JPS63128640A - ウエハの自動調心装置 - Google Patents

ウエハの自動調心装置

Info

Publication number
JPS63128640A
JPS63128640A JP61275937A JP27593786A JPS63128640A JP S63128640 A JPS63128640 A JP S63128640A JP 61275937 A JP61275937 A JP 61275937A JP 27593786 A JP27593786 A JP 27593786A JP S63128640 A JPS63128640 A JP S63128640A
Authority
JP
Japan
Prior art keywords
wafer
centrifugal force
chuck
aligning device
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61275937A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577289B2 (https=
Inventor
Itaru Matsumoto
松本　至
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61275937A priority Critical patent/JPS63128640A/ja
Publication of JPS63128640A publication Critical patent/JPS63128640A/ja
Publication of JPH0577289B2 publication Critical patent/JPH0577289B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP61275937A 1986-11-18 1986-11-18 ウエハの自動調心装置 Granted JPS63128640A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61275937A JPS63128640A (ja) 1986-11-18 1986-11-18 ウエハの自動調心装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61275937A JPS63128640A (ja) 1986-11-18 1986-11-18 ウエハの自動調心装置

Publications (2)

Publication Number Publication Date
JPS63128640A true JPS63128640A (ja) 1988-06-01
JPH0577289B2 JPH0577289B2 (https=) 1993-10-26

Family

ID=17562506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61275937A Granted JPS63128640A (ja) 1986-11-18 1986-11-18 ウエハの自動調心装置

Country Status (1)

Country Link
JP (1) JPS63128640A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008109027A (ja) * 2006-10-27 2008-05-08 Tokyo Electron Ltd 基板処理装置、基板受け渡し位置の調整方法及び記憶媒体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008109027A (ja) * 2006-10-27 2008-05-08 Tokyo Electron Ltd 基板処理装置、基板受け渡し位置の調整方法及び記憶媒体

Also Published As

Publication number Publication date
JPH0577289B2 (https=) 1993-10-26

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