JPH02167884A - 単結晶育成装置 - Google Patents
単結晶育成装置Info
- Publication number
- JPH02167884A JPH02167884A JP32197488A JP32197488A JPH02167884A JP H02167884 A JPH02167884 A JP H02167884A JP 32197488 A JP32197488 A JP 32197488A JP 32197488 A JP32197488 A JP 32197488A JP H02167884 A JPH02167884 A JP H02167884A
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- pulling
- bearing
- revolving shaft
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32197488A JPH02167884A (ja) | 1988-12-22 | 1988-12-22 | 単結晶育成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32197488A JPH02167884A (ja) | 1988-12-22 | 1988-12-22 | 単結晶育成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02167884A true JPH02167884A (ja) | 1990-06-28 |
JPH0585516B2 JPH0585516B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-12-07 |
Family
ID=18138507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32197488A Granted JPH02167884A (ja) | 1988-12-22 | 1988-12-22 | 単結晶育成装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02167884A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0632694A (ja) * | 1992-04-16 | 1994-02-08 | Shin Seiki:Kk | 結晶育成装置 |
CN102534760A (zh) * | 2011-12-28 | 2012-07-04 | 苏州优晶光电科技有限公司 | 用于监测晶体生长的装置 |
CN111826708A (zh) * | 2019-08-21 | 2020-10-27 | 眉山博雅新材料有限公司 | 上提拉真空炉 |
-
1988
- 1988-12-22 JP JP32197488A patent/JPH02167884A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0632694A (ja) * | 1992-04-16 | 1994-02-08 | Shin Seiki:Kk | 結晶育成装置 |
CN102534760A (zh) * | 2011-12-28 | 2012-07-04 | 苏州优晶光电科技有限公司 | 用于监测晶体生长的装置 |
CN111826708A (zh) * | 2019-08-21 | 2020-10-27 | 眉山博雅新材料有限公司 | 上提拉真空炉 |
Also Published As
Publication number | Publication date |
---|---|
JPH0585516B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-12-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |