JPH0555947B2 - - Google Patents
Info
- Publication number
- JPH0555947B2 JPH0555947B2 JP61161062A JP16106286A JPH0555947B2 JP H0555947 B2 JPH0555947 B2 JP H0555947B2 JP 61161062 A JP61161062 A JP 61161062A JP 16106286 A JP16106286 A JP 16106286A JP H0555947 B2 JPH0555947 B2 JP H0555947B2
- Authority
- JP
- Japan
- Prior art keywords
- disk
- retainer
- turntable
- centering hub
- spindle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000000694 effects Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Holding Or Fastening Of Disk On Rotational Shaft (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61161062A JPS6316455A (ja) | 1986-07-08 | 1986-07-08 | デイスククランプ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61161062A JPS6316455A (ja) | 1986-07-08 | 1986-07-08 | デイスククランプ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6316455A JPS6316455A (ja) | 1988-01-23 |
JPH0555947B2 true JPH0555947B2 (hu) | 1993-08-18 |
Family
ID=15727886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61161062A Granted JPS6316455A (ja) | 1986-07-08 | 1986-07-08 | デイスククランプ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6316455A (hu) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW484184B (en) | 1998-11-06 | 2002-04-21 | Canon Kk | Sample separating apparatus and method, and substrate manufacturing method |
JP2000150836A (ja) * | 1998-11-06 | 2000-05-30 | Canon Inc | 試料の処理システム |
-
1986
- 1986-07-08 JP JP61161062A patent/JPS6316455A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6316455A (ja) | 1988-01-23 |
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