JPH0577294B2 - - Google Patents

Info

Publication number
JPH0577294B2
JPH0577294B2 JP61060015A JP6001586A JPH0577294B2 JP H0577294 B2 JPH0577294 B2 JP H0577294B2 JP 61060015 A JP61060015 A JP 61060015A JP 6001586 A JP6001586 A JP 6001586A JP H0577294 B2 JPH0577294 B2 JP H0577294B2
Authority
JP
Japan
Prior art keywords
region
layer
pnp transistor
vertical pnp
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61060015A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62216356A (ja
Inventor
Teruo Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP61060015A priority Critical patent/JPS62216356A/ja
Publication of JPS62216356A publication Critical patent/JPS62216356A/ja
Publication of JPH0577294B2 publication Critical patent/JPH0577294B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • H10D84/0119—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including complementary BJTs
    • H10D84/0121—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including complementary BJTs the complementary BJTs being vertical BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Bipolar Integrated Circuits (AREA)
JP61060015A 1986-03-18 1986-03-18 半導体集積回路の製造方法 Granted JPS62216356A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61060015A JPS62216356A (ja) 1986-03-18 1986-03-18 半導体集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61060015A JPS62216356A (ja) 1986-03-18 1986-03-18 半導体集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS62216356A JPS62216356A (ja) 1987-09-22
JPH0577294B2 true JPH0577294B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=13129814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61060015A Granted JPS62216356A (ja) 1986-03-18 1986-03-18 半導体集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS62216356A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5108739A (en) * 1986-08-25 1992-04-28 Titan Kogyo Kabushiki Kaisha White colored deodorizer and process for producing the same
EP0347550A3 (en) * 1988-06-21 1991-08-28 Texas Instruments Incorporated Process for fabricating isolated vertical and super beta bipolar transistors
JP2001308106A (ja) 2000-04-27 2001-11-02 Mitsubishi Electric Corp 半導体装置およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5350686A (en) * 1976-10-19 1978-05-09 Mitsubishi Electric Corp Production of semiconductor integrated circuit
JPS59979B2 (ja) * 1976-12-29 1984-01-10 富士通株式会社 半導体集積回路

Also Published As

Publication number Publication date
JPS62216356A (ja) 1987-09-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term