CN214612841U

CN214612841U - Single crystal growing furnace crucible holds in palm dismouting frock

Info

Publication number: CN214612841U
Application number: CN202023110743.4U
Authority: CN
Inventors: 赵刚; 丁志杰
Original assignee: Inner Mongolia Huayao Photoelectric Technology Co ltd
Current assignee: Huayao Optoelectronics Technology Co.,Ltd.
Priority date: 2020-12-22
Filing date: 2020-12-22
Publication date: 2021-11-05
Anticipated expiration: 2030-12-22

Abstract

The utility model provides a dismouting frock is held in palm to single crystal growing furnace crucible, is used for carrying the support that draws the crucible to hold in the palm including establishing in crucible support top, and the outside of support is equipped with two at least fixture, and fixture is used for hugging closely the crucible and holds in the palm, thereby realizes the dismouting that the crucible held in the palm through removing the support. The utility model provides a dismouting frock is held in palm to single crystal growing furnace crucible can change the dismouting mode that the crucible held in the palm the system, reduces the soft felt of graphite and uses the consumption, reduces thermal field dismouting risk, shortens dismouting operation man-hour, reduces intensity of labour, improves single crystal output, reduces the cost of blowing in.

Description

Single crystal growing furnace crucible holds in palm dismouting frock

Technical Field

The utility model relates to a single crystal growing furnace frock field especially relates to a frock is dismantled to single crystal growing furnace crucible support.

Background

Single crystal silicon, also called silicon single crystal, is a semiconductor material. The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method. The diameter of the single crystal can be influenced by factors such as temperature, pulling speed and rotating speed, crucible tracking speed and rotating speed, flow rate of protective gas and the like in the growth process. The temperature mainly determines whether the crystal can be formed, and the speed directly influences the inherent quality of the crystal, and the influence can only be known through detection after the single crystal is pulled out. The thermal field with proper temperature distribution not only can lead the single crystal to grow smoothly, but also has higher quality.

The existing thermal field system generally comprises top heat preservation, upper, middle and lower heat preservation and bottom heat preservation, wherein the heat preservation is composed of graphite soft felt wrapped by internal graphite or a carbon heat preservation cylinder, and the crucible system is composed of a graphite tow bar lower shaft, a graphite crucible support and a carbon crucible side from bottom to top. The thermal field at the present stage is generally a large-size thermal field with 28 inches, 30 inches and 32 inches, the maximum outer diameter of the upper, middle and lower heat-insulating systems can reach 1.5-2m, and the weight of the monomer is increased along with the increase of the secondary feeding amount and the graphite crucible support playing a supporting role. When the single crystal furnace is disassembled and assembled, the graphite crucible support is mostly disassembled and assembled by hands. In the process of dismounting, particularly when the furnace is dismounted at high temperature, the weight of the crucible support monomer is increased, so that the thermal field part is damaged and the personal scalding risk is increased during manual dismounting operation, the yield of single crystal pulling is influenced, and the production cost is increased.

The dismouting mode is held in the palm to current crucible, easily causes the soft felt loss of graphite, has the scald risk, and thermal field spare damages the risk and increases, and the dismouting worker is long, and the requirement increases to personnel's physical power, has increased manufacturing cost, influences the drawing of monocrystalline silicon to a certain extent.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a dismouting frock is held in palm to single crystal growing furnace crucible can change the dismouting mode that the crucible held in the palm the system, reduces the soft felt of graphite and uses the consumption, reduces thermal field dismouting risk, shortens dismouting operation man-hour, reduces intensity of labour, improves single crystal output, reduces the cost of blowing out.

The utility model discloses the technical problem who solves can take following scheme to realize: the utility model provides a dismouting frock is held in palm to single crystal growing furnace crucible, its characterized in that, holds in the palm the support of top including being used for establishing at the crucible, and the outside of support is equipped with two at least fixture, and fixture is used for hugging closely the crucible and holds in the palm, thereby realizes the dismouting that the crucible held in the palm through removing the support.

Preferably, the clamping mechanism comprises an arm, a claw, a connecting lug plate, a first pin shaft and a second pin shaft; the connecting lug plate is fixed in the support outside, embraces arm one end and embraces arm other end fixed connection and embrace the claw through second round pin axle non-fixed connection in connecting lug plate, embraces the arm motion through the first round pin axle control of pull to the claw motion is embraced in the drive to embrace tightly or loosen the crucible and hold in the palm to connecting lug plate runs through connecting lug plate and armful arm.

Preferably, the first pin is a self-resetting pin.

Preferably, a handle is arranged on the outer side of the bracket.

Preferably, the handles are symmetrically arranged on the outer side of the bracket.

Preferably, the shape of the stent is circular.

Preferably, the side surface of the holding claw is of a fold line-shaped structure, and the fold angle is not more than 90 degrees.

Preferably, the inner side walls of the holding claws are provided with heat-resistant materials for increasing friction resistance.

Preferably, the friction resistance increasing heat-resistant material is a graphite felt.

The utility model has the advantages that simple structure can change the dismouting mode that the crucible held in the palm the system, reduces the soft felt of graphite and uses the consumption, reduces thermal field dismouting risk, shortens dismouting operation man-hour, reduces intensity of labour, improves single crystal output, reduces the blow-in cost.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is the structure schematic diagram of the crucible support dismounting tool of the single crystal furnace

FIG. 2 is a schematic view of the single crystal furnace crucible support dismounting tool clamping claw in an open state

FIG. 3 is a schematic view of the crucible support tightly held during the operation of the single crystal furnace crucible support dismounting tool

FIG. 4 is a cross-sectional view of the crucible support tightly held during the operation of the single crystal furnace crucible support dismounting tool

Main standard parts and labels:

a support: 1; a clamping mechanism: 2; arm-embracing: 21; embracing the claws: 22; connecting the ear plates: 23; a first pin shaft: 24; a second pin shaft: 25; a handle: 3.

Detailed Description

In order to clearly show the objects, technical solutions and advantages of the present invention, the following detailed description of the embodiments of the present invention will be further described with reference to the accompanying drawings.

Please refer to fig. 1 to 4, fig. 1 is the utility model discloses the single crystal furnace crucible holds in the palm dismouting frock structure schematic diagram, fig. 2 is the utility model discloses the single crystal furnace crucible holds in the palm dismouting frock and embraces the claw and be in the state schematic diagram of opening, fig. 3 is the utility model discloses hold close crucible when the single crystal furnace crucible holds in the palm dismouting frock operation and hold in the palm the schematic diagram, fig. 4 is the utility model discloses hold close crucible when the single crystal furnace crucible holds in the palm dismouting frock operation and hold in the palm section schematic diagram.

When the single crystal furnace is disassembled and assembled, the graphite crucible support is mostly disassembled and assembled by hands. In the process of dismounting, particularly when the furnace is dismounted at high temperature, the weight of the crucible support monomer is increased, so that the thermal field part is damaged and the personal scalding risk is increased during manual dismounting operation, the yield of single crystal pulling is influenced, and the production cost is increased.

The utility model provides a single crystal growing furnace crucible holds in palm dismouting frock, hold in the palm the top including establishing at the crucible and be used for carrying the support 1 that draws the crucible and hold in the palm, the outside of support 1 evenly is equipped with two at least fixture 2, and fixture 2 is used for holding tightly or loosening the crucible and holds in the palm to realize the dismouting that the crucible held in the palm.

The clamping mechanism 2 comprises an embracing arm 21, an embracing claw 22, a connecting lug plate 23, a first pin shaft 24 and a second pin shaft 25; connect otic placode 23 to fix in the support outside, hold arm 21 one end and pass through second round pin axle 25 non-fixed connection in connecting otic placode 23, hold arm 21 other end fixed connection and embrace claw 22, first round pin axle 24 runs through and connects otic placode 23 and embrace arm 21, embraces arm 21 through the first round pin axle 24 control of pull and moves to the drive is embraced the claw 22 and is moved, holds or unclamps the crucible and hold in the palm.

The embracing arms 21 drive the embracing claws to move by pushing and pulling the first pin shafts, all the embracing claws tightly grasp the crucible support, and the embracing claws can be maintained in a state of tightly holding the crucible support by pushing and pulling the first pin shafts. The first pin shaft 24 can be set as a self-resetting pin shaft, the first pin shaft does not need to be pushed and pulled when the crucible support is held tightly, and the first pin shaft automatically resets so that the holding claw maintains the state of holding the crucible support tightly again.

In order to further increase the bearing capacity of the support, the handle 3 is arranged on the outer side of the support 1, the handle 3 is symmetrically arranged on the outer side of the support 1, and the number and the arrangement positions of the handle 3 are as uniform and symmetrical as possible, so that the force application is as uniform as possible when the support 1 is taken up. The shape of the stent 1 may be set to be circular.

In order to ensure that the holding claw can tightly hold the crucible support, the side surface of the holding claw 22 is of a fold line-shaped structure, and the fold angle is not more than 90 degrees. Namely, the shape of the holding claw in the working state is a broken line when viewed from the side, and the folding angle is a right angle or an acute angle. The inner side walls of the holding claws 22 are all provided with heat-resistant materials for increasing the friction resistance. The heat-resistant material for increasing the frictional resistance is a graphite felt pad.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. The utility model provides a dismouting frock is held in palm to single crystal growing furnace crucible, its characterized in that holds in the palm the top including establishing crucible and is used for carrying support (1) that draws the crucible, and the outside of support (1) evenly is equipped with two at least fixture (2), and fixture (2) are used for hugging closely or unclamping the crucible and hold in the palm.

2. The crucible support dismounting and mounting tool for the single crystal furnace according to claim 1, wherein the clamping mechanism (2) comprises a holding arm (21), a holding claw (22), a connecting lug plate (23), a first pin shaft (24) and a second pin shaft (25); connect otic placode (23) to fix in the support outside, hold arm (21) one end and pass through second round pin axle (25) non-fixed connection in connecting otic placode (23), hold arm (21) other end fixed connection and embrace claw (22), first round pin axle (24) run through connect otic placode (23) and hold arm (21), hold arm (21) motion through the first round pin axle of pull (24) control to the drive is embraced claw (22) motion, holds or unclamps the crucible and hold in the palm.

3. The crucible support dismounting and mounting tool for the single crystal furnace according to claim 2, wherein the first pin (24) is a self-resetting pin.

4. The tool for dismounting and mounting the crucible support of the single crystal furnace according to claim 1 or 2, wherein a handle (3) is arranged on the outer side of the support (1).

5. The crucible support dismounting and mounting tool for the single crystal furnace according to claim 4, wherein the handles (3) are symmetrically arranged on the outer side of the support (1).

6. The crucible support dismounting and mounting tool for the single crystal furnace according to claim 1, wherein the support (1) is circular in shape.

7. The crucible support dismounting and mounting tool for the single crystal furnace according to claim 2, wherein the side surface of the embracing claw (22) is of a fold line-shaped structure, and the fold angle is not more than 90 degrees.

8. The tool for dismounting and mounting the crucible support of the single crystal furnace according to claim 7, wherein the inner side walls of the embracing claws (22) are respectively provided with a heat-resistant material for increasing friction resistance.

9. The crucible support dismounting and mounting tool for the single crystal furnace according to claim 8, wherein the heat-resistant material for increasing the friction resistance is a graphite felt pad.