JPH0566360B2 - - Google Patents
Info
- Publication number
- JPH0566360B2 JPH0566360B2 JP60170020A JP17002085A JPH0566360B2 JP H0566360 B2 JPH0566360 B2 JP H0566360B2 JP 60170020 A JP60170020 A JP 60170020A JP 17002085 A JP17002085 A JP 17002085A JP H0566360 B2 JPH0566360 B2 JP H0566360B2
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- gas
- film
- hydrogen
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010432 diamond Substances 0.000 claims description 45
- 239000007789 gas Substances 0.000 claims description 45
- 229910003460 diamond Inorganic materials 0.000 claims description 42
- 229930195733 hydrocarbon Natural products 0.000 claims description 19
- 150000002430 hydrocarbons Chemical class 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000004215 Carbon black (E152) Substances 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 239000012808 vapor phase Substances 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 19
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 14
- 239000001257 hydrogen Substances 0.000 description 12
- 229910052739 hydrogen Inorganic materials 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- -1 alicyclic hydrocarbons Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002927 oxygen compounds Chemical class 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60170020A JPS61158899A (ja) | 1985-07-31 | 1985-07-31 | ダイヤモンド膜の製法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60170020A JPS61158899A (ja) | 1985-07-31 | 1985-07-31 | ダイヤモンド膜の製法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59278645A Division JPS61183198A (ja) | 1984-12-29 | 1984-12-29 | ダイヤモンド膜の製法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61158899A JPS61158899A (ja) | 1986-07-18 |
JPH0566360B2 true JPH0566360B2 (de) | 1993-09-21 |
Family
ID=15897108
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60170020A Granted JPS61158899A (ja) | 1985-07-31 | 1985-07-31 | ダイヤモンド膜の製法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61158899A (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63117995A (ja) * | 1986-11-05 | 1988-05-21 | Kobe Steel Ltd | ダイヤモンドの気相合成法 |
JPS63117996A (ja) * | 1986-11-05 | 1988-05-21 | Kobe Steel Ltd | ダイヤモンドの気相合成法 |
JPH0776147B2 (ja) * | 1986-12-27 | 1995-08-16 | 京セラ株式会社 | ダイヤモンド膜の製造方法 |
JPH0811719B2 (ja) * | 1986-12-27 | 1996-02-07 | 京セラ株式会社 | ダイヤモンド膜の製造方法 |
JPS6461396A (en) * | 1987-09-01 | 1989-03-08 | Idemitsu Petrochemical Co | Synthesis of diamond and installation therefor |
JPH08757B2 (ja) * | 1988-12-26 | 1996-01-10 | 住友電気工業株式会社 | ダイヤモンドおよびその気相合成法 |
DE68913157T2 (de) * | 1988-05-28 | 1994-09-08 | Sumitomo Electric Industries | Verfahren zur herstellung von diamant aus der dampfphase. |
JP2730144B2 (ja) * | 1989-03-07 | 1998-03-25 | 住友電気工業株式会社 | 単結晶ダイヤモンド層形成法 |
JPH0647517B2 (ja) * | 1989-03-17 | 1994-06-22 | 株式会社石塚研究所 | 高品位ダイヤモンド及びその製造方法 |
US5704976A (en) * | 1990-07-06 | 1998-01-06 | The United States Of America As Represented By The Secretary Of The Navy | High temperature, high rate, epitaxial synthesis of diamond in a laminar plasma |
JPH04193794A (ja) * | 1990-11-28 | 1992-07-13 | Japan Steel Works Ltd:The | ダイヤモンドの合成方法 |
JPH04193795A (ja) * | 1990-11-28 | 1992-07-13 | Japan Steel Works Ltd:The | ダイヤモンドの合成方法 |
JPH059735A (ja) * | 1991-07-09 | 1993-01-19 | Kobe Steel Ltd | ダイヤモンドの気相合成方法 |
JPH06263595A (ja) * | 1993-03-10 | 1994-09-20 | Canon Inc | ダイヤモンド被覆部材及びその製造方法 |
CN105506576B (zh) * | 2016-02-02 | 2018-04-13 | 太原理工大学 | 一种高品质自支撑金刚石厚膜的制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3030188A (en) * | 1958-07-23 | 1962-04-17 | Union Carbide Corp | Synthesis of diamond |
US3371996A (en) * | 1964-01-20 | 1968-03-05 | Henry J. Hibshman | Diamond growth process |
US3749760A (en) * | 1970-04-24 | 1973-07-31 | V Varnin | Method of producing diamonds |
JPS58135117A (ja) * | 1982-01-29 | 1983-08-11 | Natl Inst For Res In Inorg Mater | ダイヤモンドの製造法 |
JPS60191097A (ja) * | 1984-03-08 | 1985-09-28 | Mitsubishi Metal Corp | 人工ダイヤモンドの析出生成方法 |
JPH0566359A (ja) * | 1991-09-09 | 1993-03-19 | Ricoh Co Ltd | 等倍結合素子 |
-
1985
- 1985-07-31 JP JP60170020A patent/JPS61158899A/ja active Granted
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3030188A (en) * | 1958-07-23 | 1962-04-17 | Union Carbide Corp | Synthesis of diamond |
US3371996A (en) * | 1964-01-20 | 1968-03-05 | Henry J. Hibshman | Diamond growth process |
US3749760A (en) * | 1970-04-24 | 1973-07-31 | V Varnin | Method of producing diamonds |
JPS58135117A (ja) * | 1982-01-29 | 1983-08-11 | Natl Inst For Res In Inorg Mater | ダイヤモンドの製造法 |
JPS60191097A (ja) * | 1984-03-08 | 1985-09-28 | Mitsubishi Metal Corp | 人工ダイヤモンドの析出生成方法 |
JPH0566359A (ja) * | 1991-09-09 | 1993-03-19 | Ricoh Co Ltd | 等倍結合素子 |
Also Published As
Publication number | Publication date |
---|---|
JPS61158899A (ja) | 1986-07-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |