body arranged at the top of the single crystal bearing outer hard shaft, four wire winding shafts which are rotationally connected with the wire winding wheel box body are arranged in the wire winding wheel box body, the axis of each wire winding shaft is perpendicular to the axis of the single crystal bearing outer hard shaft, and a wire winding wheel is fixed on each wire winding shaft; each wire winding wheel is connected with a wire winding shaft driving mechanism for driving the wire winding shaft to rotate, the wire winding shaft driving mechanism is arranged outside the wire winding wheel box body, the wire winding wheel is fixedly connected with one end of a tungsten wire rope, and the other end of the tungsten wire rope passes through a tungsten wire rope through hole vertically processed in the single crystal bearing outer hard shaft and is fixedly connected with the upper part of the clamping jaw;
the bottom of the tungsten wire rope through hole is provided with a spring accommodating cavity, a pre-tightening spring sleeved outside the tungsten wire rope is arranged in the spring accommodating cavity, the top of the pre-tightening spring is propped against the top of the spring accommodating cavity, and the bottom of the pre-tightening spring is propped against the top of the clamping jaw.
Further, the top of the wire winding wheel box body is fixed with a weighing cover body, a weighing sensor is installed at the top end of the inner portion of the weighing cover body, the bottom of the weighing sensor is connected with a weighing fixed pulley installed in the weighing cover body, the weighing fixed pulleys are arranged right above one wire winding wheel of the four wire winding wheels, and a tungsten wire rope connected with the wire winding wheels enters the tungsten wire rope through hole after passing through the weighing fixed pulleys, and then is fixedly connected with the upper portion of the clamping jaw.
Further, tungsten wire rope limiting blocks used for limiting the tungsten wire rope are arranged in the wire winding wheel box body and the weighing cover body.
Further, the four clamping parts extend towards the axis of the single crystal bearing outer hard shaft, the top surface of each clamping part is provided with a conical surface, and the conical surfaces are matched with the conical surfaces at the bottom of the small shoulder part at the top of the single crystal.
Further, the reel box body is provided with an observation window, and a window glass is arranged at the observation window.
The invention also provides a device for pulling the hard shaft heavy-duty silicon single crystal, which comprises:
the support structure is vertically fixed at the top of the vacuum furnace chamber;
the four-claw equal-moment on-line grabbing device for the silicon single crystal is arranged in the supporting structure;
spline grooves are machined in the single crystal bearing outer hard shaft and extend vertically;
the seed crystal bearing inner hard shaft is vertically arranged in the single crystal bearing outer hard shaft, and the outer wall of the seed crystal bearing inner hard shaft is provided with a spline matched with the spline groove;
the seed crystal chuck is fixedly connected with the bottom of the seed crystal bearing inner hard shaft and is used for fixing the seed crystal at the top of the single crystal;
the rotary driving device is arranged in the supporting structure and is positioned above the single crystal bearing outer hard shaft and used for driving the single crystal bearing outer hard shaft to rotate;
the outer hard shaft lifting device is arranged at the top of the supporting structure and used for driving the single crystal bearing outer hard shaft to lift;
and the inner hard shaft lifting device is arranged in the supporting structure and used for driving the seed crystal bearing inner hard shaft to lift.
In one development, the outer hard shaft lifting device comprises:
the cross section of the supporting structure is square, and the four sliding rails are respectively arranged at four corners of the supporting structure;
the sliding seat is arranged at the upper part of the single crystal bearing outer hard shaft, the single crystal bearing outer hard shaft axially penetrates through the sliding seat, the sliding seat is axially fixedly connected with the single crystal bearing outer hard shaft, circumferential rotation connection with the single crystal bearing outer hard shaft is realized through magnetic fluid, and four corners of the sliding seat are respectively connected with four sliding rails in a sliding manner;
the two outer hard shaft lifting driving devices are symmetrically arranged at two sides of the top of the supporting structure;
the outer hard shaft lifting driving device comprises:
the worm speed reducer is fixedly arranged on the outer wall of the supporting structure, and an output end of the worm speed reducer is provided with an outer hard shaft driving belt pulley;
the output end of the planetary reducer is connected with the input end of the worm reducer;
the output end of the outer hard shaft servo motor is connected with the input end of the planetary reducer;
the outer hard shaft lead screw is vertically arranged in the supporting structure, an outer hard shaft driven belt pulley is fixed at the top of the lead screw, the lead screw penetrates through the sliding seat, and a lead screw nut is fixedly connected with the sliding seat;
and the synchronous toothed belt is used for connecting the outer hard shaft driving belt pulley and the outer hard shaft driven belt pulley.
In one development, the rotary drive device comprises:
the rotary speed reducer is fixedly arranged on the upper surface of the sliding seat, and the output end of the rotary speed reducer is provided with a rotary driving belt pulley;
a rotary driven belt wheel which is fixed at the top of the single crystal bearing outer hard shaft;
the rotary platform is arranged above the rotary driven belt pulley and fixedly connected with the rotary driven belt pulley, and the claw driving device is arranged on the rotary platform;
and the belt is used for connecting the rotary driving belt pulley and the rotary driven belt pulley.
In one development, the inner hard shaft lifting device comprises:
the screw rod of the inner hard shaft penetrates into the seed crystal bearing inner hard shaft, the screw rod nut of the screw rod is fixedly connected with the inner wall of the top end of the seed crystal bearing inner hard shaft, and the top end of the seed crystal bearing inner hard shaft penetrates through the rotary platform;
the inner hard shaft servo motor is fixedly connected with the rotary platform through a bracket;
the input end of the inner hard shaft speed reducer is connected with the output end of the inner hard shaft servo motor through a coupler, and the output end of the inner hard shaft speed reducer is connected with the top of the screw rod of the inner hard shaft screw rod through a coupler.
Further, an inner shaft corrugated pipe is sleeved outside the top of the seed crystal bearing inner hard shaft, the top end of the inner shaft corrugated pipe is fixedly connected with the top of the seed crystal bearing inner hard shaft and is sealed through a sealing ring, and the bottom end of the inner shaft corrugated pipe is fixedly connected with the upper surface of the claw driving device in a sealing mode.
Further, the single crystal bearing outer hard shaft is sleeved with an outer shaft corrugated pipe, the top end of the outer shaft corrugated pipe is fixedly connected with the lower surface of the sliding seat in a sealing mode, and the bottom end of the outer shaft corrugated pipe is fixedly connected with the top of the vacuum furnace chamber in a sealing mode.
Compared with the prior art, the invention has the following advantages:
1. along with the continuous improvement of the photoelectric conversion efficiency, the service life and the attenuation rate of the photovoltaic cell, the characteristic line width and the performance parameter requirements of the semiconductor device, the quality requirements on the silicon single crystal are higher. The technology is applied to a hard shaft heavy-load lifting device, and has the advantages that mechanisms such as an inner hard shaft, an outer hard shaft, a linear ball guide rail, a linear ball screw, a 4-jaw and other moment grabbing mechanism are not provided with the resonance characteristic of a single pendulum, the crystal disturbance caused by the aspects of thermal field symmetry deviation, airflow excitation acting force symmetry deviation, single crystal growth parameters and the like is overcome, and the technology plays a positive role in improving the internal and external quality, the yield and the productivity of silicon single crystals, reducing the cost and enhancing the market competitiveness.
2. The weight of the single crystal can be measured.
3. Replace the flexible shaft winding and pulling device of tungsten wire rope, make up for the defect of small bearing and large disturbance of crystal, improve the internal quality of crystal and the external shape qualification rate of single crystal such as lattice defect, resistivity and uniformity, carbon and oxygen content, minority carrier lifetime, etc., and draw large diameter electronic grade single crystal such as phi 12-18 inches.
For the reasons, the invention can be widely popularized in the fields of large-size and heavy-weight photovoltaic-grade or electronic-grade Czochralski (CZ) silicon single crystal production and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a front view showing a moment on-line gripping device such as a four-jaw silicon single crystal according to examples 1 and 2 of the present invention.
Fig. 2 is a schematic view of the single crystal claw structures in embodiment 1 and embodiment 2 of the present invention.
Fig. 3 is a cross-sectional view taken along A-A in fig. 2.
Fig. 4 is a schematic diagram showing the construction of a jaw driving device according to embodiment 1 and embodiment 2 of the present invention.
FIG. 5 is a front view of a hard axis heavy duty silicon single crystal pulling apparatus in example 2.
Fig. 6 is a view in the direction B of fig. 5.
Fig. 7 is an enlarged view of a portion C in fig. 5.
Fig. 8 is a sectional view D-D of fig. 5.
In the figure:
1. a support structure;
2. a vacuum furnace chamber;
3. a single crystal bearing outer hard shaft; 301. tungsten wire rope via holes; 302. an outer shaft bellows;
4. a seed crystal bearing inner hard shaft; 401. an inner shaft bellows; 402. a seal ring;
5. single crystal claw; 501. a claw; 502. a clamping part;
6. a single crystal; 601. a small shoulder; 602. seed crystal;
7. a seed crystal chuck;
8. a rotation driving device; 801. a rotation speed reducer; 802. rotating the driving pulley; 803. rotating the driven pulley; 804. rotating the platform; 805. a belt;
9. an outer hard shaft lifting device; 901. a slide rail; 902. a slide; 903. a worm reducer; 904. an outer hard shaft driving pulley; 905. a planetary reducer; 906. an outer hard shaft servo motor; 907. an outer hard shaft screw; 908. an outer hard shaft driven pulley; 909. a synchronous toothed belt;
10. an inner hard shaft lifting device; 1001. an inner hard shaft lead screw; 1002. an inner hard shaft servo motor; 1003. a bracket; 1004. an inner hard shaft reducer;
11. a jaw driving device; 1101. a reel box; 1102. a wire winding shaft; 1103. a wire winding wheel; 1104. Tungsten wire rope; 1105. a pre-tightening spring; 1106. a weighing cover body; 1107. a weighing sensor; 1108. weighing fixed pulleys; 1109. a tungsten wire rope limiting block;
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other. The invention will be described in detail below with reference to the drawings in connection with embodiments.
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present invention. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is specifically stated otherwise. Meanwhile, it should be clear that, for convenience of description, the sizes of the respective parts shown in the drawings are not drawn in actual scale. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
In the description of the present invention, it should be understood that the positional terms such as "front, rear, upper, lower, left, right", "transverse, vertical, horizontal", and "top, bottom", etc., are generally based on the positional or positional relationship shown in the drawings, and are merely for convenience of describing the present invention and simplifying the description, and the positional terms do not indicate or imply that the apparatus or elements referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus should not be construed as limiting the scope of the present invention: the orientation word "inner and outer" refers to inner and outer relative to the contour of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation of the device in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
In addition, the terms "first", "second", etc. are used to define the components, and are only for convenience of distinguishing the corresponding components, and the terms have no special meaning unless otherwise stated, and therefore should not be construed as limiting the scope of the present invention.
Example 1
As shown in fig. 1 to 4, a moment on-line gripping device such as four claws of a silicon single crystal comprises a single crystal bearing outer hard shaft 3 which vertically penetrates into a vacuum furnace chamber 2, wherein a small shoulder 601 single crystal claw 5 for clamping a single crystal 6 is arranged at the bottom of the single crystal bearing outer hard shaft 3, and a claw driving device 11 for driving the single crystal claw 5 to clamp the single crystal 6 or unclamp the single crystal 6 is arranged at the top of the single crystal bearing outer hard shaft 3;
the single crystal clamping jaw 5 comprises four clamping jaws 501, the four clamping jaws 501 are uniformly distributed around the axis of the single crystal body bearing outer hard shaft 3, the middle parts of the four clamping jaws 501 are hinged with the outer wall of the single crystal bearing outer hard shaft 3, an opening is formed in the bottom of the single crystal bearing outer hard shaft 3 at the position of the upper part of the clamping jaw 501, and a clamping part 502 is arranged at the bottom of the clamping jaw 501;
the jaw driving device 11 comprises a wire winding wheel box 1101 arranged at the top of the single crystal bearing outer hard shaft, four wire winding shafts 1102 (only one is visible in the cross section view and the actual four are visible) rotationally connected with the wire winding wheel box 1101 are arranged in the wire winding wheel box 1101, the axis of the wire winding shaft 1102 is perpendicular to the axis of the single crystal bearing outer hard shaft 3, and wire winding wheels 1103 are fixed on the wire winding shafts 1102; each wire winding wheel 1103 is connected with a wire winding shaft driving mechanism for driving the wire winding shaft to rotate, the wire winding shaft driving mechanism is arranged outside the wire winding wheel box 1101, the wire winding wheels 1103 are fixedly connected with one end of a tungsten wire rope 1104, and the other end of the tungsten wire rope 1104 passes through a tungsten wire rope through hole 301 vertically processed in the single crystal bearing outer hard shaft 3 and is fixedly connected with the upper part of the clamping jaw 501;
the bottom of the tungsten wire rope via hole 301 is provided with a spring accommodating cavity, a pre-tightening spring 1105 sleeved outside the tungsten wire rope 1104 is arranged in the spring accommodating cavity, the top of the pre-tightening spring 1105 abuts against the top of the spring accommodating cavity, and the bottom of the pre-tightening spring 1105 abuts against the top of the claw 501.
Further, a weighing cover 1106 is fixed to the top of the wire winding wheel box 1101, a weighing sensor 1107 is installed at the top of the inside of the weighing cover 1106, a weighing fixed pulley 1108 (only one weighing and re-sliding pulley) installed in the weighing cover 1106 is connected to the bottom of the weighing sensor 1107, the weighing fixed pulley 1108 is arranged right above one wire winding wheel 1103 of the four wire winding wheels 1103, and a tungsten wire 1104 connected with the wire winding wheel 1103 enters the tungsten wire rope through hole 301 after passing through the weighing fixed pulley 1108, and then is fixedly connected with the upper portion of the claw 501. The weight obtained by the load cell 1107 is one-fourth of the weight of the single crystal 6.
Further, tungsten wire rope limiting blocks 1109 for limiting the tungsten wire rope 1104 are arranged in the wire winding wheel box 1101 and the weighing cover 1106, and are used for ensuring that the tungsten wire rope 1104 is vertically straight and the connection part of the tungsten wire rope 1104 and the weighing fixed pulley 1108 is a standard semicircle.
Further, four clamping portions 502 extend toward the axis of the single crystal bearing outer hard shaft 3, the top surface of the clamping portion 502 has a conical surface, and the conical surface is matched with the conical surface at the bottom of the shoulder portion 601 at the top of the single crystal 6.
Further, the reel box 1101 has an observation window, and a window glass is arranged at the observation window, so that the user can observe conveniently.
Example 2
As shown in fig. 1 to 8, the present invention also provides a hard-axis heavy-duty silicon single crystal pulling apparatus comprising:
the support structure 1 is vertically fixed at the top of the vacuum furnace chamber 2, and the cross section of the support structure 1 is square;
a moment on-line gripping device such as a four-jaw silicon single crystal as described in embodiment 1, and disposed in the support structure 1;
spline grooves are machined in the single crystal bearing outer hard shaft 3 and extend vertically;
the seed crystal bearing inner hard shaft 4 is vertically arranged in the single crystal bearing outer hard shaft 3, and the outer wall of the seed crystal bearing inner hard shaft 4 is provided with a spline matched with the spline groove; the up-down sliding connection and the circumferential synchronous movement between the single crystal bearing outer hard shaft 3 and the seed crystal bearing inner hard shaft 4 are realized through the spline and the spline groove;
the seed crystal clamping head 7 is fixedly connected with the bottom of the seed crystal bearing inner hard shaft 4 and is used for fixing a seed crystal 602 at the top of the single crystal 6;
the rotary driving device 8 is arranged in the supporting structure 1 and is positioned above the single crystal bearing outer hard shaft 3 and used for driving the single crystal bearing outer hard shaft 3 to rotate;
the outer hard shaft lifting device 9 is arranged at the top of the supporting structure 1 and is used for driving the single crystal bearing outer hard shaft 3 to lift;
and the inner hard shaft lifting device 10 is arranged in the supporting structure 1 and is used for driving the seed crystal bearing inner hard shaft to lift 4.
Further, the outer rigid shaft lifting device 9 includes:
four vertically arranged slide rails 901, wherein the four slide rails 901 are respectively arranged at four corners of the supporting structure 1;
the sliding seat 902 is arranged at the upper part of the single crystal bearing outer hard shaft 3, the single crystal bearing outer hard shaft 3 axially penetrates through the sliding seat 902, the sliding seat 902 is fixedly connected with the single crystal bearing outer hard shaft 3 axially and is in circumferential rotation connection with the single crystal bearing outer hard shaft 3 through magnetic fluid, and four corners of the sliding seat 902 are respectively connected with four sliding rails 901 in a sliding manner;
the two outer hard shaft lifting driving devices are symmetrically arranged at two sides of the top of the supporting structure 1;
the outer hard shaft lifting driving device comprises:
the worm speed reducer 903 is fixedly arranged on the outer wall of the supporting structure 1, and an outer hard shaft driving pulley 904 is arranged at the output end of the worm speed reducer 903;
a planetary reducer 905, the output end of which is connected with the input end of the worm reducer 903;
an outer hard shaft servo motor 906, the output end of which is connected with the input end of the planetary reducer 905;
an outer hard shaft lead screw 907 vertically installed in the supporting structure 1, wherein an outer hard shaft driven belt pulley 908 is fixed at the top of the lead screw, and the lead screw passes through the sliding seat 902, and a lead screw nut is fixedly connected with the sliding seat 902;
a timing belt 909 for connecting the outer hard-shaft driving pulley 904 and the outer hard-shaft driven pulley 908.
Further, the rotation driving device 8 includes:
a rotation reducer 801 fixedly installed on the upper surface of the sliding seat 902, and an output end of which is installed with a rotation driving pulley 802;
a rotary driven pulley 803 fixed on top of the single crystal load-bearing outer hard shaft 3;
a rotary platform 804 disposed above the rotary driven pulley 803 and fixedly connected to the rotary driven pulley 803;
a belt 805 for connecting the rotary driving pulley 802 and the rotary driven pulley 803.
The inner hard shaft lifting device 10 includes:
an inner hard shaft screw 1001, which is vertically arranged, and the screw of which penetrates into the seed crystal bearing inner hard shaft 4, and the screw nut of which is fixedly connected with the inner wall of the top end of the seed crystal bearing inner hard shaft 4, and the top end of the seed crystal bearing inner hard shaft 4 passes through the rotary platform 804;
an inner hard shaft servo motor 1002 fixedly connected with the rotary platform 804 through a bracket 1003;
the input end of the inner hard shaft reducer 1004 is connected with the output end of the inner hard shaft servo motor 1002 through a coupler, and the output end of the inner hard shaft reducer is connected with the top of the screw rod of the inner hard shaft screw 1001 through a coupler.
The top of the seed crystal bearing inner hard shaft 4 is sleeved with an inner shaft corrugated pipe 401, the top end of the inner shaft corrugated pipe is fixedly connected with the top of the seed crystal bearing inner hard shaft 4, the inner shaft corrugated pipe is sealed through a sealing ring 402, and the bottom end of the inner shaft corrugated pipe is fixedly connected with the upper surface of the jaw driving device 11 in a sealing mode.
