JPH0553070B2 - - Google Patents

Info

Publication number
JPH0553070B2
JPH0553070B2 JP61016279A JP1627986A JPH0553070B2 JP H0553070 B2 JPH0553070 B2 JP H0553070B2 JP 61016279 A JP61016279 A JP 61016279A JP 1627986 A JP1627986 A JP 1627986A JP H0553070 B2 JPH0553070 B2 JP H0553070B2
Authority
JP
Japan
Prior art keywords
thin film
pattern
wiring metal
film resistor
metal pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61016279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62173752A (ja
Inventor
Kazuya Kauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP1627986A priority Critical patent/JPS62173752A/ja
Publication of JPS62173752A publication Critical patent/JPS62173752A/ja
Publication of JPH0553070B2 publication Critical patent/JPH0553070B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP1627986A 1986-01-27 1986-01-27 半導体装置 Granted JPS62173752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1627986A JPS62173752A (ja) 1986-01-27 1986-01-27 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1627986A JPS62173752A (ja) 1986-01-27 1986-01-27 半導体装置

Publications (2)

Publication Number Publication Date
JPS62173752A JPS62173752A (ja) 1987-07-30
JPH0553070B2 true JPH0553070B2 (enrdf_load_stackoverflow) 1993-08-09

Family

ID=11912105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1627986A Granted JPS62173752A (ja) 1986-01-27 1986-01-27 半導体装置

Country Status (1)

Country Link
JP (1) JPS62173752A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2717300B1 (en) 2011-05-24 2020-03-18 Sony Corporation Semiconductor device
JP5970747B2 (ja) * 2011-05-24 2016-08-17 ソニー株式会社 半導体装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5720163U (enrdf_load_stackoverflow) * 1980-07-08 1982-02-02

Also Published As

Publication number Publication date
JPS62173752A (ja) 1987-07-30

Similar Documents

Publication Publication Date Title
JPH0553070B2 (enrdf_load_stackoverflow)
JP3190120B2 (ja) 計測用抵抗器およびその製造方法
US4194174A (en) Method for fabricating ballasted finger electrode
TW571426B (en) Manufacturing method of non-optical etched thin film resistor
JP2687469B2 (ja) 半導体装置
JPS63169058A (ja) 薄膜集積回路
JPS61229302A (ja) 並置型抵抗体装置
JP3164040B2 (ja) ポリシリコン抵抗素子の製造方法
JPS63237458A (ja) 半導体抵抗素子
JPH05175428A (ja) 集積回路装置
JPH03179779A (ja) 絶縁ゲート型半導体装置
JPS626647Y2 (enrdf_load_stackoverflow)
JP3641348B2 (ja) 半導体装置の製法
JPH0140517B2 (enrdf_load_stackoverflow)
JPS63278361A (ja) 半導体装置と半導体装置の抵抗トリミング法
JPS63207164A (ja) 薄膜抵抗体装置
JPS5830150A (ja) 薄膜集積回路
JPH04254910A (ja) 磁気抵抗効果素子及びその製造方法
JPH0740497A (ja) 膜構造
JPS6362301A (ja) 薄膜集積回路
JPS63205991A (ja) 回路基板
JPH04162562A (ja) 半導体集積回路
JPS61243910A (ja) 薄膜磁気ヘツド
JPS63280448A (ja) 半導体装置と半導体装置の抵抗トリミング法
JPS61228662A (ja) 半導体装置の製造方法