JPH0555267B2 - - Google Patents

Info

Publication number
JPH0555267B2
JPH0555267B2 JP63030486A JP3048688A JPH0555267B2 JP H0555267 B2 JPH0555267 B2 JP H0555267B2 JP 63030486 A JP63030486 A JP 63030486A JP 3048688 A JP3048688 A JP 3048688A JP H0555267 B2 JPH0555267 B2 JP H0555267B2
Authority
JP
Japan
Prior art keywords
porous
chuck table
cleaning
grinding
cleaning fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63030486A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01205950A (ja
Inventor
Toshuki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Abrasive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Abrasive Systems Ltd filed Critical Disco Abrasive Systems Ltd
Priority to JP63030486A priority Critical patent/JPH01205950A/ja
Publication of JPH01205950A publication Critical patent/JPH01205950A/ja
Publication of JPH0555267B2 publication Critical patent/JPH0555267B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042—Devices for removing chips

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP63030486A 1988-02-12 1988-02-12 ポーラスチャックテーブルの洗浄方法およびその装置 Granted JPH01205950A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63030486A JPH01205950A (ja) 1988-02-12 1988-02-12 ポーラスチャックテーブルの洗浄方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63030486A JPH01205950A (ja) 1988-02-12 1988-02-12 ポーラスチャックテーブルの洗浄方法およびその装置

Publications (2)

Publication Number Publication Date
JPH01205950A JPH01205950A (ja) 1989-08-18
JPH0555267B2 true JPH0555267B2 (enrdf_load_stackoverflow) 1993-08-16

Family

ID=12305164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63030486A Granted JPH01205950A (ja) 1988-02-12 1988-02-12 ポーラスチャックテーブルの洗浄方法およびその装置

Country Status (1)

Country Link
JP (1) JPH01205950A (enrdf_load_stackoverflow)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4672924B2 (ja) * 2001-08-02 2011-04-20 株式会社ディスコ 吸着パッド洗浄装置及び該装置を用いた吸着パッド洗浄方法
JP4617028B2 (ja) * 2001-08-17 2011-01-19 株式会社ディスコ 加工歪除去装置
JP4766678B2 (ja) * 2006-01-06 2011-09-07 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 研削装置のチャックテーブルの洗浄装置
JP5085273B2 (ja) * 2007-10-29 2012-11-28 コマツＮｔｃ株式会社 チャックテーブル洗浄装置
JP2009160700A (ja) * 2008-01-08 2009-07-23 Disco Abrasive Syst Ltd 研磨装置
JP6141153B2 (ja) * 2013-09-10 2017-06-07 株式会社ディスコ 異物除去工具及び異物除去方法
JP6622610B2 (ja) * 2016-02-09 2019-12-18 株式会社ディスコ 研削装置
JP6812070B2 (ja) * 2016-11-10 2021-01-13 株式会社ディスコ チャックテーブル
JP6750582B2 (ja) * 2017-08-23 2020-09-02 株式会社Sumco チャックテーブルの洗浄装置および該洗浄装置を備える研削装置
JP7394531B2 (ja) * 2019-03-12 2023-12-08 株式会社東京精密 ウェハチャックの洗浄方法及び装置
JP7650590B2 (ja) * 2021-03-29 2025-03-25 株式会社ディスコ 研磨装置
JP2023028360A (ja) * 2021-08-19 2023-03-03 株式会社ディスコ 加工装置、及びチャックテーブルの保持面の洗浄方法
WO2025041646A1 (ja) * 2023-08-23 2025-02-27 東京エレクトロン株式会社 チャック洗浄装置、基板加工装置、及び基板加工方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56152562A (en) * 1980-04-24 1981-11-26 Fujitsu Ltd Grinder
JPS59196163A (ja) * 1983-04-05 1984-11-07 Kanetsuu Kogyo Kk チヤツク自動クリ−ナ−
JPH01171762A (ja) * 1987-12-28 1989-07-06 Shibayama Kikai Kk 半導体のウエハ研削盤の吸着チャック洗浄装置

Also Published As

Publication number Publication date
JPH01205950A (ja) 1989-08-18

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