JPH02309628A - Spin chuck - Google Patents

Abstract

PURPOSE:To securely set and hold various sizes of substrate at the same height by providing a substrate holding tool capable of movement and adjustment on the tip ends of two arms intersecting a chuck axis such that an intersecting angle can be altered, and holding corners of a substrate. CONSTITUTION:An intersecting angle between two arms 16, 22 is variably set in response to a square or rectangular shape of a substrate utilizing an angle alteration hole 15 in an angle set ring 14. A movable block 42 of substrate holding tool is moved and adjusted along the respective arms 16, 22 in response to the square or rectangular shape of the substrate and to a substrate size. Support pins 51, 52, 53 provided on the upper surface of the movable block 42 are provided parallel in a direction perpendicular to the longitudinal direction of the arm 16, and the lower surface of corners of the substrate is supported with the central support pin 51, and further both sides of the corners of the substrate can be held with the opposite side support pins 52, 53 so as to be held with the opposite sides therebetween. Hereby, various sizes of square or rectangular substrates are held and set at the same height.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a resist method in which a substrate is rotated during semiconductor manufacturing, and a predetermined amount of resist is dropped onto the surface of the substrate to coat the entire surface with a uniform thickness of resist. The present invention relates to a spin chuck suitable for use in coating devices and the like.

[Prior Art] Conventionally, a mask chuck disclosed in Japanese Utility Model Publication No. 63-23707 is known as a spin chuck of this type used in a resist coating apparatus.

This will be briefly explained based on FIGS. 6 and 7.
Reference numeral 1 denotes a rotating table having a substantially rectangular shape and capable of mounting a plurality of types of substrates 5.6.7.8 of different sizes, for example, 4 types; this rotating table 1 holds the substrates 5.6.7.8; A plurality of substrate mounting bins 2 to be fixed, for example, four substrate mounting bins 2, and four sets of substrate fixing bins 3 each consisting of two bins that are taller than the bins 2 and located outside of each bin 2. ,
Furthermore, it has four sets of substrate fixing bins 4, which are taller than this bin 3 and are each located outside of the bin 3, and are rotated at a constant speed by a drive motor (not shown). It is configured as follows. After dropping a predetermined amount of resist solution onto the surface of the substrate 5 (or 6.7.8), the rotary table is rotated by a drive motor to spread the resist solution on the substrate by centrifugal force and remove excess resist. By spraying the liquid outward, a uniform film thickness is obtained. Such a coating method is generally called a spin code.

The substrate 5, which is the smallest in size, is supported at the lower surface of each corner by four base liquid supporting bottles 2, and the substrate fixing bottles 3 are in contact with both sides of each corner.

When installing the next largest board 6 after the board 5, shift the board 6 by 45 degrees from the installation angle of the board 5 and place it in the board mounting bin 2.
When placed on the substrate 6, the substrate fixing pins 3 come into contact with the center of each side of the substrate 6 in parallel. When installing a board 7 larger than the board 6, the board fixing bin 3 is used as a board supporting bin, and the board fixing bin 4 holds both sides of each corner of the board 7.

Then, the largest board 8 is placed on the board fixing bin 3 at a 45 degree angle with respect to the board 7.
The center of each side is held by

[Problems to be Solved by the Invention] However, in such a conventional spin chuck, since the bin 2.3.4 is fixedly arranged on the table 1, the size and shape of the substrate that can be placed cannot be specified. There was a problem that it lacked versatility. That is, in the spin chuck described above, since the bins 2.3.4 are arranged for square substrates, it is difficult to apply the spin chuck to substrates having shapes other than squares, for example, rectangular shapes. Further, since the installation height of the substrate changes depending on the substrate size, the height of the resist droplet nozzle must be adjusted each time, and there is a problem that the adjustment work is complicated. Furthermore, when the table 1 is made larger in order to improve versatility, the weight of the spin chuck itself increases, resulting in poor rotational characteristics and various drawbacks, such as variations in the thickness of the applied resist film.

Therefore, the present invention has been made in view of these conventional problems, and its purpose is to have a relatively simple structure, to be able to hold square or rectangular substrates of various sizes, and to provide versatility. It is an object of the present invention to provide a spin chuck which is improved, allows all substrates to be installed at the same height position, and is lightweight.

