JPH0585515B2 - - Google Patents

Info

Publication number
JPH0585515B2
JPH0585515B2 JP63204778A JP20477888A JPH0585515B2 JP H0585515 B2 JPH0585515 B2 JP H0585515B2 JP 63204778 A JP63204778 A JP 63204778A JP 20477888 A JP20477888 A JP 20477888A JP H0585515 B2 JPH0585515 B2 JP H0585515B2
Authority
JP
Japan
Prior art keywords
mold
quartz
crucible
heating
melting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63204778A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0255285A (ja
Inventor
Shin Takeshita
Nobuyuki Tateno
Nobuya Watanabe
Arekisandaa Uintaaban Jon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP20477888A priority Critical patent/JPH0255285A/ja
Publication of JPH0255285A publication Critical patent/JPH0255285A/ja
Publication of JPH0585515B2 publication Critical patent/JPH0585515B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
JP20477888A 1988-08-19 1988-08-19 石英ルツボの製造方法 Granted JPH0255285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20477888A JPH0255285A (ja) 1988-08-19 1988-08-19 石英ルツボの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20477888A JPH0255285A (ja) 1988-08-19 1988-08-19 石英ルツボの製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP9067778A Division JP2736969B2 (ja) 1997-03-21 1997-03-21 石英ルツボ製造装置

Publications (2)

Publication Number Publication Date
JPH0255285A JPH0255285A (ja) 1990-02-23
JPH0585515B2 true JPH0585515B2 (zh) 1993-12-07

Family

ID=16496192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20477888A Granted JPH0255285A (ja) 1988-08-19 1988-08-19 石英ルツボの製造方法

Country Status (1)

Country Link
JP (1) JPH0255285A (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3011866B2 (ja) * 1994-11-30 2000-02-21 信越石英株式会社 枚葉式ウエーハ熱処理装置
US5651827A (en) * 1996-01-11 1997-07-29 Heraeus Quarzglas Gmbh Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same
JP5273512B2 (ja) 2007-10-25 2013-08-28 株式会社Ｓｕｍｃｏ 石英ガラスルツボとその製造方法および用途
JP5121923B2 (ja) 2008-03-31 2013-01-16 ジャパンスーパークォーツ株式会社 石英ガラスルツボとその製造方法
JP5042971B2 (ja) 2008-11-28 2012-10-03 株式会社Ｓｕｍｃｏ シリコン単結晶引き上げ用石英ガラスルツボ及びその製造方法
JP5058138B2 (ja) 2008-12-09 2012-10-24 ジャパンスーパークォーツ株式会社 シリコン単結晶引き上げ用石英ガラスルツボ
US8272234B2 (en) * 2008-12-19 2012-09-25 Heraeus Shin-Etsu America, Inc. Silica crucible with pure and bubble free inner crucible layer and method of making the same
JP4975012B2 (ja) 2008-12-29 2012-07-11 ジャパンスーパークォーツ株式会社 シリコン単結晶引き上げ用石英ガラスルツボ及びその製造方法
KR102443802B1 (ko) * 2020-09-25 2022-09-19 주식회사 솔레드 반도체 링 제조장치 및 그를 이용한 반도체 링 제조방법
KR102443805B1 (ko) * 2020-11-03 2022-09-19 주식회사 솔레드 반도체 링 제조장치 및 그를 이용한 반도체 링 제조방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850955A (ja) * 1981-09-22 1983-03-25 株式会社フオ−ブレイン レジン床義歯やクラウンの成形用レジンカプセル
JPS5934659A (ja) * 1982-08-20 1984-02-25 Toshiba Corp 固体撮像装置
JPH01157426A (ja) * 1987-12-15 1989-06-20 Toshiba Ceramics Co Ltd 石英ガラスルツボ製造装置
JPH01160836A (ja) * 1987-12-17 1989-06-23 Tokyo Ceramics Kk 石英ガラスルツボの製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850955A (ja) * 1981-09-22 1983-03-25 株式会社フオ−ブレイン レジン床義歯やクラウンの成形用レジンカプセル
JPS5934659A (ja) * 1982-08-20 1984-02-25 Toshiba Corp 固体撮像装置
JPH01157426A (ja) * 1987-12-15 1989-06-20 Toshiba Ceramics Co Ltd 石英ガラスルツボ製造装置
JPH01160836A (ja) * 1987-12-17 1989-06-23 Tokyo Ceramics Kk 石英ガラスルツボの製造方法

Also Published As

Publication number Publication date
JPH0255285A (ja) 1990-02-23

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