JPH0566734B2 - - Google Patents

Info

Publication number
JPH0566734B2
JPH0566734B2 JP59003049A JP304984A JPH0566734B2 JP H0566734 B2 JPH0566734 B2 JP H0566734B2 JP 59003049 A JP59003049 A JP 59003049A JP 304984 A JP304984 A JP 304984A JP H0566734 B2 JPH0566734 B2 JP H0566734B2
Authority
JP
Japan
Prior art keywords
wafer
wafers
wafer cassette
cassette
stored
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59003049A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60157230A (ja
Inventor
Hisashi Koike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP59003049A priority Critical patent/JPS60157230A/ja
Publication of JPS60157230A publication Critical patent/JPS60157230A/ja
Publication of JPH0566734B2 publication Critical patent/JPH0566734B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0608—
    • H10P72/50—
JP59003049A 1984-01-11 1984-01-11 半導体ウエハ搬送方法 Granted JPS60157230A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59003049A JPS60157230A (ja) 1984-01-11 1984-01-11 半導体ウエハ搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59003049A JPS60157230A (ja) 1984-01-11 1984-01-11 半導体ウエハ搬送方法

Publications (2)

Publication Number Publication Date
JPS60157230A JPS60157230A (ja) 1985-08-17
JPH0566734B2 true JPH0566734B2 (enExample) 1993-09-22

Family

ID=11546455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59003049A Granted JPS60157230A (ja) 1984-01-11 1984-01-11 半導体ウエハ搬送方法

Country Status (1)

Country Link
JP (1) JPS60157230A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4886412A (en) * 1986-10-28 1989-12-12 Tetron, Inc. Method and system for loading wafers
JPS6390843U (enExample) * 1986-12-03 1988-06-13
JPS6426844U (enExample) * 1987-08-11 1989-02-15
JPH02142157A (ja) * 1988-11-22 1990-05-31 Nippon M R C Kk ウェハーの有無・傾き判別装置
NL1032069C2 (nl) * 2006-06-28 2008-01-02 Meco Equip Eng Inrichting voor het in een bad behandelen van een plaatvormig substraat.
JP5185756B2 (ja) * 2008-10-01 2013-04-17 川崎重工業株式会社 基板検出装置および方法
CN107131825B (zh) * 2017-03-24 2019-08-09 北京工业大学 一种判别并记录硅片位置的检测装置及方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942978B2 (ja) * 1977-04-20 1984-10-18 株式会社日立製作所 ウエ−ハ外観検査装置
JPS6019656B2 (ja) * 1980-02-26 1985-05-17 日本電信電話株式会社 ウエハの入れ替え装置

Also Published As

Publication number Publication date
JPS60157230A (ja) 1985-08-17

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