JPH0133184Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to a rotational coating device that uses rotation to uniformly apply a fluid coating material to an object to be coated.

[Conventional technology]

Devices for uniform application by rotation are already known. However, in coating with this device, the fluid coating material that flew from the edge of the object to be coated was delayed due to rotation, and was caught and reattached to the tip of the next object to be coated, resulting in a thicker film in that area. .

Therefore, as a patent to suppress the above phenomenon,
There was -37708.

However, the disadvantages of the above patent are that it is difficult to remove the object to be coated after coating is completed and that the tolerance range for the gap between the auxiliary plate and the object to be coated is small.

[Means for solving problems]

An auxiliary plate is provided on the coating table so that the triangular prism-shaped auxiliary plate surrounds the object to be coated from all four sides.

[Operation] A bulge at the edge of the fluid coated body occurs on the auxiliary plate, but not on the coated body.

〔Example〕

One embodiment of the present invention will be described in detail with reference to the drawings.

2 is a plan view of one embodiment of the spin coating device according to the present invention, FIG. 3 is a sectional view taken along line A-A in FIG. 2, and FIG. FIG. 4 is a plan view of the state in which the figure is used, and FIG.
FIG.

The rotary coating device according to the present invention consists of a coating table 2, an auxiliary plate 1, and a drive rod 3. Further, in use, the object to be coated 11 is supported by the auxiliary plate 1 and the coating table 2.

The object to be coated 11 has a rectangular shape. The object to be coated 11
There is a triangular prism-shaped auxiliary plate 1 with a triangular top surface around the four sides. The corners of the auxiliary plate 1 that do not touch the object 11 to be coated form a right angle, the pillar sides of the four triangular prisms that do not touch the object 11 to be coated are on the same plane as the side surface of the coating table 2, and the rectangular shape formed by the coating table 2 is It has a shape in which the four corners of the object to be coated 11 protrude slightly from some of its sides. The angle of the auxiliary plate 1 in the direction of rotation is 15° to 45°. The gap between the auxiliary plate 1 and the object to be coated 11 is 0.
It is from 0.5mm to 0.5mm. The height difference between the object to be coated 11 and the auxiliary plate 1 is within ±0.5 mm.

The coating table 2 has a rectangular shape, and the auxiliary plate 1 and the drive rod 3 are connected to each other.

The drive rod 3 supports the rotary coating device and drives its rotation.

In use, the object to be coated 11 is coated with the rotary coating device.
rotates along the rotation direction 21.

All members of the spin coating device must be made of rigid bodies that do not deform during rotation.

[Effect of idea]

Since the bulge of the fluid coated body appears on the auxiliary plate, the tolerance range for dimensional errors can be widened without compromising the consistency of the film thickness of the fluid coated body on the coated body. can be easily taken out.

Furthermore, even if some kind of auxiliary plate has been provided up to now, it has not been possible to easily remove the object to be coated after coating because all four sides are surrounded, and means such as suction have been required for removal.

Therefore, in the present invention, since the object 11 to be coated protrudes from the coating table 2 on all sides, the object 11 to be coated can be easily taken out by picking up the corners of the object 11 that protrude from the coating table 2.

In addition, in order to see the effect of this invention on the film thickness, we used a photoresist AZ1350 manufactured by Hessst GmbH, West Germany, as a fluid coating material, and after coating at 2000 rpm, The fifth distribution diagram shows the results of measuring the film thickness of the fluid coating body at positions corresponding to the radius of rotation using an ellipsometer.
As shown in the figure.

However, A is the film thickness distribution curve of the fluid coated body when coated using a conventional spin coating device, and B is the film thickness distribution curve of the fluid coated body when coated using the spin coater according to the present invention. represents a curve.

As shown in FIG. 5, compared to the case of coating with a conventional spin coating device without an auxiliary plate, the coating with the spin coating device of the present invention has the effect of making the film thickness constant and can be put to practical use. .

[Brief explanation of drawings]

2 is a plan view of one embodiment of the spin coating device according to the present invention, FIG. 3 is a sectional view taken along line A-A in FIG. 2, and FIG. FIG. 4 is a sectional view taken along line B-B in FIG. 1, and FIG.
It is a film thickness graph in which the vertical axis indicates the thickness of the fluid coated body. 1: Auxiliary plate, 2: Application table, 3: Drive rod, 11:
Object to be coated, 21: Rotation direction, A: Coating curve by a spin coating device without an auxiliary plate, B: Coating curve by a spin coating device according to the present invention.

Claims (1)

[Scope of utility model registration request] The to-be-coated object 11 is placed around the four sides of the rectangular to-be-coated object 11.
The angle in the direction of rotation 21 is within ±0.5mm of height difference.
It is characterized by having auxiliary substrates 1 made of four triangular prisms having an angle of 15 to 45 degrees and a distance of 0.5 mm or less from the object 11 to be coated, spaced apart from each other at each of the four corners of a rectangular platform 2 to be coated. Rotary coating equipment.