JPH0543184B2 - - Google Patents
Info
- Publication number
- JPH0543184B2 JPH0543184B2 JP24626385A JP24626385A JPH0543184B2 JP H0543184 B2 JPH0543184 B2 JP H0543184B2 JP 24626385 A JP24626385 A JP 24626385A JP 24626385 A JP24626385 A JP 24626385A JP H0543184 B2 JPH0543184 B2 JP H0543184B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer ring
- wafer
- cassette
- ring
- storage section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Special Conveying (AREA)
- De-Stacking Of Articles (AREA)
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24626385A JPS62106642A (ja) | 1985-11-05 | 1985-11-05 | ウェハリングの供給・返送方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24626385A JPS62106642A (ja) | 1985-11-05 | 1985-11-05 | ウェハリングの供給・返送方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62106642A JPS62106642A (ja) | 1987-05-18 |
| JPH0543184B2 true JPH0543184B2 (en, 2012) | 1993-06-30 |
Family
ID=17145917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24626385A Granted JPS62106642A (ja) | 1985-11-05 | 1985-11-05 | ウェハリングの供給・返送方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62106642A (en, 2012) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5387067A (en) * | 1993-01-14 | 1995-02-07 | Applied Materials, Inc. | Direct load/unload semiconductor wafer cassette apparatus and transfer system |
| JPH0964148A (ja) * | 1995-08-18 | 1997-03-07 | Shinkawa Ltd | ウェーハリングの供給・返送装置 |
| JP3198401B2 (ja) * | 1995-08-18 | 2001-08-13 | 株式会社新川 | ウェーハリングの供給・返送装置 |
| JP3180208B2 (ja) * | 1995-09-18 | 2001-06-25 | 株式会社新川 | ペレットピックアップ装置 |
| JPH10107128A (ja) * | 1996-10-01 | 1998-04-24 | Shinkawa Ltd | ウェーハリングの供給装置 |
| KR102490593B1 (ko) * | 2016-08-22 | 2023-01-20 | 세메스 주식회사 | 웨이퍼링 이송 장치 |
-
1985
- 1985-11-05 JP JP24626385A patent/JPS62106642A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62106642A (ja) | 1987-05-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |