JPH0470953B2 - - Google Patents

Info

Publication number
JPH0470953B2
JPH0470953B2 JP22473383A JP22473383A JPH0470953B2 JP H0470953 B2 JPH0470953 B2 JP H0470953B2 JP 22473383 A JP22473383 A JP 22473383A JP 22473383 A JP22473383 A JP 22473383A JP H0470953 B2 JPH0470953 B2 JP H0470953B2
Authority
JP
Japan
Prior art keywords
plate
substrate
resin film
shaped substrate
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22473383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60143869A (ja
Inventor
Yoshiteru Namoto
Kyoharu Yamashita
Keizaburo Kuramasu
Masaji Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP22473383A priority Critical patent/JPS60143869A/ja
Publication of JPS60143869A publication Critical patent/JPS60143869A/ja
Publication of JPH0470953B2 publication Critical patent/JPH0470953B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP22473383A 1983-11-29 1983-11-29 樹脂膜形成装置 Granted JPS60143869A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22473383A JPS60143869A (ja) 1983-11-29 1983-11-29 樹脂膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22473383A JPS60143869A (ja) 1983-11-29 1983-11-29 樹脂膜形成装置

Publications (2)

Publication Number Publication Date
JPS60143869A JPS60143869A (ja) 1985-07-30
JPH0470953B2 true JPH0470953B2 (enrdf_load_stackoverflow) 1992-11-12

Family

ID=16818385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22473383A Granted JPS60143869A (ja) 1983-11-29 1983-11-29 樹脂膜形成装置

Country Status (1)

Country Link
JP (1) JPS60143869A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS60143869A (ja) 1985-07-30

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