JPH0564414B2 - - Google Patents

Info

Publication number
JPH0564414B2
JPH0564414B2 JP59078588A JP7858884A JPH0564414B2 JP H0564414 B2 JPH0564414 B2 JP H0564414B2 JP 59078588 A JP59078588 A JP 59078588A JP 7858884 A JP7858884 A JP 7858884A JP H0564414 B2 JPH0564414 B2 JP H0564414B2
Authority
JP
Japan
Prior art keywords
needle
voltage
field emission
electron beam
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59078588A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60225345A (ja
Inventor
Shigeyuki Hosoki
Mikio Ichihashi
Hideo Todokoro
Norio Saito
Susumu Ozasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59078588A priority Critical patent/JPS60225345A/ja
Publication of JPS60225345A publication Critical patent/JPS60225345A/ja
Publication of JPH0564414B2 publication Critical patent/JPH0564414B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242—Filament heating power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59078588A 1984-04-20 1984-04-20 電界放射方法およびそれに用いる電子線装置 Granted JPS60225345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59078588A JPS60225345A (ja) 1984-04-20 1984-04-20 電界放射方法およびそれに用いる電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59078588A JPS60225345A (ja) 1984-04-20 1984-04-20 電界放射方法およびそれに用いる電子線装置

Publications (2)

Publication Number Publication Date
JPS60225345A JPS60225345A (ja) 1985-11-09
JPH0564414B2 true JPH0564414B2 (cg-RX-API-DMAC7.html) 1993-09-14

Family

ID=13666068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59078588A Granted JPS60225345A (ja) 1984-04-20 1984-04-20 電界放射方法およびそれに用いる電子線装置

Country Status (1)

Country Link
JP (1) JPS60225345A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2718144B2 (ja) * 1989-02-21 1998-02-25 松下電器産業株式会社 電界放出型冷陰極
JPH1196892A (ja) 1997-09-17 1999-04-09 Nec Corp フィールドエミッタ
JP4939565B2 (ja) * 2009-04-06 2012-05-30 キヤノン株式会社 電子ビーム露光装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3817592A (en) * 1972-09-29 1974-06-18 Linfield Res Inst Method for reproducibly fabricating and using stable thermal-field emission cathodes
JPS52128047A (en) * 1976-04-21 1977-10-27 Hitachi Ltd Field emission type electron gun device
JPS5626096A (en) * 1979-08-02 1981-03-13 Dainippon Ink & Chemicals Sizing agent for cationic paper making
JPS56143638A (en) * 1980-04-09 1981-11-09 Hitachi Ltd Fabrication of field emission cathode
JPS58102452A (ja) * 1981-12-14 1983-06-18 Jeol Ltd 電界放射型電子銃

Also Published As

Publication number Publication date
JPS60225345A (ja) 1985-11-09

Similar Documents

Publication Publication Date Title
EP1760761B1 (en) Charged particle beam emitting device and method for operating a charged particle beam emitting device
US6798126B2 (en) High angular intensity Schottky electron point source
JP2001325910A (ja) 電子銃とその使用方法
JP2001236922A (ja) 質量分析装置
CN100585785C (zh) 场致发射型电子枪及使用了该电子枪的电子束装置
JPH0564414B2 (cg-RX-API-DMAC7.html)
JP4317779B2 (ja) 電界放出型電子銃およびそれを用いた電子ビーム応用装置
US5961362A (en) Method for in situ cleaning of electron emitters in a field emission device
JP2807719B2 (ja) 集束イオンビーム装置の液体金属イオン源の動作方法
US5993636A (en) Method of making a needle electrode
US20080169743A1 (en) Field emission electron gun and method of operating the same
US5883467A (en) Field emission device having means for in situ feeding of hydrogen
JPH0684450A (ja) 熱電界放射陰極
JPH1186778A (ja) イオン化装置
JP2943226B2 (ja) ガスクロマトグラフ質量分析計のイオン源
JP3250724B2 (ja) 針状電極の製造方法
JP2004139790A (ja) Ｘ線管装置
JPH0582041A (ja) 液体金属イオン源
JPH03274642A (ja) 高輝度Ｌ↓ａＢ↓６陰極
Zou et al. On-line measurement system of GaAs photocathodes and its applications
JP3553359B2 (ja) 電子線源
JPH0794134A (ja) 電子源安定化方法及び装置
JP2000251751A (ja) 液体金属イオン源、および、液体金属イオン源のフローインピーダンス測定方法
JP2986742B2 (ja) 真空内基板加熱装置
JPH08171879A (ja) ショットキーエミッション電子源の動作温度設定方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term