Further, the single crystal bearing outer hard shaft 3 is sleeved with an outer shaft corrugated pipe 302, the top end of the outer shaft corrugated pipe 302 is fixedly connected with the lower surface of the sliding seat 902 in a sealing manner, and the bottom end of the outer shaft corrugated pipe 302 is fixedly connected with the top of the vacuum furnace chamber 2 in a sealing manner.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (6)
1. A hard-axis heavy-duty silicon single crystal pulling apparatus, characterized by comprising:
the support structure is vertically fixed at the top of the vacuum furnace chamber;
a silicon single crystal four-claw equal moment on-line grabbing device is arranged in the supporting structure; the on-line grabbing device for the moments such as the four claws of the silicon single crystal comprises a single crystal bearing outer hard shaft vertically penetrating into the vacuum furnace chamber, a small shoulder single crystal claw for clamping the single crystal is arranged at the bottom of the single crystal bearing outer hard shaft, and a claw driving device for driving the single crystal claw to clamp the single crystal or loosening the single crystal is arranged at the top of the single crystal bearing outer hard shaft; the single crystal clamping claws comprise four clamping claws, the four clamping claws are uniformly distributed around the axis of the single crystal bearing outer hard shaft, the middle parts of the four clamping claws are hinged with the outer wall of the single crystal bearing outer hard shaft, the bottom of the single crystal bearing outer hard shaft is provided with an opening at the position of the upper part of the clamping claw, and the bottom of the clamping claw is provided with a clamping part; the claw driving device comprises a wire winding wheel box body arranged at the top of the single crystal bearing outer hard shaft, four wire winding shafts which are rotationally connected with the wire winding wheel box body are arranged in the wire winding wheel box body, the axis of each wire winding shaft is perpendicular to the axis of the single crystal bearing outer hard shaft, and a wire winding wheel is fixed on each wire winding shaft; each wire winding wheel is connected with a wire winding shaft driving mechanism for driving the wire winding shaft to rotate, the wire winding shaft driving mechanism is arranged outside the wire winding wheel box body, the wire winding wheel is fixedly connected with one end of a tungsten wire rope, and the other end of the tungsten wire rope passes through a tungsten wire rope through hole vertically processed in the single crystal bearing outer hard shaft and is fixedly connected with the upper part of the clamping jaw; a spring accommodating cavity is formed in the bottom of the tungsten wire rope through hole, a pre-tightening spring sleeved outside the tungsten wire rope is arranged in the spring accommodating cavity, the top of the pre-tightening spring abuts against the top of the spring accommodating cavity, and the bottom of the pre-tightening spring abuts against the top of the clamping jaw;
spline grooves are machined in the single crystal bearing outer hard shaft and extend vertically;
the seed crystal bearing inner hard shaft is vertically arranged in the single crystal bearing outer hard shaft, and the outer wall of the seed crystal bearing inner hard shaft is provided with a spline matched with the spline groove;
the seed crystal chuck is fixedly connected with the bottom of the seed crystal bearing inner hard shaft and is used for fixing the seed crystal at the top of the single crystal;
the rotary driving device is arranged in the supporting structure and is positioned above the single crystal bearing outer hard shaft and used for driving the single crystal bearing outer hard shaft to rotate;
the outer hard shaft lifting device is arranged at the top of the supporting structure and used for driving the single crystal bearing outer hard shaft to lift;
the inner hard shaft lifting device is arranged in the supporting structure and used for driving the seed crystal bearing inner hard shaft to lift;
the four clamping parts extend towards the axle center of the single crystal bearing outer hard shaft, the top surface of each clamping part is provided with a conical surface, and the conical surfaces are matched with the conical surfaces at the bottoms of the small shoulders at the tops of the single crystals;
the reel box body is provided with an observation window, and window glass is arranged at the observation window.
2. The hard shaft heavy-duty silicon single crystal pulling device according to claim 1, wherein a weighing cover body is fixed at the top of the wire winding wheel box body, a weighing sensor is installed at the top end of the interior of the weighing cover body, a weighing fixed pulley installed in the weighing cover body is connected to the bottom of the weighing sensor, the weighing fixed pulley is arranged right above one wire winding wheel of the four wire winding wheels, and a tungsten wire rope connected with the wire winding wheels enters the tungsten wire rope through hole after passing through the weighing fixed pulley and is fixedly connected with the upper part of the clamping jaw.
3. The hard shaft heavy-duty silicon single crystal pulling device according to claim 2, wherein tungsten wire rope limiting blocks used for limiting tungsten wire ropes are arranged in the wire coiling wheel box body and the weighing cover body.
4. The hard shaft heavy duty silicon single crystal pulling apparatus according to claim 1, wherein said outer hard shaft lifting means comprises:
the cross section of the supporting structure is square, and the four sliding rails are respectively arranged at four corners of the supporting structure;
the sliding seat is arranged at the upper part of the single crystal bearing outer hard shaft, the single crystal bearing outer hard shaft axially penetrates through the sliding seat, the sliding seat is axially fixedly connected with the single crystal bearing outer hard shaft, circumferential rotation connection with the single crystal bearing outer hard shaft is realized through magnetic fluid, and four corners of the sliding seat are respectively connected with four sliding rails in a sliding manner;
the two outer hard shaft lifting driving devices are symmetrically arranged at two sides of the top of the supporting structure;
the outer hard shaft lifting driving device comprises:
the worm speed reducer is fixedly arranged on the outer wall of the supporting structure, and an outer hard shaft driving belt pulley is arranged at the output end of the worm speed reducer;
the output end of the planetary reducer is connected with the input end of the worm reducer;
the output end of the outer hard shaft servo motor is connected with the input end of the planetary reducer;
the outer hard shaft lead screw is vertically arranged in the supporting structure, an outer hard shaft driven belt pulley is fixed at the top of the lead screw, the lead screw penetrates through the sliding seat, and a lead screw nut is fixedly connected with the sliding seat;
and the synchronous toothed belt is used for connecting the outer hard shaft driving belt pulley and the outer hard shaft driven belt pulley.
