CN106917144A - A kind of method of the outer shove charge of stove - Google Patents
A kind of method of the outer shove charge of stove Download PDFInfo
- Publication number
- CN106917144A CN106917144A CN201510993940.XA CN201510993940A CN106917144A CN 106917144 A CN106917144 A CN 106917144A CN 201510993940 A CN201510993940 A CN 201510993940A CN 106917144 A CN106917144 A CN 106917144A
- Authority
- CN
- China
- Prior art keywords
- graphite crucible
- stove
- crucible
- mechanical arm
- shove charge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a kind of method of the outer shove charge of stove, graphite crucible is fixed using annular holder outside stove, silica crucible is placed in graphite crucible, fed；Graphite crucible, silica crucible and polycrystal material are integrally put into stove；Dress remainder thermal field or polycrystal material.The annular holder includes mechanical arm and line slideway and sliding block, wherein mechanical arm is arranged on line slideway, and clip, in the outer wall of graphite crucible, sliding block is used for positioning mechanical arm, according to the size of graphite crucible, sliding block is fixed on the suitable position of line slideway by locking nut.The present invention by the principles such as torque realize graphite crucible, silica crucible, polycrystal material entirety pick and place, good integrity, conveniently, safely.
Description
Technical field
The present invention relates to a kind of method of the outer shove charge of stove, be applied to first important step during single crystal preparation-
Shove charge (charging).
Background technology
In first important step-shove charge (charging) during single crystal preparation, existing operation order is：First
Graphite crucible is put into stove, then silica crucible is put into graphite crucible, then polycrystal material is loaded into silica crucible.
Due to the limitation of the conditions such as working environment, thermal field size, operating personnel are caused to feed difficult, it is impossible to according to technology
Standard feeds, or even polycrystal material is increased with the probability that silica crucible clashes into because waist amplitude is bigger than normal under operating personnel,
There is the possibility for smashing silica crucible.
Should normally be run after material is installed, but due to (electrode event when height of stopping leakage in the roof, heating of the reasons such as equipment, thermal field
Barrier etc.) need to pick up material, the polycrystal material that operating personnel will can have been loaded into is picked, then silica crucible is carried away, then will
Graphite crucible takes out, and carries out investigation work.Not only workload is big, also increases silica crucible contamination, thermal field and damages
Equivalent risk.
With the upgrading of thermal field size, inventory is continuously increased, and restriction of production environment etc. first fills silica crucible
The method for progressively feeding again is more and more inconvenient, increased and pounds crucible, charging equivalent risk lack of standardization, is installing furnace apparatus
Exist problem need pick up material in the case of, risk is even more increase several times.
The content of the invention
It is an object of the invention to provide a kind of method of the outer shove charge of stove, by graphite crucible, silica crucible, polycrystal material
It is overall to load in stove, the problems such as reduce extraneous metallic pollution.
To achieve the above object, the present invention takes following technical scheme：
A kind of method of the outer shove charge of stove, graphite crucible is fixed outside stove using annular holder, and silica crucible is placed in into stone
In black crucible, charging；Graphite crucible, silica crucible and polycrystal material are integrally put into stove；Dress remainder thermal field
Or polycrystal material.
The annular holder includes mechanical arm and line slideway and sliding block, wherein mechanical arm is arranged on line slideway
On, and clip, in the outer wall of graphite crucible, sliding block is used for positioning mechanical arm, according to the size of graphite crucible, leads to
Cross locking nut sliding block is fixed on the suitable position of line slideway.
Suspension ring for connecting crane gear are installed on the annular holder.
The material of the annular holder is stainless steel or PTFE, and the mechanical arm is in the portion of contact graphite crucible
Position covering PTFE.
The advantage of the invention is that：
The present invention by the principles such as torque realize graphite crucible, silica crucible, polycrystal material entirety pick and place, globality
It is good, conveniently, safely.
Brief description of the drawings
Fig. 1 is the mounting structure schematic diagram of annular holder and graphite crucible in the present invention.
Fig. 2 is the structural representation of mechanical arm 1 in Fig. 1.
Specific embodiment
The present invention will be further described below in conjunction with the accompanying drawings, but is not meant to the limit to the scope of the present invention
System.
In the present invention, graphite crucible, silica crucible and polycrystal material are integrally put into stove using annular holder.Such as
Shown in Fig. 1, the annular holder for being used includes mechanical arm 1 and line slideway 2 and sliding block 3, and wherein machinery hangs
Arm 1 is arranged on line slideway 2, and clip, in the outer wall of graphite crucible 4, sliding block 3 is used for positioning mechanical arm
1, according to the size of graphite crucible, sliding block 3 is fixed on the suitable position of line slideway 2 by locking nut 5
Put.Suspension ring 6 for connecting crane gear are installed on annular holder.The material of annular holder be stainless steel or
PTFE, as shown in figure 1, the mechanical arm 1 covers PTFE 7 at the position of contact graphite crucible, can
Avoid the metal contamination of thermal field component.