[Means for Solving the Problems] In order to achieve the above object, the present invention includes a chuck shaft rotated by a driving means, an angle setting ring coaxially arranged on the chuck shaft, and an angle setting ring that crosses each other to rotate the chuck shaft. a pair of arms each having a middle portion connected to the angle setting ring, and a pair of arms each having a square or rectangular base plate disposed at the distal end of each arm so as to be movable and adjustable in the longitudinal direction of the arm. a substrate holder for holding a corner portion, at least one of the pair of arms is rotatable in the circumferential direction with respect to the chuck shaft, and the intermediate portion is positionally adjustable with respect to the angle setting ring by a connecting device. It is fixed.

[Operation] In the present invention, one arm is rotated in the circumferential direction of the chuck shaft to change the intersecting angle with the other arm. The substrate holder of each arm is moved and adjusted in the longitudinal direction of the arm, and the holding position of the substrate is changed according to the size of the substrate.

[Example] Hereinafter, a spin chuck according to the present invention will be described in detail based on an example shown in the drawings.

Fig. 1 shows an embodiment of the spin chuck according to the present invention, which is a perspective view when holding a square substrate, Fig. 2 is a view taken in the direction of arrow A in Fig. 1, and Fig. 3 is a substrate holder. FIG. 4 is a side view and a plan view when holding a rectangular substrate. In these figures, a spin chuck 10 includes a chuck shaft 11 that is rotated by a drive means (not shown) such as a drive motor. A cylindrical arm attachment member 12 is fitted into the upper end of the chuck shaft 11 and fixed with a plurality of setscrews 13 .

An angle setting ring 14 is disposed coaxially with the chuck shaft 11 and surrounds the outer periphery of the arm mounting member 12. The angle setting ring 14 has a plurality of angle changing holes 15 penetrating its upper and lower surfaces. They are arranged in parallel at predetermined intervals in the circumferential direction of the tongue 14.

In this case, the pitch of the angle changing holes 15 is different for each quarter of the angle setting ring 14, and as shown in FIG.
The angle changing hole 15 in the fourth half of the interior B is the angle setting ring 14.
The angle α from the center of the angle setting ring 14 is formed in 5° increments, and the angle changing holes 15 inside the third quarter C and the fourth half opposite thereto are formed at an angle β from the center of the angle setting ring 14. is 6°
It is formed by notches.

Reference numeral 16 denotes an arm extending in the radial direction of the chuck shaft 11, which is disposed at the upper end of the chuck shaft 11 via the arm attachment member 12, and this arm 16 is divided into two parts, so that the arm 16 is divided into two parts. The arms 16A and 16B are composed of two arms 16A and 16B, whose inner end portions 116a and 116b that face each other are fixed onto arm attachment portions 18a and 18b that protrude in the radial direction from the outer periphery of the arm attachment member 12 by set screws 17, respectively. has been done. The setscrews 17 are screwed into the screw holes 20 of the first and second arms 16A, 16B from the lower surfaces of the arm attachment parts 18a, 18b, respectively. The first and second arms 16A, 16B are arranged on the same straight line that passes through the center of the chuck shaft 11 and intersects the chuck shaft 11 at right angles, and their intermediate portions overlap the angle setting ring 14. The overlapping portion is connected to the angle setting ring 14 by a connecting pin 21 as a connecting member. The connecting bottle 21 has a bottle insertion hole (not shown) formed in the overlapping portion of the first and second arms 16A and 16B, and a corresponding angle changing hole 15.
and, if necessary, into other angle changing holes 15.

Similarly, 22 is an arm mounting member 1 attached to the chuck shaft 11.
This arm 22 has a connecting rod 25 having a fitting recess 24 in the center of its lower surface that fits into the outer periphery of the arm mounting member 12, and inner ends facing each other. First and second movable arms 28A and 28 are respectively fixed to the top surface of both ends of the connecting rod 25 by set screws 27.
B, and has the same length as the arm 16.

The connecting rod 25 is arranged so as to be rotatable in the circumferential direction of the arm mounting member 12, so that the arm 1
The intersection angle e with 6.22 can be freely changed depending on the shape of the substrate to be processed. The connecting rod 25 and the first and second movable arms 28A, 28B are arranged in a straight line. The intermediate portions of the first and second movable arms 28A and 28B overlap with the angle setting ring 14, and this overlapping portion is connected to the angle setting ring 14 by a connecting pin 30 as a connecting device.
is held together with the arm 16.

The connecting bin 30 has movable first and second arms 28A,
28[3] is inserted into the bottle insertion hole (not shown) formed in the overlapping part and the corresponding angle change hole 15,
When changing the angle of the arms 16 and 22, it is pulled out and inserted into another hole 15 for changing the angle.

