JPH0133184Y2 - - Google Patents

Info

Publication number
JPH0133184Y2
JPH0133184Y2 JP1984093120U JP9312084U JPH0133184Y2 JP H0133184 Y2 JPH0133184 Y2 JP H0133184Y2 JP 1984093120 U JP1984093120 U JP 1984093120U JP 9312084 U JP9312084 U JP 9312084U JP H0133184 Y2 JPH0133184 Y2 JP H0133184Y2
Authority
JP
Japan
Prior art keywords
coated
coating
auxiliary plate
rotation
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984093120U
Other languages
English (en)
Japanese (ja)
Other versions
JPS618481U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9312084U priority Critical patent/JPS618481U/ja
Publication of JPS618481U publication Critical patent/JPS618481U/ja
Application granted granted Critical
Publication of JPH0133184Y2 publication Critical patent/JPH0133184Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP9312084U 1984-06-21 1984-06-21 回転塗布装置 Granted JPS618481U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9312084U JPS618481U (ja) 1984-06-21 1984-06-21 回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9312084U JPS618481U (ja) 1984-06-21 1984-06-21 回転塗布装置

Publications (2)

Publication Number Publication Date
JPS618481U JPS618481U (ja) 1986-01-18
JPH0133184Y2 true JPH0133184Y2 (enrdf_load_stackoverflow) 1989-10-09

Family

ID=30650510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9312084U Granted JPS618481U (ja) 1984-06-21 1984-06-21 回転塗布装置

Country Status (1)

Country Link
JP (1) JPS618481U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS591386B2 (ja) * 1980-10-02 1984-01-11 富士通株式会社 回転塗布装置

Also Published As

Publication number Publication date
JPS618481U (ja) 1986-01-18

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