During the outer shove charge of stove, graphite crucible is fixed using annular holder first outside stove, then silica crucible is put
In in graphite crucible, normal loading operation is carried out, noted：Material is not higher than silica crucible；Then by graphite earthenware
Crucible, silica crucible and polycrystal material are integrally put into stove；Finally fill remainder thermal field or polycrystal material.
In the present invention, fixture is made according to the valve number of graphite crucible, can be two valves, or three valves,
Each valve along guide rail slidably, and can carry out locked fixation by fixing nut.After graphite crucible is clamped
Hung in stove by overhead traveling crane (or other crane gears).Treat that crucible is put into stove, unclamp fixing nut, remove folder
Tool, fills remainder thermal field or polycrystal material.
Claims (5)
1. the method for the outer shove charge of a kind of stove, it is characterised in that graphite crucible is fixed using annular holder outside stove,
Silica crucible is placed in graphite crucible, is fed；Graphite crucible, silica crucible and polycrystal material are integrally put into stove；
Dress remainder thermal field or polycrystal material.
2. the method for the outer shove charge of stove according to claim 1, it is characterised in that the annular holder includes
Mechanical arm and line slideway and sliding block, wherein mechanical arm is arranged on line slideway, and clip is in graphite crucible
Outer wall, sliding block be used for positioning mechanical arm, according to the size of graphite crucible, sliding block is fixed by locking nut
On the suitable position of line slideway.
3. the method for the outer shove charge of stove according to claim 1 and 2, it is characterised in that the annular holder
On suspension ring for connecting crane gear are installed.
4. the method for the outer shove charge of stove according to claim 1 and 2, it is characterised in that the annular holder
Material be stainless steel or PTFE.
5. the method for the outer shove charge of stove according to claim 2, it is characterised in that the mechanical arm is connecing
Touch the position covering PTFE of graphite crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510993940.XA CN106917144A (en) | 2015-12-25 | 2015-12-25 | A kind of method of the outer shove charge of stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510993940.XA CN106917144A (en) | 2015-12-25 | 2015-12-25 | A kind of method of the outer shove charge of stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106917144A true CN106917144A (en) | 2017-07-04 |
Family
ID=59455431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510993940.XA Pending CN106917144A (en) | 2015-12-25 | 2015-12-25 | A kind of method of the outer shove charge of stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106917144A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109811404A (en) * | 2018-04-06 | 2019-05-28 | 姚小琴 | A kind of crucible extraction element in crystal growing furnace |
| CN114622273A (en) * | 2022-04-08 | 2022-06-14 | 宁夏中晶半导体材料有限公司 | External charging device and method for installing horizontal magnetic field single crystal furnace |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201545934U (en) * | 2009-11-19 | 2010-08-11 | 阳光硅谷电子科技有限公司 | Clamp for lifting silica crucible |
| CN202450185U (en) * | 2012-01-19 | 2012-09-26 | 宁夏日晶新能源装备股份有限公司 | Multifunctional crystal bar taking vehicle for single crystal furnace |
| CN202610380U (en) * | 2012-05-07 | 2012-12-19 | 常州顺风光电材料有限公司 | Thermal field lifting device of Czochralski single crystal furnace |
| CN204398164U (en) * | 2014-12-31 | 2015-06-17 | 湖南金博复合材料科技有限公司 | Cutting device for quartz crucible |
-
2015
- 2015-12-25 CN CN201510993940.XA patent/CN106917144A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201545934U (en) * | 2009-11-19 | 2010-08-11 | 阳光硅谷电子科技有限公司 | Clamp for lifting silica crucible |
| CN202450185U (en) * | 2012-01-19 | 2012-09-26 | 宁夏日晶新能源装备股份有限公司 | Multifunctional crystal bar taking vehicle for single crystal furnace |
| CN202610380U (en) * | 2012-05-07 | 2012-12-19 | 常州顺风光电材料有限公司 | Thermal field lifting device of Czochralski single crystal furnace |
| CN204398164U (en) * | 2014-12-31 | 2015-06-17 | 湖南金博复合材料科技有限公司 | Cutting device for quartz crucible |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109811404A (en) * | 2018-04-06 | 2019-05-28 | 姚小琴 | A kind of crucible extraction element in crystal growing furnace |
| CN114622273A (en) * | 2022-04-08 | 2022-06-14 | 宁夏中晶半导体材料有限公司 | External charging device and method for installing horizontal magnetic field single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170704 |