JPH0554187B2 - - Google Patents
Info
- Publication number
- JPH0554187B2 JPH0554187B2 JP61294339A JP29433986A JPH0554187B2 JP H0554187 B2 JPH0554187 B2 JP H0554187B2 JP 61294339 A JP61294339 A JP 61294339A JP 29433986 A JP29433986 A JP 29433986A JP H0554187 B2 JPH0554187 B2 JP H0554187B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- hole
- processing
- center
- flat part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 81
- 239000007788 liquid Substances 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000012856 packing Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000005236 sound signal Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Holding Or Fastening Of Disk On Rotational Shaft (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61294339A JPS63146265A (ja) | 1986-12-09 | 1986-12-09 | 基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61294339A JPS63146265A (ja) | 1986-12-09 | 1986-12-09 | 基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63146265A JPS63146265A (ja) | 1988-06-18 |
| JPH0554187B2 true JPH0554187B2 (de) | 1993-08-11 |
Family
ID=17806422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61294339A Granted JPS63146265A (ja) | 1986-12-09 | 1986-12-09 | 基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63146265A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69634030T2 (de) * | 1995-10-13 | 2005-05-19 | Kitano Engineering Co., Ltd., Komatsushima | Drehender Haltetisch, mit Stift, zum darauf Festhalten und Drehen einer Informationsscheibe |
| NL1017267C2 (nl) * | 2000-07-14 | 2002-01-18 | Otb Group Bv | Werkwijze en inrichting voor het vervaardigen van een DVD-schijf. |
| DE10113833A1 (de) * | 2001-03-21 | 2002-10-24 | Steag Hamatech Ag | Vorrichtung zum Zusammenfügen von Substraten |
| JP2003091887A (ja) * | 2001-09-20 | 2003-03-28 | Tdk Corp | 多層光記録媒体の製造方法および多層光記録媒体製造装置 |
| JP2003099991A (ja) * | 2001-09-27 | 2003-04-04 | Tdk Corp | 光記録媒体の製造方法および光記録媒体製造装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS598177A (ja) * | 1982-07-06 | 1984-01-17 | Seiko Epson Corp | デイスク・クランプ機構 |
| JPS61214273A (ja) * | 1985-03-20 | 1986-09-24 | Matsushita Electric Ind Co Ltd | 円盤状記録媒体の回転駆動装置 |
-
1986
- 1986-12-09 JP JP61294339A patent/JPS63146265A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS598177A (ja) * | 1982-07-06 | 1984-01-17 | Seiko Epson Corp | デイスク・クランプ機構 |
| JPS61214273A (ja) * | 1985-03-20 | 1986-09-24 | Matsushita Electric Ind Co Ltd | 円盤状記録媒体の回転駆動装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63146265A (ja) | 1988-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101375423B1 (ko) | 피처리체를 액체 처리하는 처리 장치 | |
| JP2845738B2 (ja) | 回転式基板処理装置の基板回転保持具 | |
| KR100452898B1 (ko) | 패턴 형성 방법 및 약액 처리 방법 | |
| JPH0554187B2 (de) | ||
| CN114649233A (zh) | 晶圆清洗装置及清洗晶圆的方法 | |
| JP2000252252A (ja) | スピン処理用支持ピン及びスピン処理装置 | |
| JPH05253853A (ja) | 薄片吸着装置および薄片吸着装置の洗浄方法 | |
| JPS63143970A (ja) | 基板載置台 | |
| JPH02192717A (ja) | レジスト除去装置 | |
| JP3210893B2 (ja) | 処理装置および処理方法 | |
| JP3289208B2 (ja) | 洗浄処理方法及び洗浄処理装置 | |
| JPH04206626A (ja) | 周辺レジスト除去方法 | |
| JPH031823B2 (de) | ||
| KR20030012364A (ko) | 레이저를 이용한 반도체 소자의 세정 방법 | |
| TWI748279B (zh) | 基板處理裝置 | |
| JP2003051477A (ja) | 基板処理装置 | |
| JPH11186123A (ja) | ウエーハ上に形成された感光膜の現像方法 | |
| JPH08290095A (ja) | 回転式基板塗布装置 | |
| JPH0628224Y2 (ja) | 基板回転処理装置 | |
| JPH03256321A (ja) | レジスト膜形成装置 | |
| KR100217326B1 (ko) | 반도체 제조설비에서 스피너장치 | |
| JPH01119024A (ja) | レジスト塗布装置 | |
| JPS60121719A (ja) | 回転処理装置 | |
| JPH05283327A (ja) | レジスト塗布装置 | |
| JP2002208550A (ja) | 塗布装置 |