CN215560796U - Seed crystal rod clamping device for seeding of silicon single crystal Czochralski method - Google Patents
Seed crystal rod clamping device for seeding of silicon single crystal Czochralski method Download PDFInfo
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- CN215560796U CN215560796U CN202121012096.5U CN202121012096U CN215560796U CN 215560796 U CN215560796 U CN 215560796U CN 202121012096 U CN202121012096 U CN 202121012096U CN 215560796 U CN215560796 U CN 215560796U
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Abstract
The utility model discloses a seed crystal rod clamping device for seeding of a silicon single crystal Czochralski method, which comprises a main board, wherein a supporting plate is vertically connected at the edge of the top of the main board, 2 groups of through guide grooves which are symmetrically distributed are formed in the main board, and a fixing support is welded on the upper surface of the main board; the connecting rods are embedded in the guide grooves, fastening blocks which play a role of fixing the seed crystal rod body are welded at the bottom ends of the connecting rods, 2 connecting rods are arranged, and the fastening blocks are arranged on the side of the seed crystal rod body; and the top of the positioning cylinder is fixedly connected to the central position of the main plate, and the inner wall of the positioning cylinder is tightly attached to the seed crystal rod body. This silicon single crystal czochralski method seeding is with seed crystal stick clamping device, it is provided with dual fastening structure, has improved the fixed effect of device, and the device can fix the seed crystal stick fast, has improved work efficiency, and need not to cut the seed crystal stick, has guaranteed the structural strength of seed crystal stick, has reduced the stick risk that falls of seed crystal stick.
Description
Technical Field
The utility model relates to the technical field of silicon single crystal production, in particular to a seed crystal rod clamping device for seeding of a silicon single crystal by a Czochralski method.
Background
The seed crystal rod is an important raw material for producing the silicon single crystal, the silicon raw material is melted by a smelting furnace at high temperature, the seed crystal rod is clamped by a clamping device and then is immersed into the melt, the silicon single crystal can continuously grow on the seed crystal rod under a certain temperature condition, then the seed crystal rod is slowly lifted, and seeding of the silicon single crystal can be completed, however, the existing seed crystal rod clamping device still has some problems.
For example, a seed crystal holder with publication number CN204251763U comprises a seed crystal rod and seed crystals, wherein the bottom of the seed crystal rod is connected with a seat plate, a seed crystal cavity is arranged below the seat plate, the seed crystal cavity is composed of a left sheet-shaped side wall, a right sheet-shaped side wall and a front wall, two linear convex strip seed crystal clamping pins are welded on the inner sides of the left side wall and the right side wall, and grooves … … corresponding to the seed crystal clamping pins are cut on the left side and the right side of the seed crystals. Its fastening structure is single, and it is not hard up easily in the wire use of binding, and fixed effect is relatively poor, and the device is difficult to the quick fixed seed crystal stick, has reduced work efficiency, and the device need be at seed crystal stick cutting recess, has reduced the structural strength of seed crystal stick, probably leads to the cracked stick accident that causes of seed crystal stick in the use.
Aiming at the problems, innovative design is urgently needed on the basis of the original seed crystal clamping device.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a seed crystal rod clamping device for seeding of a silicon single crystal Czochralski method, and aims to solve the problems that the conventional seed crystal rod clamping device provided by the background technology is single in fastening structure, a binding wire of the seed crystal rod is easy to loosen in the using process, the fixing effect is poor, the seed crystal rod is difficult to fix quickly by the device, the working efficiency is reduced, a groove needs to be cut in the seed crystal rod by the device, the structural strength of the seed crystal rod is reduced, and the seed crystal rod is likely to be cracked in the using process to cause rod falling accidents.
In order to achieve the purpose, the utility model provides the following technical scheme: a seed crystal rod holding apparatus for seeding of a silicon single crystal by the Czochralski method, comprising:
the edge of the top of the main board is vertically connected with a supporting plate, 2 groups of through guide grooves which are symmetrically distributed are formed in the main board, and a fixing support is welded on the upper surface of the main board;
the connecting rods are embedded in the guide grooves, fastening blocks which play a role of fixing the seed crystal rod body are welded at the bottom ends of the connecting rods, 2 connecting rods are arranged, and the fastening blocks are arranged on the side of the seed crystal rod body;
and the top of the positioning cylinder is fixedly connected to the central position of the main plate, and the inner wall of the positioning cylinder is tightly attached to the seed crystal rod body.
