JPH0542764B2 - - Google Patents

Info

Publication number
JPH0542764B2
JPH0542764B2 JP61052947A JP5294786A JPH0542764B2 JP H0542764 B2 JPH0542764 B2 JP H0542764B2 JP 61052947 A JP61052947 A JP 61052947A JP 5294786 A JP5294786 A JP 5294786A JP H0542764 B2 JPH0542764 B2 JP H0542764B2
Authority
JP
Japan
Prior art keywords
substrate
base material
transparent conductive
conductive film
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61052947A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62216112A (ja
Inventor
Akira Tazaki
Makoto Yoshida
Shuichi Ajiki
Kazuhiro Myamoto
Kazuo Umeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Stanley Electric Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd, Stanley Electric Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP5294786A priority Critical patent/JPS62216112A/ja
Publication of JPS62216112A publication Critical patent/JPS62216112A/ja
Publication of JPH0542764B2 publication Critical patent/JPH0542764B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP5294786A 1986-03-11 1986-03-11 透明導電膜の製造方法 Granted JPS62216112A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5294786A JPS62216112A (ja) 1986-03-11 1986-03-11 透明導電膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5294786A JPS62216112A (ja) 1986-03-11 1986-03-11 透明導電膜の製造方法

Publications (2)

Publication Number Publication Date
JPS62216112A JPS62216112A (ja) 1987-09-22
JPH0542764B2 true JPH0542764B2 (enrdf_load_stackoverflow) 1993-06-29

Family

ID=12929066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5294786A Granted JPS62216112A (ja) 1986-03-11 1986-03-11 透明導電膜の製造方法

Country Status (1)

Country Link
JP (1) JPS62216112A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100186286B1 (ko) * 1995-12-22 1999-05-15 한갑수 주석산화물 박막을 이용한 메탄 가스 감지용 센서 및 프로판 가스 감지용 센서와 그 제조방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200757A (ja) * 1983-04-26 1984-11-14 Konishiroku Photo Ind Co Ltd 蒸着方法
JPS60132319A (ja) * 1983-12-20 1985-07-15 Fuji Xerox Co Ltd 薄膜形成方法

Also Published As

Publication number Publication date
JPS62216112A (ja) 1987-09-22

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