JPH0569294B2 - - Google Patents

Info

Publication number
JPH0569294B2
JPH0569294B2 JP61166652A JP16665286A JPH0569294B2 JP H0569294 B2 JPH0569294 B2 JP H0569294B2 JP 61166652 A JP61166652 A JP 61166652A JP 16665286 A JP16665286 A JP 16665286A JP H0569294 B2 JPH0569294 B2 JP H0569294B2
Authority
JP
Japan
Prior art keywords
film
deposited
conductive film
hole
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61166652A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6324638A (ja
Inventor
Tooru Mogami
Hidekazu Okabayashi
Eiji Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP16665286A priority Critical patent/JPS6324638A/ja
Publication of JPS6324638A publication Critical patent/JPS6324638A/ja
Publication of JPH0569294B2 publication Critical patent/JPH0569294B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP16665286A 1986-07-17 1986-07-17 微細ホ−ルうめこみ方法 Granted JPS6324638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16665286A JPS6324638A (ja) 1986-07-17 1986-07-17 微細ホ−ルうめこみ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16665286A JPS6324638A (ja) 1986-07-17 1986-07-17 微細ホ−ルうめこみ方法

Publications (2)

Publication Number Publication Date
JPS6324638A JPS6324638A (ja) 1988-02-02
JPH0569294B2 true JPH0569294B2 (enrdf_load_stackoverflow) 1993-09-30

Family

ID=15835234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16665286A Granted JPS6324638A (ja) 1986-07-17 1986-07-17 微細ホ−ルうめこみ方法

Country Status (1)

Country Link
JP (1) JPS6324638A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60233840A (ja) * 1984-05-04 1985-11-20 Nec Corp 段差の被覆方法

Also Published As

Publication number Publication date
JPS6324638A (ja) 1988-02-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term