JPS57127930A - Manufacture for magnetic recording medium - Google Patents

Manufacture for magnetic recording medium

Info

Publication number
JPS57127930A
JPS57127930A JP1351181A JP1351181A JPS57127930A JP S57127930 A JPS57127930 A JP S57127930A JP 1351181 A JP1351181 A JP 1351181A JP 1351181 A JP1351181 A JP 1351181A JP S57127930 A JPS57127930 A JP S57127930A
Authority
JP
Japan
Prior art keywords
beams
particles
bombarded
electric field
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1351181A
Other languages
Japanese (ja)
Other versions
JPH0120495B2 (en
Inventor
Masahiro Hotta
Kazuhiro Fukaya
Yoichi Mikami
Shinsaku Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP1351181A priority Critical patent/JPS57127930A/en
Publication of JPS57127930A publication Critical patent/JPS57127930A/en
Publication of JPH0120495B2 publication Critical patent/JPH0120495B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851Coating a support with a magnetic layer by sputtering

Abstract

PURPOSE:To reduce the variance in reproduced output, by forming a magnetic substance layer by making ion beams consisting of evaporated particles of ferromagnetic substance metal forming the magnetic substance layer incident to a base through sequentially different incident angles. CONSTITUTION:In a vacuum tank kept at a high vacuum, an evaporation source magnetic material 9 is bombarded with electron beams by a deflection E gun of an ion source unit 1 for heating and evaporation to form evaporated particles, and a filament 10 is heated and energized with power supplies 20, 21 located at the outside of the vacuum tank to discharge thermoelectrons 2. Further, a negative DC voltage is applied and the said particles are bombarded by accelerating electric field for the said electrons for ionization, and the said evaporated particle ions are accelerated by electric field with an accelerated electrode 6 applied by a negative high voltage from a power supply 22 to obtain ion beams, and the beams are irradiated on a base 2 running at different incident angles at guide rolls 26, 27, 28.
JP1351181A 1981-01-30 1981-01-30 Manufacture for magnetic recording medium Granted JPS57127930A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1351181A JPS57127930A (en) 1981-01-30 1981-01-30 Manufacture for magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1351181A JPS57127930A (en) 1981-01-30 1981-01-30 Manufacture for magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS57127930A true JPS57127930A (en) 1982-08-09
JPH0120495B2 JPH0120495B2 (en) 1989-04-17

Family

ID=11835163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1351181A Granted JPS57127930A (en) 1981-01-30 1981-01-30 Manufacture for magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS57127930A (en)

Also Published As

Publication number Publication date
JPH0120495B2 (en) 1989-04-17

Similar Documents

Publication Publication Date Title
EP0184812A2 (en) High frequency plasma generation apparatus
JPS5845892B2 (en) Sputter deposition equipment
US4122347A (en) Ion source
SE8700017D0 (en) ION PLASMA ELECTRON GUN
US5369337A (en) DC or HF ion source
US3702416A (en) Ion source having a uniform radial density
JPS56127935A (en) Production of magnetic recording medium
JPS57127930A (en) Manufacture for magnetic recording medium
JPS5668932A (en) Manufacture of magnetic recording medium
GB1420545A (en) Evaporation by electron beans
JPH0488165A (en) Sputtering type ion source
JPS5744230A (en) Production of magnetic recording medium
JPS55104328A (en) Macromolecular material having clear conducting film and production thereof
JP2566602B2 (en) Ion source
JP2627420B2 (en) Fast atom beam source
JP2735836B2 (en) Thin film formation method
JPS5740758A (en) Method and device for manufacturing magnetic recording medium
JPS5744231A (en) Production of magnetic recording medium
JPH0721993B2 (en) Sputter type ion source
JPH0543783B2 (en)
JPS57138060A (en) Manufacture for magnetic recording medium
JPS6254076A (en) Ion plating device
Morimoto et al. Ion Plating Apparatus
JPS589156B2 (en) Ionization plating device
JPS6167766A (en) Ion plating device