JPH058070B2 - - Google Patents

Info

Publication number
JPH058070B2
JPH058070B2 JP59105051A JP10505184A JPH058070B2 JP H058070 B2 JPH058070 B2 JP H058070B2 JP 59105051 A JP59105051 A JP 59105051A JP 10505184 A JP10505184 A JP 10505184A JP H058070 B2 JPH058070 B2 JP H058070B2
Authority
JP
Japan
Prior art keywords
resin film
substrate
plate
film forming
shaped substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59105051A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60248259A (ja
Inventor
Yoshiteru Namoto
Kyoharu Yamashita
Keizaburo Kuramasu
Masaji Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10505184A priority Critical patent/JPS60248259A/ja
Publication of JPS60248259A publication Critical patent/JPS60248259A/ja
Publication of JPH058070B2 publication Critical patent/JPH058070B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP10505184A 1984-05-23 1984-05-23 樹脂膜形成方法 Granted JPS60248259A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10505184A JPS60248259A (ja) 1984-05-23 1984-05-23 樹脂膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10505184A JPS60248259A (ja) 1984-05-23 1984-05-23 樹脂膜形成方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP27697590A Division JPH03157159A (ja) 1990-10-15 1990-10-15 スピンナー装置
JP27697490A Division JPH03170933A (ja) 1990-10-15 1990-10-15 樹脂膜形成用板状基板

Publications (2)

Publication Number Publication Date
JPS60248259A JPS60248259A (ja) 1985-12-07
JPH058070B2 true JPH058070B2 (enrdf_load_stackoverflow) 1993-02-01

Family

ID=14397186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10505184A Granted JPS60248259A (ja) 1984-05-23 1984-05-23 樹脂膜形成方法

Country Status (1)

Country Link
JP (1) JPS60248259A (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223140A (en) * 1975-08-14 1977-02-21 Toshiba Corp Method for the simultaneous coating of both sides of plates
JPS5246903A (en) * 1975-10-08 1977-04-14 Mitsubishi Electric Corp Rotary coating apparatus
JPS5928046B2 (ja) * 1980-02-09 1984-07-10 株式会社ニコン スピンナ−ヘツド
JPS5888068A (ja) * 1981-11-19 1983-05-26 Fujitsu Ltd 薄膜塗布装置

Also Published As

Publication number Publication date
JPS60248259A (ja) 1985-12-07

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