JPH056766B2 - - Google Patents

Info

Publication number
JPH056766B2
JPH056766B2 JP60292303A JP29230385A JPH056766B2 JP H056766 B2 JPH056766 B2 JP H056766B2 JP 60292303 A JP60292303 A JP 60292303A JP 29230385 A JP29230385 A JP 29230385A JP H056766 B2 JPH056766 B2 JP H056766B2
Authority
JP
Japan
Prior art keywords
transparent conductive
conductive film
film
zinc oxide
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60292303A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62154411A (ja
Inventor
Uchitsugu Minami
Hidehito Nanto
Shinzo Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Mining and Smelting Co Ltd
Original Assignee
Mitsui Mining and Smelting Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining and Smelting Co Ltd filed Critical Mitsui Mining and Smelting Co Ltd
Priority to JP29230385A priority Critical patent/JPS62154411A/ja
Publication of JPS62154411A publication Critical patent/JPS62154411A/ja
Publication of JPH056766B2 publication Critical patent/JPH056766B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Insulated Conductors (AREA)
JP29230385A 1985-12-26 1985-12-26 透明導電膜 Granted JPS62154411A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29230385A JPS62154411A (ja) 1985-12-26 1985-12-26 透明導電膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29230385A JPS62154411A (ja) 1985-12-26 1985-12-26 透明導電膜

Publications (2)

Publication Number Publication Date
JPS62154411A JPS62154411A (ja) 1987-07-09
JPH056766B2 true JPH056766B2 (enrdf_load_stackoverflow) 1993-01-27

Family

ID=17780012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29230385A Granted JPS62154411A (ja) 1985-12-26 1985-12-26 透明導電膜

Country Status (1)

Country Link
JP (1) JPS62154411A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008044469A1 (fr) 2006-10-06 2008-04-17 Sakai Chemical Industry Co., Ltd. Particule ultrafine d'oxyde de zinc et son procédé de production
JP5697449B2 (ja) * 2008-09-04 2015-04-08 株式会社カネカ 透明電極付き基板および透明電極付き基板の製造方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2545306B2 (ja) * 1991-03-11 1996-10-16 誠 小長井 ＺｎＯ透明導電膜の製造方法
JPWO2006090806A1 (ja) 2005-02-24 2008-07-24 積水化学工業株式会社 ガリウム含有酸化亜鉛
WO2007066490A1 (ja) * 2005-12-08 2007-06-14 Nippon Mining & Metals Co., Ltd. 酸化ガリウム－酸化亜鉛系スパッタリングターゲット、透明導電膜の形成方法及び透明導電膜
WO2007072950A1 (ja) * 2005-12-22 2007-06-28 Mitsui Mining & Smelting Co., Ltd. 酸化亜鉛系透明導電膜のパターニング方法
JP4850901B2 (ja) 2006-03-17 2012-01-11 Ｊｘ日鉱日石金属株式会社 酸化亜鉛系透明導電体及び同透明導電体形成用スパッタリングターゲット
US8007693B2 (en) 2006-08-24 2011-08-30 Jx Nippon Mining & Metals Corporation Zinc oxide based transparent electric conductor, sputtering target for forming of the conductor and process for producing the target
JP5285331B2 (ja) * 2008-06-04 2013-09-11 株式会社カネカ 薄膜光電変換装置
JP5003600B2 (ja) * 2008-06-13 2012-08-15 住友金属鉱山株式会社 酸化物焼結体、ターゲット、およびそれを用いて得られる透明導電膜、導電性積層体
JP4295811B1 (ja) 2008-09-17 2009-07-15 三井金属鉱業株式会社 酸化亜鉛系ターゲット
JP2014500403A (ja) * 2010-12-24 2014-01-09 オーシャンズ キング ライティング サイエンスアンドテクノロジー カンパニー リミテッド 導電膜及びその調製方法並びに応用
JP5339100B2 (ja) * 2011-09-22 2013-11-13 住友金属鉱山株式会社 Ｚｎ−Ｓｉ−Ｏ系酸化物焼結体とその製造方法およびスパッタリングターゲットと蒸着用タブレット
JP5761253B2 (ja) * 2013-05-23 2015-08-12 住友金属鉱山株式会社 Ｚｎ−Ｓｉ−Ｏ系酸化物焼結体とその製造方法およびスパッタリングターゲットと蒸着用タブレット
JP2015135879A (ja) * 2014-01-16 2015-07-27 住友化学株式会社 高キャリア密度ｎ型ＺｎＯ薄膜及びその製造方法
JP6356520B2 (ja) * 2014-07-28 2018-07-11 株式会社カネカ 透明電極付き基板及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58220407A (ja) * 1982-06-16 1983-12-22 松下電器産業株式会社 電圧非直線抵抗器の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008044469A1 (fr) 2006-10-06 2008-04-17 Sakai Chemical Industry Co., Ltd. Particule ultrafine d'oxyde de zinc et son procédé de production
JP5697449B2 (ja) * 2008-09-04 2015-04-08 株式会社カネカ 透明電極付き基板および透明電極付き基板の製造方法

Also Published As

Publication number Publication date
JPS62154411A (ja) 1987-07-09

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