JPS63133370U - - Google Patents
Info
- Publication number
- JPS63133370U JPS63133370U JP2614687U JP2614687U JPS63133370U JP S63133370 U JPS63133370 U JP S63133370U JP 2614687 U JP2614687 U JP 2614687U JP 2614687 U JP2614687 U JP 2614687U JP S63133370 U JPS63133370 U JP S63133370U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- rotary base
- rotary
- rotation center
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案になる回転塗布装置の一実施例
の平面図、第２図は第１図における―線に沿
う断面図、第３図は本考案になる回転塗布装置の
他実施例の要部構成図、第４図Ａ，Ｂはレジスト
が均一な膜厚でコーテイングされることを説明す
るための要部構成図、第５図は従来の回転塗布装
置の一例を示す要部構成図、第６図は第５図に示
す装置でプレート上でレジストが広がる方向を示
す図である。
図において、５，１８は第１の回転基台、６，
１９は第２の回転基台、７，１７は回転塗布装置
、１０は歯車部、１２はプレート、１４はギヤ部
、１６はレジスト、２１はかさ摩擦車である。
Fig. 1 is a plan view of one embodiment of the spin coating device of the present invention, Fig. 2 is a sectional view taken along the line - in Fig. 1, and Fig. 3 is a plan view of another embodiment of the spin coating device of the invention. 4A and 4B are essential part configuration diagrams to explain that the resist is coated with a uniform film thickness. FIG. 5 is a main part configuration diagram showing an example of a conventional spin coating device. , FIG. 6 is a diagram showing the direction in which the resist spreads on the plate in the apparatus shown in FIG. 5. In the figure, 5 and 18 are the first rotating base;
19 is a second rotary base, 7 and 17 are rotary coating devices, 10 is a gear portion, 12 is a plate, 14 is a gear portion, 16 is a resist, and 21 is a bevel friction wheel.
Claims (1)
２が取付けられ該プレート１２を回転付勢する第
１の回転基台５，１８と、 該第１の基台５，１８が上面部に取付けられ、
該第１の回転基台５，１８の回転中心０１と異な
る位置０２を回転中心とする該第１の回転基台よ
り大径の第２の回転基台６，１９とを具備するこ
とを特徴とする回転塗布装置。[Claims for Utility Model Registration] Plate 1 onto which coating material 16, which is a fluid, is dripped
2 is attached to the plate 12 and urges the plate 12 to rotate;
A second rotary base 6, 19 having a larger diameter than the first rotary base 6, 19 having a rotation center at a position 02 different from the rotation center 01 of the first rotary base 5, 18. A rotary coating device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2614687U JPS63133370U (en) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2614687U JPS63133370U (en) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63133370U true JPS63133370U (en) | 1988-08-31 |
Family
ID=30826953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2614687U Pending JPS63133370U (en) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63133370U (en) |
-
1987
- 1987-02-24 JP JP2614687U patent/JPS63133370U/ja active Pending
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