In this case, as described above, the angle changing hole 15 changes the angles α and β from the center of the angle setting ring 14 to the angle setting ring 1.
Arm 16 is formed differently every quarter of 4.
The intersection angle θ of and 22 can be changed in 1° increments. That is, in the initial state shown in Figure 4, the intersection angle θ of the arms 16.22 is 55 degrees, and if you want to change this angle to 56 degrees, move each of the first and second arms 16A, 16B clockwise. The first and second movable arms 28A and 28B are rotated by an angle α (5 degrees) in the same clockwise direction.
), the difference in rotation angle is (6° - 5°
Since the intersecting angle θ of the arms 16 and 22 becomes larger than the initial state by 1°), e=56°.On the other hand, if the angles α and β are rotated counterclockwise, the angle θ becomes 5°- Since the intersecting angle θ between the arms 16 and 22 is smaller than the initial state by 6°=−1°, it is possible to set θ=54°.

Further, by fixing the arm 16 to the angle setting ring 14 and rotating only the arm 22 clockwise or counterclockwise, the intersection angle θ can be increased or decreased in steps of 5° or 6°.

In this embodiment, the crossing angle e of the arms 16.22 can be variably set within the range of 90° to 20' in 1° increments.

Further, when each arm 16.22 holds a square board, the intersection angle θ is set to 90°, and coincides with each diagonal of the board. Similarly, when holding a rectangular substrate M, the intersection angle θ is set to an angle smaller than 90° depending on the size of the substrate M, as shown in FIG. .

Reference numeral 40 denotes a substrate holder that is movably arranged at the tip of each arm 16.22 and holds each corner of the substrate board or M. In this case, since each substrate holder 40 is formed identically, only the substrate holder 40 attached to the arm 16 will be described. have.

The fixing block 41 has a square hole 43 in the center through which the arm 16 can slide freely, and a set screw 44 for fixing the fixing block 41 to the arm 16 is attached to the center of the upper surface. A plurality of screw holes 45 (first
) are formed at appropriate intervals in the longitudinal direction of the arm 16, and the set screw 44 is screwed into any one of them. Then, by screwing the set screw 44 into the other screw hole 45, the fixing block 41 can be moved and adjusted in the longitudinal direction of the arm 16.

The movable block 42 has a square hole 50 in the center through which the arm 16 can slide freely, and three substrate support bins 51, 52, and 53 for holding the corners of the substrate are planted on the upper surface. ing. These support bins 51, 52, and 53 are arranged in parallel in a direction perpendicular to the longitudinal direction of the arm 16, and the support bin 51 in the center supports the lower surface of the corner of the board, and the support bins 52, 53 on both sides support the bottom surface of the board. Hold both sides of the corner. Therefore, the central support bin 51
is set lower than the support bins 52, 53 on both sides. The support bottles 51, 52, 53 are made of SUS or the like and coated with high molecular weight polyoxymethylene or the like, and have screw holes (not shown) formed on the upper surface of the movable block 42 at the lower ends thereof. male screw part 51a
, 52a, and 53a (FIG. 2) are integrally provided.

The movable block 42 is connected to the fixed block 41 by a pair of left and right adjustment screws 55. As shown in FIG. 3, this adjustment screw 55 has a right-hand thread 56 formed at one end and is screwed into a screw hole 57 formed in the fixed block 41, and a left-hand thread 59 formed at the other end so that the adjustment screw 55 can be moved. It is screwed into a screw hole 60 of the block 42, and the center part forms a rotation operation part 61 in the shape of a square bar. Therefore, when the rotation operation part 61 is turned by hand, the movable block 42 moves forward and backward along the arm 16 as the adjustment screw 55 rotates, thereby adjusting the position of the support bins 51, 52, and 53 according to the board size. can be fine-tuned.

Thus, in the spin chuck 10 having such a configuration, the intersecting angle θ of the two arms 16 and 22 can be freely set variably using the angle changing hole 15 of the angle setting ring 14, so that it is possible to freely set the intersection angle θ of the two arms 16 and 22. In addition, by moving and adjusting the movable block 42 of the substrate holder 40 along each arm 16.22, it is possible to handle substrates M of various sizes. Moreover, since the support bins 51, 52, and 53 are commonly used for all the boards that can be held, the installation height of the boards does not change depending on the board size, and all can be installed at the same height. obtain.

In addition, since two arms 16, 22 are used instead of a table, even if the size of substrates that can be processed increases, the weight of the spin chuck 10 itself remains almost the same, making it possible to reduce the weight.