5. The hard-axis heavy-duty silicon single crystal pulling apparatus according to claim 4, wherein said rotation driving means comprises:
the rotary speed reducer is fixedly arranged on the upper surface of the sliding seat, and the output end of the rotary speed reducer is provided with a rotary driving belt pulley;
a rotary driven belt wheel which is fixed at the top of the single crystal bearing outer hard shaft;
the rotary platform is arranged above the rotary driven belt pulley and fixedly connected with the rotary driven belt pulley, and the claw driving device is arranged on the rotary platform;
and the belt is used for connecting the rotary driving belt pulley and the rotary driven belt pulley.
6. The hard shaft heavy duty silicon single crystal pulling apparatus according to claim 5, wherein said inner hard shaft lifting means comprises:
the inner hard shaft lead screw is vertically arranged, the lead screw penetrates into the seed crystal bearing inner hard shaft, the lead screw nut of the lead screw is fixedly connected with the inner wall of the top end of the seed crystal bearing inner hard shaft, and the top end of the seed crystal bearing inner hard shaft penetrates through the rotary platform;
the inner hard shaft servo motor is fixedly connected with the rotary platform through a bracket;
the input end of the inner hard shaft speed reducer is connected with the output end of the inner hard shaft servo motor through a coupler, and the output end of the inner hard shaft speed reducer is connected with the top of the screw rod of the inner hard shaft screw rod through a coupler.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010969058.2A CN111979577B (en) | 2020-09-15 | 2020-09-15 | Silicon single crystal four-claw equal-moment on-line grabbing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010969058.2A CN111979577B (en) | 2020-09-15 | 2020-09-15 | Silicon single crystal four-claw equal-moment on-line grabbing device |
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| CN111979577B true CN111979577B (en) | 2023-10-31 |
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| CN114232071B (en) * | 2021-11-23 | 2023-01-03 | 浙江晶盛机电股份有限公司 | Crystal pulling device of single crystal furnace |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3285893B2 (en) * | 1990-07-16 | 2002-05-27 | ソラック | Method of coating aluminum on steel strip by high temperature quenching method |
| CN110904499A (en) * | 2019-12-24 | 2020-03-24 | 大连连城数控机器股份有限公司 | Wire winding wheel transmission guide mechanism for single crystal furnace |
| JP7172981B2 (en) * | 2017-03-10 | 2022-11-16 | コニカミノルタ株式会社 | BASE FILM FOR TRANSPARENT ELECTRODE AND METHOD FOR MANUFACTURING THE SAME |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07103000B2 (en) * | 1990-03-30 | 1995-11-08 | 信越半導体株式会社 | Crystal pulling device |
| JPH07172981A (en) * | 1993-12-14 | 1995-07-11 | Komatsu Electron Metals Co Ltd | Apparatus for producing semiconductor single crystal and its production |
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2020
- 2020-09-15 CN CN202010969058.2A patent/CN111979577B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3285893B2 (en) * | 1990-07-16 | 2002-05-27 | ソラック | Method of coating aluminum on steel strip by high temperature quenching method |
| JP7172981B2 (en) * | 2017-03-10 | 2022-11-16 | コニカミノルタ株式会社 | BASE FILM FOR TRANSPARENT ELECTRODE AND METHOD FOR MANUFACTURING THE SAME |
| CN110904499A (en) * | 2019-12-24 | 2020-03-24 | 大连连城数控机器股份有限公司 | Wire winding wheel transmission guide mechanism for single crystal furnace |
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