JPS60225345A - 電界放射方法およびそれに用いる電子線装置 - Google Patents

電界放射方法およびそれに用いる電子線装置

Info

Publication number
JPS60225345A
JPS60225345A JP59078588A JP7858884A JPS60225345A JP S60225345 A JPS60225345 A JP S60225345A JP 59078588 A JP59078588 A JP 59078588A JP 7858884 A JP7858884 A JP 7858884A JP S60225345 A JPS60225345 A JP S60225345A
Authority
JP
Japan
Prior art keywords
filament
field emission
power source
current
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59078588A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0564414B2 (cg-RX-API-DMAC7.html
Inventor
Shigeyuki Hosoki
茂行 細木
Mikio Ichihashi
幹雄 市橋
Hideo Todokoro
秀男 戸所
Norio Saito
徳郎 斉藤
Susumu Ozasa
小笹　進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59078588A priority Critical patent/JPS60225345A/ja
Publication of JPS60225345A publication Critical patent/JPS60225345A/ja
Publication of JPH0564414B2 publication Critical patent/JPH0564414B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242—Filament heating power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59078588A 1984-04-20 1984-04-20 電界放射方法およびそれに用いる電子線装置 Granted JPS60225345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59078588A JPS60225345A (ja) 1984-04-20 1984-04-20 電界放射方法およびそれに用いる電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59078588A JPS60225345A (ja) 1984-04-20 1984-04-20 電界放射方法およびそれに用いる電子線装置

Publications (2)

Publication Number Publication Date
JPS60225345A true JPS60225345A (ja) 1985-11-09
JPH0564414B2 JPH0564414B2 (cg-RX-API-DMAC7.html) 1993-09-14

Family

ID=13666068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59078588A Granted JPS60225345A (ja) 1984-04-20 1984-04-20 電界放射方法およびそれに用いる電子線装置

Country Status (1)

Country Link
JP (1) JPS60225345A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02220337A (ja) * 1989-02-21 1990-09-03 Matsushita Electric Ind Co Ltd 電界放出型冷陰極
US6239538B1 (en) 1997-09-17 2001-05-29 Nec Corporation Field emitter
JP2009152645A (ja) * 2009-04-06 2009-07-09 Canon Inc 電子ビーム照明装置、および該照明装置を用いた電子ビーム露光装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3817592A (en) * 1972-09-29 1974-06-18 Linfield Res Inst Method for reproducibly fabricating and using stable thermal-field emission cathodes
JPS52128047A (en) * 1976-04-21 1977-10-27 Hitachi Ltd Field emission type electron gun device
JPS5626096A (en) * 1979-08-02 1981-03-13 Dainippon Ink & Chemicals Sizing agent for cationic paper making
JPS56143638A (en) * 1980-04-09 1981-11-09 Hitachi Ltd Fabrication of field emission cathode
JPS58102452A (ja) * 1981-12-14 1983-06-18 Jeol Ltd 電界放射型電子銃

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3817592A (en) * 1972-09-29 1974-06-18 Linfield Res Inst Method for reproducibly fabricating and using stable thermal-field emission cathodes
JPS52128047A (en) * 1976-04-21 1977-10-27 Hitachi Ltd Field emission type electron gun device
JPS5626096A (en) * 1979-08-02 1981-03-13 Dainippon Ink & Chemicals Sizing agent for cationic paper making
JPS56143638A (en) * 1980-04-09 1981-11-09 Hitachi Ltd Fabrication of field emission cathode
JPS58102452A (ja) * 1981-12-14 1983-06-18 Jeol Ltd 電界放射型電子銃

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02220337A (ja) * 1989-02-21 1990-09-03 Matsushita Electric Ind Co Ltd 電界放出型冷陰極
US6239538B1 (en) 1997-09-17 2001-05-29 Nec Corporation Field emitter
JP2009152645A (ja) * 2009-04-06 2009-07-09 Canon Inc 電子ビーム照明装置、および該照明装置を用いた電子ビーム露光装置

Also Published As

Publication number Publication date
JPH0564414B2 (cg-RX-API-DMAC7.html) 1993-09-14

Similar Documents

Publication Publication Date Title
JP5127042B2 (ja) 電離真空計
EP0303486B1 (en) Method of ion implantation
US4488045A (en) Metal ion source
JP2001325910A (ja) 電子銃とその使用方法
JP2001236922A (ja) 質量分析装置
JPS60225345A (ja) 電界放射方法およびそれに用いる電子線装置
US4095171A (en) Alkali metal ionization detector
JP2807719B2 (ja) 集束イオンビーム装置の液体金属イオン源の動作方法
US5961362A (en) Method for in situ cleaning of electron emitters in a field emission device
US20080169743A1 (en) Field emission electron gun and method of operating the same
JP2005276720A (ja) 電界放出型電子銃およびそれを用いた電子ビーム応用装置
JPH0684450A (ja) 熱電界放射陰極
Laan et al. Triggering of negative corona
JPH1186778A (ja) イオン化装置
JPH0582041A (ja) 液体金属イオン源
JPS6084744A (ja) 熱陰極
JP2943226B2 (ja) ガスクロマトグラフ質量分析計のイオン源
JPH08171879A (ja) ショットキーエミッション電子源の動作温度設定方法
JPH1031955A (ja) 熱拡散補給型電子源の製造方法およびその電子源を用いた電子線応用装置
JPH0794134A (ja) 電子源安定化方法及び装置
JP3164651B2 (ja) 熱電界放射陰極の操作方法
Noda et al. Electrohydrodynamic ion source with a reservoir and an emitter tip heated by electron bombardment
JPH03274642A (ja) 高輝度Ｌ↓ａＢ↓６陰極
JPH06243776A (ja) 熱電界放射電子銃
JPH042937A (ja) 極高真空計測方法及びその装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term