Preferably, 2 limiting sliding grooves are formed in the side wall of the supporting plate, guide strips are embedded in the limiting sliding grooves of the supporting plate, and the cross sections of the guide strips are of L-shaped structures, so that the guide strips can slide on the supporting plate.
Preferably, the conducting bar is provided with 2, and is connected with down ratch and last ratch on the outer wall of 2 conducting bars respectively to ratch and last ratch level set up down, and ratch and last ratch constitute gear drive structure with power gear down moreover, make power gear can drive down ratch and last ratch removal simultaneously.
Preferably, the power gear is vertically connected to an output shaft of the motor, the motor is fixedly connected with the fixed support, and the power gear and the vertically arranged tension rack form a meshing transmission structure, so that the power gear can drive the tension rack to move.
Preferably, the lower toothed bar and the upper toothed bar are installed on the connecting rod, the connecting rod is arranged on two sides of the tension rack, the lower end of the connecting rod is provided with a fastening block which is arc-shaped, and the fastening block is in contact with the outer wall of the seed crystal rod body to play a role in clamping, so that the lower toothed bar and the upper toothed bar can drive the corresponding connecting rod to move.
Preferably, the tension rack and the main board form a vertical lifting structure, the lower end of the tension rack is connected with a piston which plays a role in adjusting air pressure, the piston is attached to the inner wall of the positioning cylinder, and the internal pressure of the positioning cylinder is changed by utilizing piston displacement.
Preferably, a through air hole is formed in the center of the bottom surface of the positioning cylinder, a seed crystal rod body is attached to the port of the air hole, and the seed crystal rod body attached to the port of the air hole is fixed through the internal and external pressure difference of the positioning cylinder.
Compared with the prior art, the utility model has the beneficial effects that: the seed crystal rod clamping device for seeding of the silicon single crystal Czochralski method is provided with the double fastening structure, the fixing effect of the device is improved, the device can quickly fix the seed crystal rod, the working efficiency is improved, the seed crystal rod does not need to be cut, the structural strength of the seed crystal rod is ensured, and the rod falling risk of the seed crystal rod is reduced;
1. the guide grooves are symmetrically provided with 2 groups on the main board, connecting rods are embedded in the guide grooves, the lower ends of the connecting rods are connected with fastening blocks in an arc-shaped structure, the upper ends of the 2 connecting rods are respectively connected with a lower toothed bar and an upper toothed bar, the lower toothed bar, the upper toothed bar and the power gear form a meshing transmission structure, and when the power gear rotates, the power gear drives the fastening blocks at the lower ends of the 2 connecting rods to be close through the lower toothed bar and the upper toothed bar, so that the seed rod body is rapidly clamped;
2. the bottom surface of the positioning cylinder is provided with an air hole, the port of the air hole is provided with a seed crystal rod body in a laminating manner, the inner wall of the positioning cylinder is movably provided with a piston, the piston is connected to the lower end of a tension rack, the tension rack and a main board form a sliding lifting structure, and when a power gear meshed with the tension rack rotates, the tension rack can drive the piston to move, so that the air pressure in the positioning cylinder is changed, and the seed crystal rod body is fixed in an auxiliary manner by utilizing the pressure difference between the inside and the outside of the positioning cylinder.
Drawings
FIG. 1 is a schematic view of the overall external structure of the present invention;
FIG. 2 is a schematic view of a conducting bar mounting structure according to the present invention;
FIG. 3 is a schematic view of the power gear transmission of the present invention;
FIG. 4 is a schematic view of the connecting rod mounting structure of the present invention;
fig. 5 is a schematic view of the piston mounting structure of the present invention.
