JPH0570946B2 - - Google Patents

Info

Publication number
JPH0570946B2
JPH0570946B2 JP59263797A JP26379784A JPH0570946B2 JP H0570946 B2 JPH0570946 B2 JP H0570946B2 JP 59263797 A JP59263797 A JP 59263797A JP 26379784 A JP26379784 A JP 26379784A JP H0570946 B2 JPH0570946 B2 JP H0570946B2
Authority
JP
Japan
Prior art keywords
semiconductor
region
substrate
conductivity type
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP59263797A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61141177A (ja
Inventor
Akinaga Yamamoto
Sadaji Takimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP59263797A priority Critical patent/JPS61141177A/ja
Publication of JPS61141177A publication Critical patent/JPS61141177A/ja
Publication of JPH0570946B2 publication Critical patent/JPH0570946B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/103—Integrated devices the at least one element covered by H10F30/00 having potential barriers, e.g. integrated devices comprising photodiodes or phototransistors

Landscapes

  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP59263797A 1984-12-14 1984-12-14 半導体光検出装置 Granted JPS61141177A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59263797A JPS61141177A (ja) 1984-12-14 1984-12-14 半導体光検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59263797A JPS61141177A (ja) 1984-12-14 1984-12-14 半導体光検出装置

Publications (2)

Publication Number Publication Date
JPS61141177A JPS61141177A (ja) 1986-06-28
JPH0570946B2 true JPH0570946B2 (enrdf_load_stackoverflow) 1993-10-06

Family

ID=17394384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59263797A Granted JPS61141177A (ja) 1984-12-14 1984-12-14 半導体光検出装置

Country Status (1)

Country Link
JP (1) JPS61141177A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682817B2 (ja) * 1985-12-20 1994-10-19 松下電器産業株式会社 イメ−ジセンサ
JPH061827B2 (ja) * 1987-02-06 1994-01-05 日本電気株式会社 固体撮像装置
JPS63274171A (ja) * 1987-05-06 1988-11-11 Seiko Instr & Electronics Ltd イメ−ジセンサ−チツプ
JPH01107579A (ja) * 1987-10-20 1989-04-25 Fuji Electric Co Ltd 光検知素子
JP4482253B2 (ja) * 2001-09-12 2010-06-16 浜松ホトニクス株式会社 ホトダイオードアレイ、固体撮像装置、及び、放射線検出器
JP4391079B2 (ja) * 2002-11-28 2009-12-24 浜松ホトニクス株式会社 固体撮像装置及び放射線撮像装置
JP6552850B2 (ja) * 2015-03-16 2019-07-31 株式会社東芝 光検出装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5661177A (en) * 1979-10-23 1981-05-26 Mitsubishi Electric Corp Preparation of semiconductor photodetector
JPS5833373A (ja) * 1981-08-21 1983-02-26 Mitsubishi Electric Corp 半導体撮像装置
JPS608672B2 (ja) * 1982-02-15 1985-03-05 株式会社日立製作所 固体撮像装置
JPS59188966A (ja) * 1983-04-12 1984-10-26 Matsushita Electronics Corp 固体撮像装置の製造方法

Also Published As

Publication number Publication date
JPS61141177A (ja) 1986-06-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees