JPS618481U - 回転塗布装置 - Google Patents

回転塗布装置

Info

Publication number
JPS618481U
JPS618481U JP9312084U JP9312084U JPS618481U JP S618481 U JPS618481 U JP S618481U JP 9312084 U JP9312084 U JP 9312084U JP 9312084 U JP9312084 U JP 9312084U JP S618481 U JPS618481 U JP S618481U
Authority
JP
Japan
Prior art keywords
coating device
rotary coating
rotation
angle
spin coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9312084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0133184Y2 (enrdf_load_stackoverflow
Inventor
克己 中山
淳市 斉藤
誠司 甲斐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Inc filed Critical Toppan Inc
Priority to JP9312084U priority Critical patent/JPS618481U/ja
Publication of JPS618481U publication Critical patent/JPS618481U/ja
Application granted granted Critical
Publication of JPH0133184Y2 publication Critical patent/JPH0133184Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP9312084U 1984-06-21 1984-06-21 回転塗布装置 Granted JPS618481U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9312084U JPS618481U (ja) 1984-06-21 1984-06-21 回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9312084U JPS618481U (ja) 1984-06-21 1984-06-21 回転塗布装置

Publications (2)

Publication Number Publication Date
JPS618481U true JPS618481U (ja) 1986-01-18
JPH0133184Y2 JPH0133184Y2 (enrdf_load_stackoverflow) 1989-10-09

Family

ID=30650510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9312084U Granted JPS618481U (ja) 1984-06-21 1984-06-21 回転塗布装置

Country Status (1)

Country Link
JP (1) JPS618481U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763166A (en) * 1980-10-02 1982-04-16 Fujitsu Ltd Rotary coating device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763166A (en) * 1980-10-02 1982-04-16 Fujitsu Ltd Rotary coating device

Also Published As

Publication number Publication date
JPH0133184Y2 (enrdf_load_stackoverflow) 1989-10-09

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