JPS60157230A - 半導体ウエハ搬送方法 - Google Patents

半導体ウエハ搬送方法

Info

Publication number
JPS60157230A
JPS60157230A JP59003049A JP304984A JPS60157230A JP S60157230 A JPS60157230 A JP S60157230A JP 59003049 A JP59003049 A JP 59003049A JP 304984 A JP304984 A JP 304984A JP S60157230 A JPS60157230 A JP S60157230A
Authority
JP
Japan
Prior art keywords
wafer
wafers
cassette
semiconductor
wafer cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59003049A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566734B2 (enExample
Inventor
Hisashi Koike
小池　久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TELMEC CO Ltd
Original Assignee
TELMEC CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TELMEC CO Ltd filed Critical TELMEC CO Ltd
Priority to JP59003049A priority Critical patent/JPS60157230A/ja
Publication of JPS60157230A publication Critical patent/JPS60157230A/ja
Publication of JPH0566734B2 publication Critical patent/JPH0566734B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0608—
    • H10P72/50—
JP59003049A 1984-01-11 1984-01-11 半導体ウエハ搬送方法 Granted JPS60157230A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59003049A JPS60157230A (ja) 1984-01-11 1984-01-11 半導体ウエハ搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59003049A JPS60157230A (ja) 1984-01-11 1984-01-11 半導体ウエハ搬送方法

Publications (2)

Publication Number Publication Date
JPS60157230A true JPS60157230A (ja) 1985-08-17
JPH0566734B2 JPH0566734B2 (enExample) 1993-09-22

Family

ID=11546455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59003049A Granted JPS60157230A (ja) 1984-01-11 1984-01-11 半導体ウエハ搬送方法

Country Status (1)

Country Link
JP (1) JPS60157230A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6390843U (enExample) * 1986-12-03 1988-06-13
JPS6426844U (enExample) * 1987-08-11 1989-02-15
US4886412A (en) * 1986-10-28 1989-12-12 Tetron, Inc. Method and system for loading wafers
JPH02142157A (ja) * 1988-11-22 1990-05-31 Nippon M R C Kk ウェハーの有無・傾き判別装置
NL1032069C2 (nl) * 2006-06-28 2008-01-02 Meco Equip Eng Inrichting voor het in een bad behandelen van een plaatvormig substraat.
US20110205354A1 (en) * 2008-10-01 2011-08-25 Kawasaki Jukogyo Kabushiki Kaisha Apparatus and method for detecting substrates
CN107131825A (zh) * 2017-03-24 2017-09-05 北京工业大学 一种判别并记录硅片位置的检测装置及方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53129963A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Wafer appearance inspection apparatus
JPS56120124A (en) * 1980-02-26 1981-09-21 Nippon Telegr & Teleph Corp <Ntt> Wafer replacement device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53129963A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Wafer appearance inspection apparatus
JPS56120124A (en) * 1980-02-26 1981-09-21 Nippon Telegr & Teleph Corp <Ntt> Wafer replacement device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4886412A (en) * 1986-10-28 1989-12-12 Tetron, Inc. Method and system for loading wafers
JPS6390843U (enExample) * 1986-12-03 1988-06-13
JPS6426844U (enExample) * 1987-08-11 1989-02-15
JPH02142157A (ja) * 1988-11-22 1990-05-31 Nippon M R C Kk ウェハーの有無・傾き判別装置
NL1032069C2 (nl) * 2006-06-28 2008-01-02 Meco Equip Eng Inrichting voor het in een bad behandelen van een plaatvormig substraat.
WO2008023974A1 (en) * 2006-06-28 2008-02-28 Meco Equipment Engineers B.V. Device for treating a plate-shaped substrate in a bath.
US20110205354A1 (en) * 2008-10-01 2011-08-25 Kawasaki Jukogyo Kabushiki Kaisha Apparatus and method for detecting substrates
US9202732B2 (en) * 2008-10-01 2015-12-01 Kawasaki Jukogyo Kabushiki Kaisha Apparatus and method for detecting substrates
CN107131825A (zh) * 2017-03-24 2017-09-05 北京工业大学 一种判别并记录硅片位置的检测装置及方法
CN107131825B (zh) * 2017-03-24 2019-08-09 北京工业大学 一种判别并记录硅片位置的检测装置及方法

Also Published As

Publication number Publication date
JPH0566734B2 (enExample) 1993-09-22

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