JPH0573273B2 - - Google Patents
Info
- Publication number
- JPH0573273B2 JPH0573273B2 JP61233615A JP23361586A JPH0573273B2 JP H0573273 B2 JPH0573273 B2 JP H0573273B2 JP 61233615 A JP61233615 A JP 61233615A JP 23361586 A JP23361586 A JP 23361586A JP H0573273 B2 JPH0573273 B2 JP H0573273B2
- Authority
- JP
- Japan
- Prior art keywords
- gallium arsenide
- insulating film
- mask
- electrodes
- arsenide substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 9
- 239000003990 capacitor Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000347 anisotropic wet etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23361586A JPS6387761A (ja) | 1986-09-30 | 1986-09-30 | ガリウム砒素集積回路のmim容量 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23361586A JPS6387761A (ja) | 1986-09-30 | 1986-09-30 | ガリウム砒素集積回路のmim容量 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6387761A JPS6387761A (ja) | 1988-04-19 |
JPH0573273B2 true JPH0573273B2 (US06521211-20030218-C00004.png) | 1993-10-14 |
Family
ID=16957820
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23361586A Granted JPS6387761A (ja) | 1986-09-30 | 1986-09-30 | ガリウム砒素集積回路のmim容量 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6387761A (US06521211-20030218-C00004.png) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6251740B1 (en) | 1998-12-23 | 2001-06-26 | Lsi Logic Corporation | Method of forming and electrically connecting a vertical interdigitated metal-insulator-metal capacitor extending between interconnect layers in an integrated circuit |
US6441419B1 (en) | 1998-03-31 | 2002-08-27 | Lsi Logic Corporation | Encapsulated-metal vertical-interdigitated capacitor and damascene method of manufacturing same |
US6417535B1 (en) * | 1998-12-23 | 2002-07-09 | Lsi Logic Corporation | Vertical interdigitated metal-insulator-metal capacitor for an integrated circuit |
US6504202B1 (en) | 2000-02-02 | 2003-01-07 | Lsi Logic Corporation | Interconnect-embedded metal-insulator-metal capacitor |
US6342734B1 (en) | 2000-04-27 | 2002-01-29 | Lsi Logic Corporation | Interconnect-integrated metal-insulator-metal capacitor and method of fabricating same |
US6341056B1 (en) | 2000-05-17 | 2002-01-22 | Lsi Logic Corporation | Capacitor with multiple-component dielectric and method of fabricating same |
US6566186B1 (en) | 2000-05-17 | 2003-05-20 | Lsi Logic Corporation | Capacitor with stoichiometrically adjusted dielectric and method of fabricating same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6066851A (ja) * | 1983-09-22 | 1985-04-17 | Oki Electric Ind Co Ltd | 集積回路用コンデンサ及びその製造方法 |
JPS60178659A (ja) * | 1984-02-24 | 1985-09-12 | Toshiba Corp | 半導体装置およびその製造方法 |
JPS6136965A (ja) * | 1984-07-30 | 1986-02-21 | Toshiba Corp | 半導体メモリ装置 |
-
1986
- 1986-09-30 JP JP23361586A patent/JPS6387761A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6066851A (ja) * | 1983-09-22 | 1985-04-17 | Oki Electric Ind Co Ltd | 集積回路用コンデンサ及びその製造方法 |
JPS60178659A (ja) * | 1984-02-24 | 1985-09-12 | Toshiba Corp | 半導体装置およびその製造方法 |
JPS6136965A (ja) * | 1984-07-30 | 1986-02-21 | Toshiba Corp | 半導体メモリ装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6387761A (ja) | 1988-04-19 |
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