JPH057863B2 - - Google Patents
Info
- Publication number
- JPH057863B2 JPH057863B2 JP60212877A JP21287785A JPH057863B2 JP H057863 B2 JPH057863 B2 JP H057863B2 JP 60212877 A JP60212877 A JP 60212877A JP 21287785 A JP21287785 A JP 21287785A JP H057863 B2 JPH057863 B2 JP H057863B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- oxide film
- silicon oxide
- silicon
- silicon substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21287785A JPS6272129A (ja) | 1985-09-26 | 1985-09-26 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21287785A JPS6272129A (ja) | 1985-09-26 | 1985-09-26 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6272129A JPS6272129A (ja) | 1987-04-02 |
| JPH057863B2 true JPH057863B2 (enrdf_load_stackoverflow) | 1993-01-29 |
Family
ID=16629740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21287785A Granted JPS6272129A (ja) | 1985-09-26 | 1985-09-26 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6272129A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04215432A (ja) * | 1990-12-14 | 1992-08-06 | Mitsubishi Electric Corp | 微細加工方法 |
| JP4665455B2 (ja) * | 2004-08-09 | 2011-04-06 | 富士ゼロックス株式会社 | シリコン構造体製造方法、モールド金型製造方法、成形部材製造方法、シリコン構造体、インクジェット記録ヘッド、及び、画像形成装置 |
| JP5573306B2 (ja) * | 2010-03-31 | 2014-08-20 | 凸版印刷株式会社 | フォトマスクブランクの製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS558590B2 (enrdf_load_stackoverflow) * | 1972-02-02 | 1980-03-05 | ||
| JPS6025249A (ja) * | 1983-07-22 | 1985-02-08 | Pioneer Electronic Corp | 半導体装置の製造方法 |
-
1985
- 1985-09-26 JP JP21287785A patent/JPS6272129A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6272129A (ja) | 1987-04-02 |
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