JPH056338B2 - - Google Patents

Info

Publication number
JPH056338B2
JPH056338B2 JP57168001A JP16800182A JPH056338B2 JP H056338 B2 JPH056338 B2 JP H056338B2 JP 57168001 A JP57168001 A JP 57168001A JP 16800182 A JP16800182 A JP 16800182A JP H056338 B2 JPH056338 B2 JP H056338B2
Authority
JP
Japan
Prior art keywords
repetitive
frame
data
repeating
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57168001A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5957427A (ja
Inventor
Kyomi Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP16800182A priority Critical patent/JPS5957427A/ja
Publication of JPS5957427A publication Critical patent/JPS5957427A/ja
Publication of JPH056338B2 publication Critical patent/JPH056338B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP16800182A 1982-09-27 1982-09-27 電子ビ−ム描画デ−タ作成方法 Granted JPS5957427A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16800182A JPS5957427A (ja) 1982-09-27 1982-09-27 電子ビ−ム描画デ−タ作成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16800182A JPS5957427A (ja) 1982-09-27 1982-09-27 電子ビ−ム描画デ−タ作成方法

Publications (2)

Publication Number Publication Date
JPS5957427A JPS5957427A (ja) 1984-04-03
JPH056338B2 true JPH056338B2 (enExample) 1993-01-26

Family

ID=15859957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16800182A Granted JPS5957427A (ja) 1982-09-27 1982-09-27 電子ビ−ム描画デ−タ作成方法

Country Status (1)

Country Link
JP (1) JPS5957427A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS614228A (ja) * 1984-06-18 1986-01-10 Toshiba Corp 荷電ビ−ム描画方法
JPS62156816A (ja) * 1985-12-28 1987-07-11 Toshiba Corp パタ−ン描画方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5923102B2 (ja) * 1977-12-16 1984-05-30 富士通株式会社 電子ビ−ム露光装置
JPS5924538B2 (ja) * 1980-08-08 1984-06-09 株式会社東芝 パタ−ン形成方法

Also Published As

Publication number Publication date
JPS5957427A (ja) 1984-04-03

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