In the figure: 1. a main board; 2. a support plate; 3. conducting bars; 4. a lower rack bar; 5. an upper rack bar; 6. a power gear; 7. a motor; 8. fixing a bracket; 9. a connecting rod; 10. a guide groove; 11. a fastening block; 12. a seed crystal rod body; 13. a positioning cylinder; 14. air holes; 15. a piston; 16. a tension rack.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a technical solution: a seed crystal rod holding apparatus for seeding of a silicon single crystal by the Czochralski method, comprising:
the top edge of the main board 1 is vertically connected with a supporting plate 2, 2 groups of through guide grooves 10 which are symmetrically distributed are formed in the main board 1, and a fixing support 8 is welded on the upper surface of the main board 1;
the connecting rods 9 are embedded in the guide grooves 10, the bottom ends of the connecting rods 9 are welded with fastening blocks 11 which play a role in fixing the seed crystal rod body 12, 2 connecting rods 9 are arranged, and the fastening blocks 11 are arranged on the side of the seed crystal rod body 12;
and the top of the positioning cylinder 13 is fixedly connected to the central position of the main board 1, and the inner wall of the positioning cylinder 13 is tightly attached to the seed crystal rod body 12.
The side wall of the supporting plate 2 is provided with 2 limit sliding grooves, guide strips 3 are embedded in the limit sliding grooves of the supporting plate 2, the cross sections of the guide strips 3 are in an L-shaped structure, the number of the guide strips 3 is 2, the outer walls of the 2 guide strips 3 are respectively connected with a lower rack bar 4 and an upper rack bar 5, the lower rack bar 4 and the upper rack bar 5 are horizontally arranged, the lower rack bar 4, the upper rack bar 5 and a power gear 6 form a gear transmission structure, the power gear 6 is vertically connected on an output shaft of a motor 7, the motor 7 is fixedly connected with a fixed support 8, the power gear 6 and a vertically arranged tension rack 16 form a meshing transmission structure, the lower rack bar 4 and the upper rack bar 5 are arranged on a connecting rod 9, the connecting rod 9 is arranged on two sides of the tension rack bar 16, the lower end of the connecting rod 9 is provided with a fastening block 11 in an arc shape, and the fastening block 11 is contacted with the outer wall of a seed crystal rod body 12 to play a clamping role, when the motor 7 rotates, the power gear 6 connected to the output shaft of the motor 7 rotates synchronously, because the power gear 6, the lower rack bar 4 and the upper rack bar 5 form a meshing transmission structure, and the guide bar 3 connected to the lower rack bar 4 and the upper rack bar 5 is slidably mounted on the support plate 2, the power gear 6 drives the lower rack bar 4 and the upper rack bar 5 to move synchronously and horizontally, the lower rack bar 4 and the upper rack bar 5 drive the corresponding connecting rods 9 to move along the guide grooves 10, so that the fastening blocks 11 at the lower ends of the 2 connecting rods 9 are close to each other, thereby utilizing the fastening blocks 11 to clamp and fix the seed rod body 12, in this process, the power gear 6 can drive the tension rack 16 connected in a meshing manner to move upwards.
The tension rack 16 and the main board 1 form a vertical lifting structure, the lower end of the tension rack 16 is connected with a piston 15 playing a role in adjusting air pressure, the piston 15 is attached to the inner wall of the positioning cylinder 13, a through air hole 14 is formed in the center of the bottom surface of the positioning cylinder 13, a seed rod body 12 is attached to the port of the air hole 14, when the tension rack 16 moves upwards, the piston 15 connected with the tension rack 16 moves upwards synchronously, the end surface of the seed rod body 12 is attached to the port of the air hole 14, at the moment, the volume of a closed space formed by the piston 15 and the inner wall of the positioning cylinder 13 is increased, the pressure is reduced, a pressure difference is formed between the inside and the outside of the positioning cylinder 13, and the seed rod body 12 is fixed to the port of the air hole 14 by using the action of the pressure difference.
The working principle is as follows: when the seed crystal rod clamping device for seeding by using the silicon single crystal czochralski method is used, firstly, referring to fig. 1-5, when a user needs to install a seed crystal rod body 12, the upper end of the seed crystal rod body 12 is inserted into the bottom of a positioning cylinder 13 by hand, so that the end surface of the seed crystal rod body 12 is attached to the port of an air hole 12, then a motor 7 is started, the motor 7 drives a power gear 6 to rotate at the moment, the power gear 6 drives a tension rack 16 to move upwards, a piston 15 connected with the tension rack 16 moves synchronously, when the piston 15 moves upwards, the internal space of the positioning cylinder 13 is increased in pressure and reduced in pressure, a pressure difference is formed inside and outside the positioning cylinder 13, and the seed crystal rod body 12 is fixed by utilizing the pressure difference;
referring to fig. 1-5, in the process of rotation of the power gear 6, the power gear 6 can drive the lower rack bar 4 and the upper rack bar 5 which are connected in a meshed manner to move synchronously, the lower rack bar 4 and the upper rack bar 5 drive the corresponding connecting rods 9 to move, 2 connecting rods 9 move along the guide grooves 10 on the main board 1, at the moment, the fastening blocks 11 installed at the end parts of the connecting rods 9 lean against each other, and the fastening blocks 11 are utilized to further clamp and fix the seed crystal rod body 12.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the utility model can be made, and equivalents and modifications of some features of the utility model can be made without departing from the spirit and scope of the utility model.