FIG. 5 is a sectional view of essential parts showing an embodiment of the pond of the present invention. In this embodiment, the arm 22 rotatably disposed with respect to the chuck shaft 11 is composed of a single arm, thereby eliminating the need for the connecting rod 25 in the above embodiment, and the arm 22
A cylindrical portion 63 is integrally provided on the lower surface of the center of the arm mounting member 12 , and this cylindrical portion 63 is rotatably fitted into a recessed portion 64 recessed in the center of the upper surface of the arm mounting member 12 . A pair of ring attachment parts 65 and 66 are attached to the lower surface of the arm 22.
The angle setting ring 14 is inserted between the pair of ring attachment parts 65 and 66 so as to protrude so as to face each other in the longitudinal direction. A screw 67 serving as a coupling member is screwed into the outer ring mounting portion 66, and its tip surface is pressed against the outer peripheral surface of the angle setting ring 14, thereby attaching the angle setting ring 14 to the inner ring mounting portion 65. The pressing is fixed. Therefore, the angle setting ring 14
The angle changing hole 15 is unnecessary.

The other configurations are the same as those of the above embodiment.

Note that in the present invention, the two arms 16 and 22 also serve as holding members for the angle setting ring 14; however, the angle setting ring 14 is fixed to the chuck shaft 11 directly or via a bracket, and the two arms It goes without saying that the arms 16, 22 may be both rotatably disposed relative to the chuck shaft 11, and may be connected to the angle setting ring 14 with an appropriate coupling so that their positions can be adjusted.

Further, although the above embodiment is configured to hold the corner portions of the substrate using three support bins 51, 52, 53, the number of bins is not limited to this, and the size and shape of the substrate It may be increased or decreased or its position may be changed depending on the situation.

Further, in this embodiment, the angles α and β of the angle changing hole 15 are set to 5° and 6°, respectively, but the angle α can be changed by increasing the diameter of the angle setting ring 14 or by making the angle changing hole 15 smaller. , β may be set small.

In addition, a scale is displayed on the top surface of the angle setting ring 14 so that the crossing angle θ can be read, and the arm 16 is adjusted by centrifugal force.
Various changes and modifications are possible, such as connecting each other with a connecting rod to prevent variations in the distance between the tips of the tips 22.

[Effects of the Invention] As explained in detail above, the spin chuck according to the present invention has two parts arranged to intersect with the chuck axis so that the angle can be changed.
Board holders are disposed at the tips of the two arms so that their movement can be adjusted freely, and these board holders are configured to hold the corners of a square or rectangular board.
It is lightweight and allows substrates of various sizes to be stably and reliably set and held at the same height position, thereby improving the versatility and handleability of the chuck. In addition, if the weight is reduced, the rotational characteristics of the chuck will improve, and variations in resist film thickness can be reduced.If the installation height of the substrate can be kept constant, there will be no need to adjust the height of the resist dripping nozzle, etc. , the effect is very large.

[Brief explanation of drawings]

Fig. 1 shows an embodiment of the spin chuck according to the present invention, which is a perspective view when holding a square substrate, Fig. 2 is a view taken in the direction of arrow A in Fig. 1, and Fig. 3 is a substrate holder. 4 is a plan view of a case in which a rectangular substrate is held, FIG. 5 is a cross-sectional view of main parts showing another embodiment of the present invention, and FIGS. 6 and 7 are for conventional masks. FIG. 3 is a plan view and a front view of the chuck. 10... Spin chuck, 11... Chuck axis, 1
2... Arm mounting member, 14... Angle setting ring,
15... Angle change hole, 16... Arm, 21...
・Connection bin, 22... Arm, 30... Connection bin,
40... Board holder, 41... Fixing block, 42
... Movable block, 51.52.53... Board support bin, 55... Adjustment screw, L... Square board, M... Rectangular board.

Claims (1)

[Claims] A chuck shaft rotated by a driving means, an angle setting ring coaxially disposed on the chuck shaft, and a pair of arms intersecting each other and disposed on the chuck shaft, each having an intermediate portion connected to the angle setting ring. and a substrate holder which is disposed at the tip of each of these arms so as to be movable and adjustable in the longitudinal direction of each arm, and which holds each corner of a square or rectangular substrate; A spin chuck characterized in that one side is rotatable in the circumferential direction with respect to the chuck shaft, and an intermediate portion is fixed to the angle setting ring by a connecting member so as to be adjustable in position.