JPS5668932A - Manufacture of magnetic recording medium - Google Patents
Manufacture of magnetic recording mediumInfo
- Publication number
- JPS5668932A JPS5668932A JP14482379A JP14482379A JPS5668932A JP S5668932 A JPS5668932 A JP S5668932A JP 14482379 A JP14482379 A JP 14482379A JP 14482379 A JP14482379 A JP 14482379A JP S5668932 A JPS5668932 A JP S5668932A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- electrode
- metal thin
- oxygen
- strike
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To form a thin film of a chromium oxide as a protection film on a ferromagnetic metal thin film for magnetic recording by a means of reactive cluster ion beams.
CONSTITUTION: The device equipped with magnetic metal thin film 10, cluster generator 3, oxygen supplier 7, ionizer 4, accelerating electrode 5, shutter 8, and substrate holder 9 in the vacuum chamber with an exhaust outlet is used after Cr is supplied into crucible 33, the chamber is evacuated to 10-4W10-5 forr. Next, Cr metal clusters and supplied oxygen molecules generated by spraying Cr vapor out of spraying hole 34 through the heating of electrode 31 are emitted from filament 41 heated by being fed with electric current to strike thermoelectrons accelerated by grating electrode 44 for ionization. Ionized Cr metal cluster ions and oxygen ions are accelerated by accelerating electrode 5 to strike magnetic metal thin film 10, so that they will form a Cr oxide film together with neutral clusters and oxygen molecules.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14482379A JPS5668932A (en) | 1979-11-07 | 1979-11-07 | Manufacture of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14482379A JPS5668932A (en) | 1979-11-07 | 1979-11-07 | Manufacture of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5668932A true JPS5668932A (en) | 1981-06-09 |
| JPS613009B2 JPS613009B2 (en) | 1986-01-29 |
Family
ID=15371276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14482379A Granted JPS5668932A (en) | 1979-11-07 | 1979-11-07 | Manufacture of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5668932A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58108030A (en) * | 1981-12-18 | 1983-06-28 | Matsushita Electric Ind Co Ltd | Metallic thin film type magnetic recording medium |
| JPS60162773A (en) * | 1984-01-31 | 1985-08-24 | Futaba Corp | Ion beam vapor deposition device |
| JPS60255972A (en) * | 1984-05-31 | 1985-12-17 | Mitsubishi Electric Corp | Thin film vapor deposition apparatus |
| JPH0196822A (en) * | 1987-10-09 | 1989-04-14 | Mitsubishi Electric Corp | Magnetic recording medium |
-
1979
- 1979-11-07 JP JP14482379A patent/JPS5668932A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58108030A (en) * | 1981-12-18 | 1983-06-28 | Matsushita Electric Ind Co Ltd | Metallic thin film type magnetic recording medium |
| JPS60162773A (en) * | 1984-01-31 | 1985-08-24 | Futaba Corp | Ion beam vapor deposition device |
| JPS6339667B2 (en) * | 1984-01-31 | 1988-08-05 | Futaba Denshi Kogyo Kk | |
| JPS60255972A (en) * | 1984-05-31 | 1985-12-17 | Mitsubishi Electric Corp | Thin film vapor deposition apparatus |
| JPH0236673B2 (en) * | 1984-05-31 | 1990-08-20 | Mitsubishi Electric Corp | |
| JPH0196822A (en) * | 1987-10-09 | 1989-04-14 | Mitsubishi Electric Corp | Magnetic recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS613009B2 (en) | 1986-01-29 |
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