Claims (7)
1. A seed crystal rod holding device for seeding of a silicon single crystal by the Czochralski method, comprising:
the edge of the top of the main board is vertically connected with a supporting plate, 2 groups of through guide grooves which are symmetrically distributed are formed in the main board, and a fixing support is welded on the upper surface of the main board;
the connecting rods are embedded in the guide grooves, fastening blocks which play a role of fixing the seed crystal rod body are welded at the bottom ends of the connecting rods, 2 connecting rods are arranged, and the fastening blocks are arranged on the side of the seed crystal rod body;
and the top of the positioning cylinder is fixedly connected to the central position of the main plate, and the inner wall of the positioning cylinder is tightly attached to the seed crystal rod body.
2. A seed rod holding apparatus for seeding of a silicon single crystal according to claim 1, wherein: the supporting plate is characterized in that 2 limiting sliding grooves are formed in the side wall of the supporting plate, guide strips are embedded in the limiting sliding grooves of the supporting plate, and the cross sections of the guide strips are of L-shaped structures.
3. A seed rod holding apparatus for seeding of a silicon single crystal according to claim 2, wherein: the conducting bar is provided with 2, and is connected with down ratch and last ratch on the outer wall of 2 conducting bars respectively to ratch and last ratch level set up down, ratch and last ratch constitute gear drive structure with power gear down moreover.
4. A seed rod holding apparatus for seeding of a silicon single crystal according to claim 3, wherein: the power gear is vertically connected to an output shaft of the motor, the motor is fixedly connected with the fixed support, and the power gear and the vertically arranged tension rack form a meshing transmission structure.
5. A seed rod holding apparatus for seeding of a silicon single crystal according to claim 3, wherein: the lower toothed bar and the upper toothed bar are mounted on the connecting rod, the connecting rod is arranged on two sides of the tension rack, the lower end of the connecting rod is provided with an arc-shaped fastening block, and the fastening block is in contact with the outer wall of the seed crystal rod body to play a role in clamping.
6. A seed rod holding apparatus for seeding of a silicon single crystal according to claim 4, wherein: the tension rack and the main board form a vertical lifting structure, the lower end of the tension rack is connected with a piston which plays a role in adjusting air pressure, and the piston is attached to the inner wall of the positioning cylinder.
7. A seed rod holding apparatus for seeding of a silicon single crystal according to claim 1, wherein: the center of the bottom surface of the positioning cylinder is provided with a through air hole, and the port of the air hole is provided with a seed crystal rod body in an attaching mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121012096.5U CN215560796U (en) | 2021-05-12 | 2021-05-12 | Seed crystal rod clamping device for seeding of silicon single crystal Czochralski method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121012096.5U CN215560796U (en) | 2021-05-12 | 2021-05-12 | Seed crystal rod clamping device for seeding of silicon single crystal Czochralski method |
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| CN215560796U true CN215560796U (en) | 2022-01-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202121012096.5U Active CN215560796U (en) | 2021-05-12 | 2021-05-12 | Seed crystal rod clamping device for seeding of silicon single crystal Czochralski method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114657630A (en) * | 2022-03-10 | 2022-06-24 | 包头美科硅能源有限公司 | Single crystal furnace feeding cylinder and seed crystal stabilizing device |
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2021
- 2021-05-12 CN CN202121012096.5U patent/CN215560796U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114657630A (en) * | 2022-03-10 | 2022-06-24 | 包头美科硅能源有限公司 | Single crystal furnace feeding cylinder and seed crystal stabilizing device |
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