JPH0577289B2 - - Google Patents

Info

Publication number
JPH0577289B2
JPH0577289B2 JP61275937A JP27593786A JPH0577289B2 JP H0577289 B2 JPH0577289 B2 JP H0577289B2 JP 61275937 A JP61275937 A JP 61275937A JP 27593786 A JP27593786 A JP 27593786A JP H0577289 B2 JPH0577289 B2 JP H0577289B2
Authority
JP
Japan
Prior art keywords
wafer
self
rotary table
force
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61275937A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63128640A (ja
Inventor
Itaru Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP61275937A priority Critical patent/JPS63128640A/ja
Publication of JPS63128640A publication Critical patent/JPS63128640A/ja
Publication of JPH0577289B2 publication Critical patent/JPH0577289B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP61275937A 1986-11-18 1986-11-18 ウエハの自動調心装置 Granted JPS63128640A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61275937A JPS63128640A (ja) 1986-11-18 1986-11-18 ウエハの自動調心装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61275937A JPS63128640A (ja) 1986-11-18 1986-11-18 ウエハの自動調心装置

Publications (2)

Publication Number Publication Date
JPS63128640A JPS63128640A (ja) 1988-06-01
JPH0577289B2 true JPH0577289B2 (https=) 1993-10-26

Family

ID=17562506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61275937A Granted JPS63128640A (ja) 1986-11-18 1986-11-18 ウエハの自動調心装置

Country Status (1)

Country Link
JP (1) JPS63128640A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4607848B2 (ja) * 2006-10-27 2011-01-05 東京エレクトロン株式会社 基板処理装置、基板受け渡し位置の調整方法及び記憶媒体

Also Published As

Publication number Publication date
JPS63128640A (ja) 1988-06-01

Similar Documents

Publication Publication Date Title
JP2856816B2 (ja) 要素搬送アライメント装置及び方法
CN109588039B (zh) 一种旋转贴片头机构
JPH0615565A (ja) ウエーハ自動ラッピング装置
JP4684268B2 (ja) 真空処理装置、基板搬送方法
CN111312644A (zh) 晶圆自动对位装置以及刻蚀机
KR20020067682A (ko) 웨이퍼의 평면가공장치 및 그 평면가공방법
TWI823237B (zh) 對準裝置及對準方法
US7020954B2 (en) Apparatus for placing a semiconductor chip as a flipchip on a substrate
JPH11102936A (ja) 部品供給装置及び方法
US7354335B2 (en) CMP apparatus and load cup mechanism
CN1297675A (zh) 布置在膜上电子电路的定位装置
CN114999984A (zh) 键合装置及键合方法
JPH0577289B2 (https=)
JP7841858B2 (ja) フレームユニットの搬送準備方法
JP2022133695A (ja) 保持パッド、及び加工装置
JPH0457469B2 (https=)
KR20030030587A (ko) Led 다이 본더
JP2000252303A (ja) ペレットボンディング方法
JPH09260460A (ja) ウエハ搬送装置および方法ならびに半導体露光装置
CN210272290U (zh) 片状体交接装置及采用该装置的硅片膜厚测量系统
JPH06143116A (ja) レンズ搬送装置
CN119252778B (zh) 竖向晶圆搬运设备
JP3749054B2 (ja) 部品実装装置
JPH02133938A (ja) 外部リード接合方法及び装置
JP2021132181A (ja) 加工装置